Download VLSI Class Lecturer-3 PDF Free - Full Version
Download VLSI Class Lecturer-3 by ['Rubel Riad'] in PDF format completely FREE. No registration required, no payment needed. Get instant access to this valuable resource on PDFdrive.to!
About VLSI Class Lecturer-3
The document discusses various methods for epitaxial growth including vapor phase epitaxy (VPE), liquid phase epitaxy (LPE), and molecular beam epitaxy (MBE). It also covers thin film deposition techniques like chemical vapor deposition (CVD) and its variants like low pressure CVD and plasma enhanced CVD. Thermal oxidation of silicon and low temperature oxidation using CVD are also summarized.
Detailed Information
| Author: | ['Rubel Riad'] |
|---|---|
| Publication Year: | 2021 |
| Pages: | 20 |
| Language: | English |
| Format: | |
| Price: | FREE |
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