Towards Synthesis of Micro-/Nano-systems: The 11th International Conference on Precision Engineering (ICPE) August 16–18, 2006, Tokyo, Japan

344 Pages·2007·65.027 MB·English

by  Fumihiko Kimura, Kenichiro Horio (auth.)

Towards Synthesis of Micro-/Nano-systems
Fumihiko Kimura and Kenichiro Horio (Eds.)
Towards Synthesis of
Micro-/Nano-systems
The 11th International Conference on Precision Engineering (ICPE)
August 16–18, 2006, Tokyo, Japan
OrganizedbyJSPE(JapanSocietyforPrecisionEngineering)
Co-organizedbyASPE(AmericanSocietyforPrecisionEngineering),
euspen(EuropeanSocietyforPrecisionEngineeringandNanotechnology)
JSPEPublicationSeriesNo.5
With641Figures
123
FumihikoKimura,Dr.Eng. KenichiroHorio,Dr.Eng.
DepartmentofPrecisionMachineryEngineering MechanicalEngineeringDepartment
SchoolofEngineering SchoolofEngineering
TheUniversityofTokyo SaitamaUniversity
Tokyo113-8656 Saitama338-8570
Japan Japan
BritishLibraryCataloguinginPublicationData
InternationalConferenceonProduction/Precision
Engineering(11th:2006:Tokyo,Japan) Towardssynthesisofmicro-/nano-systems:proceedingsof
the11thInternationalConferenceonPrecisionEngineering
1.Productionengineering-Congresses2.Microtechnology-
Congresses3.Nanotechnology-Congresses
I.TitleII.Kimura,F.(Fumihiko),1945-III.Horio,
Kenichiro
620’.0045
ISBN-13:9781846285585
ISBN-10:1846285585
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Preface
At the beginning of 21st century, manufacturing production engineering, and to discuss the advanced
industry is facing new challenges due to technologies of the related fields.
globalization and environmental sustainability. In This proceedings book of the Conference
accordance with the progress of micro/nano includes 3 keynote papers and 71 contributed papers,
technology, precision engineering is considered to be which consist of 52 full papers and 19 short papers.
one of the core engineering to cope with severe Keynote papers address important topics in the field
requirements of new product and system of precision engineering from academic and
developments. From basic research to practical industrial perspectives. Contributed papers cover
applications, it becomes gradually important how to many aspects of recent issues of micro/nano
synthesize and how to design micro-/nano-systems technology, and discuss following topics areas:
based on advanced precision process technology. For precision systems and their design, measurement
contributing to these emerging developments, this technology, actuator and precision mechanisms,
book is edited as a collection of all the papers control and sensing technology, machine tools,
presented at the 11th International Conference on micro/nano manipulation, plasma process, laser
Precision Engineering, ICPE, where industrial process, polishing/grinding, and integrated processes.
papers as well as high-quality scientific papers are These papers are good basis for capturing the current
solicited for discussing front-edge technology and status and future trends of production and precision
forecasting future trends. engineering, and they will stimulate further research
The ICPE has been consecutively held as one of and development in micro/nano technology and
the major international conferences organized by the systems.
Japan Society for Precision Engineering, JSPE. The I would like to express my deep appreciation to
11th ICPE takes place in Tokyo from August 16 to all the contributors of this book, especially to the
August 18, 2006. This conference is a second authors of the keynote papers, which give special
collaborative meeting organized jointly by the three inspiration to the future of the micro/nano
major societies for precision and production technology. I also would like to extend my sincere
engineering: Japan Society for Precision Engineering, appreciation to the members of the Organizing
JSPE, American Society for Precision Engineering, Committee and the International Program
ASPE, and European Society for Precision Committee for their considerable efforts in
Engineering and Nanotechnology, euspen. It is organizing the Conference and in making this book
sponsored by the International Academy for available in its present form.
Production Engineering, CIRP. The general aim of I expect this book is a valuable source of
these consecutive conferences is to promote research knowledge for researchers, engineers and students in
and development activities in precision and their future research and development activity.
Fumihiko Kimura
Chairman of the Organizing Committee
11th ICPE
Tokyo, Japan, August 2006
v
Table of Contents
Preface ................................................................................................................................................................. v
Organization .................................................................................................................................................... xiii
Keynote Papers
Merging Technologies for Optics .......................................................................................................................1
E. Brinksmeier, O. Riemer, R. Gläbe
Fast Tool Servos: Advances in Precision, Acceleration, and Bandwidth .....................................................11
D.L. Trumper, X. Lu
Microsystem Technologies for Automotive Applications ...............................................................................21
Y. Ueno, N. Kawahara
Full Papers
[A1 Design]
System Concept and Innovative Component Design for Ultra-Precision Assembly Processes ..................29
A. Schubert, R. Neugebauer, B. Schulz
Development of a Design Tool for Machine Tools Combining Conceptual Design Support and
Detail Design Method .........................................................................................................................................35
N. Mishima
Precision Contouring Control of Multi-Axis Feed Drive Systems ................................................................41
N. Uchiyama, S. Sano, S. Takagi, K. Yamazaki
Areal Gear Flank Description as a Requirement for Optical Gear Metrology ...........................................47
G. Goch, A. Günther
[A2 System]
Detecting Perturbation Occurrence during Walking .....................................................................................53
Y. Hagane, W. Yu, R. Katoh, T. Katane, M. Sekine, T. Tamura, O. Saitou
Supporting the Reuse of Parts Based on Operation Histories of Products and Preference of
Consumers ……………………………………………………………………………………………...……...59
N. Fukuda, H. Hiraoka, T. Ihara
Multi-objective Reactive Scheduling Based on Genetic Algorithm ...............................................................65
Y. Tanimizu, T. Miyamae, T. Sakaguchi, K. Iwamura, N. Sugimura
[A3 Measurement]
Ultraprecision Wide-angle Profile Measurement with Air-bearing Cylinder Slant Probes .......................71
S. Moriyasu
Development of a Laser-Guided Deep-Hole Measuring System: Autocollimation System ........................77
A. Katsuki, H. Murakami, H. Onikura, T. Sajima
Development of an Optical Measuring Device for Rotation Accuracy of Micro-Spindle
- Application to Measurements of a High-Speed Spindle - ............................................................................83
K. Fujimaki, K. Mitsui
Laser Interferometric Measurement of Involute Profile by Rolling of Artifact ..........................................89
F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa
[A4 Actuator]
Study on Manufacturing Method to Reduce Cogging Torque of Motor with Separate Core ....................95
H. Akita, Y. Nakahara, T. Yoshioka, T. Miyoshi
vii
A High Power and Precision Ultrasonic Linear Motor with Lateral Flexible Supports ...........................101
H. Lee, W. Kim, C. Yun, H. Cha, C. Kang, S. Lee
A Precise Motion Measurement of a Miniature Robot Driven by the Deformation of
Piezoelectric Actuators ................................................................................................................................... 107
A. Torii, A. Shimada, K. Doki, A. Ueda
Development of IVUS (Intra-Vascular Ultrasound) Driven by Ultrasonic Micromotor
-Principle of Drive and Detection Methods- ..................................................................................................113
T. Wada, A. Nakajima, T. Moriya, Y. Furukawa
[A5 Precise mechanism]
Development of Membrane Driven Micropump
-Principle of Microbubble Driving Mechanism and Prototype- ..................................................................117
M. Yamada, Y. Furukawa, K. Morishima
A 3-DOF Rotational Precision Positioning Stage using Spring-mounted PZT Actuators ........................121
Y. Liu, G. Lee
Active Damping of a Wafer Loading Robot using Piezoceramic Actuators ..............................................127
B. Pletner, G. Zvonar, Y. Kayama, T. Kamiyama, M. Iwagawa, S. Bhola, G.R. Kessenich
[A6 Control/Sensing]
Visual Feedback Control of a Micro Lathe ...................................................................................................133
H. Ojima, K. Saito, L. Zhou, J. Shimizu, H. Eda
An 8-Axis Robot Based Rough Cutting System for Surface Sculpturing ...................................................139
J. Zhu, R. Tanaka, T. Tanaka, Y. Saito
A New Position Surveying System for the Underground Pipes Using Two Rotary Encoders ..................145
T. Hamano, M. Ono, S. Kato
[A7 Machine tools]
Measurement of Cutting Torque by Speed Increasing Spindle ...................................................................151
M. Yamanaka, S. Miyamura, K. Inoue
Diamond Turning using Water Drive Spindle ..............................................................................................157
Y. Nakao, Y. Sagesaka
Development and Evaluation of a High-Precision Machining Center with Friction-Less Drives ............163
D. Kono, A. Matsubara, S. Ibaraki, H. Otsubo, M. Tsuboi, I. Oshita
Machining Feature-Driven 5-Axis CNC Machine Tools ..............................................................................169
S. Mitsui, F. Tanaka, T. Kishinami
[B1 Micro structure]
Selective Anodising Technologies for Obtaining Translucent Micro Structures .......................................175
H.N. Hansen, P. Møller, C. Jarnov, J.Staun, J.P. Prichystal
Development of Rectangular Microblasting Nozzle .....................................................................................181
M. Sugimoto, T. Shakouchi
Thick SU-8 Mask for Micro Channeling of Glass by using Micro Abrasive Jet Machining ....................187
A.S. Saragih, J.H. Lee, T.J. Ko, H.S. Kim
Fabrication of Self-assembled Microstructure using Controlled Liquid Spreading on
Textured Surface ..............................................................................................................................................191
A.Kaneko, N. Moronuki, M. Mogi, Y. Yamamura
[B2 Micro/Nano manipulation]
Improving Performance of Direct Photosynthetic/Metabolic Micro Bio Fuel Cell (DPBFC) by
Gene Manipulation of Bacteria .......................................................................................................................197
A. Furuya, T. Moriuchi, M. Yoshida, M. Ota, K. Morishima, Y. Furukawa
viii
Nanometer Deflection Control of AFM Probe by Irradiating Polarized Laser and its Application to
Nano-Structuring Process ...............................................................................................................................203
D. Mezaki, K. Chuma, A. Kakuta, Y. Furukawa
Investigation on Fabricating 3D Structures Using Inkjet Printing Technology ........................................209
M. Ibrahim, T. Otsubo, H. Narahara, H. Koresawa, H. Suzuki
Miniaturization of Dot Pattern by Metal Forming for Direct Marking of 2D Barcode Symbols ............215
H. Ike
[B3 Plasma process]
Plasma Etching Based Processes for the Fabrication of Micro Structured Linear Guide ........................221
A. Phataralaoha, S. Buttgenbach
Ultraprecision Finishing of Photomask Substrate by Utilizing Atmospheric Pressure Plasma ...............227
K. Yamamura, A. Fujiwara, K. Ueno, Y. Sano, M. Shibahara, K. Endo, Y. Mori
Development of Ultra Precision Finishing Method for Quartz Crystal Wafer Utilizing Atmospheric
Pressure Plasma ...............................................................................................................................................233
M. Shibahara, Y. Yamamoto, K. Yamamura, Y. Sano, K. Endo, Y. Mori
Sub-nanometer Smoothing of Diamond-turned Metal Surfaces using Ion Beams ....................................239
F. Frost, H. Takino, R. Fechner, A. Schindler, N. Ohi, K. Nomura
[B4 Laser process]
Laser Machining of Cobalt Cemented Tungsten Carbides ..........................................................................243
B. Karpuschewski, E. Wolf, M. Krause
Study of Thermal Deformation of a Base Sheet Caused by Laser Cutting ................................................249
M. Nunobiki, K. Okuda, T. Yoshida, S. Kita
Laser Welding of Transparent Resin Plates ..................................................................................................255
S. Hayakawa, T. Miura, T. Nakamura, F. Itoigawa, T. Hasegawa
Fabrication of Carbon Nanotube Reinforced Hydroxyapatite Coating on Stainless Steel 316L by Laser
Surface Treatment ...........................................................................................................................................261
C.T. Kwok
[B5 Polishing/Finishing]
Novel Abrasive-free Planarization of Si and SiC using Catalyst .................................................................267
H. Hara, Y. Sano, H. Mimura, K. Arima, A. Kubota, K. Yagi, J. Murata, K. Yamauchi
Polishing of Single Crystal SiC with the LHA Pad .......................................................................................271
M. Sato, K. Okuda
A Computational Study on Slurry Flow between a Wafer and CMP Pad with Grooves .........................277
K. Nagayama, H. Morishita, K. Kimura, K. Tanaka
[B6 Integrated process]
Multilevel Computer Generated Hologram on a Curved Surface for High Power CO2 Laser
Beam Shaping ...................................................................................................................................................281
H. Hagino, C.S. Park, H . Kikuta, K. Iwata
Milling-Combined Laser Metal Sintering System and Production of Injection Molds with
Sophisticated Functions ...................................................................................................................................285
S. Abe, Y. Higashi, I. Fuwa, N. Yoshida, T. Yoneyama
Development of Optical Elements with ELID-grinding and MRF Synergistic Finishing Process ...........291
W. Lin, H. Ohmori, Y.Uehara, Y. Watanabe, T. Suzuki, S. Yin
Fabrication of Ultraprecisely Figured Mirror for Nano Focusing Hard-x-ray .........................................295
H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, K. Yamamura, Y. Sano, K. Endo, Y. Mori, M. Yabashi,
Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi
ix
[B7 Grinding]
Surfaces Formation of Precision ELID Grinding Rock Minerals ...............................................................301
J. Shen, W. Lin, H. Ohmori, X. Xu
Dressing of Coarse-Grained Diamond Wheels for Ductile Machining of Brittle Materials .....................305
D. Grimme, K. Rickens, Q. Zhao, C. Heinzel
Study on Subsurface Damage Generated in Ground Si Wafer ...................................................................309
B.S. Hosseini, L. Zhou, T. Tsuruga, J. Shimizu, H. Eda, S. Kamiya, H. Iwase
Fabrication of High-quality Surfaces on Precise Lens Mold Materials by a new ELID Grinding
Wheel…………………………………………………………………………………………………………..315
T. Saito, K. Katahira, H. Ohmori, J. Komotori, M. Mizutani, A. Nemoto
Short Papers
[Design]
A GA-based Optimization of Compliant Micro-manipulator .....................................................................319
G.B. Madhab
Path Control Scheme for Vision Guided Micro Manipulation System .......................................................321
H. Asano, Z. Qiu, L. Zhou, H. Ojima, J. Shimizu, T. Ishikawa, H. Eda
Machined Surface Analysis for 5-axis Machine Tools ..................................................................................323
M. Yamada, F. Tanaka, T. Kondo, T. Kishinami
[System]
A New Approach Manufacturing Cell Scheduling based on Skill-based Manufacturing Integrated to
Genetic Algorithm ............................................................................................................................................325
B. Suksawat, H. Hiraoka, T. Ihara
Slide-bending Formation of Thin Metal Sheet by Using an Industrial Robot ...........................................327
H. Harada, Y.Z. Sun, Y. Marumo, T. Matsuno, L. Ruan
[Machine]
High Accuracy and High Capacity Motor Cooling System Using Phase Change of Refrigerant for
Semiconductor Lithography Apparatus ........................................................................................................329
A.K.T. Poon, F. Nishimatsu, M. Totsu, L. Kho, G. Keswani
Development of the Earthworm Robot using a Shape Memory Alloy ........................................................331
T. Saito, T. Kagiwada, H. Harada, Y. Kawamura
Improvement of Propulsion Mechanism based on the Inertial Force .........................................................333
H. Yoshikawa, T. Kagiwada, H. Harada, M. Mimura
[Measurement]
A High-order Spline Filter for Surface Roughness Measurement ..............................................................335
M. Numada, T. Nomura, K. Yanagi, K. Kamiya, H. Tashiro
Surface Structure of Monocrystalline Silicon Anisotropically Etched with the Help of
Microwaves .......................................................................................................................................................337
T. Krah, S. Büttgenbach
[Novel Process]
Development of an Ultra-Thin 100 Micron Diametrical Coaxial Cable using a Coating Technique ......339
H. Miyagawa, H. Ishihara, S. Kobayashi, K. Hira, Y. Horibe, Y. Suzaki
Study on Si Wafer Cooling by Low Pressure Argon Gas in Vacuum Eenvironment ...............................341
S. Udagawa, S. Takahashi, D. Nakamura, K. Maeno
x
[Process]
Research on Development of Advanced Analyzer Components with Ultraprecision ...............................343
H. Ohmori, K. Katahira, W. Lin, Y. Uehara, Y. Watanabe, A. Nakao, F. Yatagai, M. Iwaki, M. Mizutani
Effects of Wear of Single Crystal Diamond Tool with Large Nose Radius on Work Hardening and
Residual Stress ..................................................................................................................................................345
E. Kondo, R. Iwamoto, I. Tanaka, N. Kawagoishi
Experimental Analysis And Optimization of Cutting Parameters for End Milling Aluminium Alloy ...347
N. Ahmad, R. Wakabayashi, T. Tanaka, Y. Saito
Study on the ELID Grinding Forces of Ceramics and Steels ......................................................................349
J. Guo, H. Ohmori, Y. Uehara, Y. Watanabe, M. Asami
Grinding of C/C-SiC Composite in Dry Method ...........................................................................................351
T. Tashiro, J. Fujiwara, Y. Takenaka
Micromachining Characteristics of Sapphire Surface with Fifth Harmonic Nd:YAG Lasers ................353
T. Noji, K. Nakamura, H. Horisawa, N. Yasunaga
Development of an Automatic Scraping Machine with Recognition for Bearing of Scraped Surfaces
- Construction of Automatic Scraping Machine - .........................................................................................355
H. Tsutsumi, R. Yamada, A. Kyusojin, T. Nakamura
xi
Organization
Organizing Committee
Chairman
• F.Kimura (The University of Tokyo, Japan)
Executive Secretary
• H.Suzuki (The University of Tokyo, Japan)
• T.Aoyama (Keio University, Japan) • T.Moriwaki (Kobe University, Japan)
• H.Hiraoka (Chuo University, Japan) • T.Obikawa (Tokyo Institute of Technology, Japan)
• K.Horio (Saitama University, Japan) • H.Ohmori (RIKEN, Japan)
• I.Inasaki (Keio University, Japan) • S.Takata (Waseda University, Japan)
• K.Mori (AIST, Japan) • H.Tokura (Tokyo Institute of Technology, Japan)
International Program Committee
Chairman
• K.Horio (Saitama University, Japan)
• Y.Altintas (The University of British Columbia, Canada) • T.Obikawa (Tokyo Institute of Technology, Japan)
• H.Aoyama (The University of Electro-Communications, Japan) • H.Ohmori (RIKEN, Japan)
• T.Aoyama (Keio University, Japan) • M.Rahman (National University of Singapore, Singapore)
• E.Brinksmeier (University of Bremen, Germany) • Y.Saito (Tokyo Institute of Technology, Japan)
• G.Byrne (University College Dublin, Ireland) • S.Shimizu (Sophia University, Japan)
• J.Corbett (Cranfield University, UK) • M.Shpitalni (Technion, Israel)
• D.A.Dornfeld (University of California, USA) • H.Suzuki (The University of Tokyo, Japan)
• H.Hiraoka (Chuo University, Japan) • S.Takata (Waseda University, Japan)
• R.J.Hocken (University of North Carolina, USA) • H.K.Toenshoff (University of Hannover, Germany)
• F.Klocke (T.H. Aachen, Germany) • H.Tokura (Tokyo Institute of Technolgy, Japan)
• F.-L.Krause (TU Berlin, Germany) • D.L.Trumper (Massachusetts Institute of Technology, USA)
• J.Lee (University of Cincinnati) • E.Uhlmann (T.U. Berlin, Germany)
• D.A.Lucca (Oklahoma State University, USA) • H.van Brussel (K.U.Leuven, Belgium)
• T.Masuzawa (The University of Tokyo, Japan) • F.van Houten (University of Twente, the Netherlands)
• N.Mohri (The University of Tokyo, Japan) • R.Wertheim (ISCAR, Israel)
• L.Monostori (Hungarian Academy of Science, Hungary) • E.Westkaemper (University of Stuttgart, Germany)
• K.Mori (AIST, Japan) • G.X.Zhang (Tianjin University, China)
• T.Moriwaki (Kobe University, Japan)
Conference Secretariat
The Japan Society for Precision Engineering
Kudan-Seiwa Building, 1-5-9 Kudan-kita, Chiyoda-ku, Tokyo 102-0073 JAPAN
Phone [phone] Fax [phone] E-mail [email protected] Web http://www.icpe11.jspe.or.jp
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