status of aao substrates at synkera

26 Pages·2009·4.7 MB·English

First LAPD Collaboration Meeting
Argonne National Lab
OOcttobber 1155-1166, 22000099
2021 Miller Drive, Suite B
Longmont, CO 80501
www.synkera.com
SSTTAATTUUSS OOFF AAAAOO SSUUBBSSTTRRAATTEESS AATT SSYYNNKKEERRAA
Dmitri Routkevitch,, Ph.D.
Product Manager and Principal Scientist
Contains Confidential and Proprietary Information
OOUUTTLLIINNEE
MCP DEVELOPMENT PROGRAM AT SYNKERA
• AAO/ALD AS A MATERIALS PLATFORM
• CERAMIC MCP WITH INTRINSIC AND MICROMACHINED CHANNELS
• LAPD SUBCONTRACT - LARGE AREA MCP SUBSTRATES, INTRINSIC CHANNELS
PPRROOGGRREESSSS OONN AAAAOO SSUUBBSSTTRRAATTEE // “IINNTTRRIINNSSIICC” CCHHAANNNNEELLSS
• CHANNEL DIAMETER AND SPACING
• CHANNEL ENTRANCE AND CHANNEL SHAPE
• SCALE-UP
STATUS OF RELATED WORK
• ALD RESISTANCE MODIFICATION
• MICROMACHINED SUBSTRATES
SUMMARY
2 Copyright 2009 Synkera Technologies Inc.
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• Nanotechnology, materials science and
engineering, chemical sensing and
separation, microfabrication
Current Products/Services
• Gas sensors and modules
• Ceramic membranes
• Contract research
MMarkketts
• Industrial health and safety, air quality
• Gas separation, hydrogen generation, R&D
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energy, bio- and life sciences, filtration
Mission - bring practical products to the market through advanced
kknowlleddge andd preciisiion engiineeriing off matteriialls.
4 Copyright 2009 Synkera Technologies Inc.
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Dense
Barrier
• High quality self-organized material with regular
Layer Al substrate
nanoporous lattice
• Uniform & aliggned arrayys of cyylindrical
nanopores
• Formed by anodic oxidation of Al
in certain electrolytes
• Tunable parameters
Porous
OOxiidde PPore ddiiametter: 55 - 330000 nm
(cid:79)
Pore density: 1012 -108 cm-2
(cid:79)
Thickness: 0.1 - 300 µm
(cid:79)
• Scalable, manufacturing-friendly
Dense
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Barrier
Layer Al substrate
5 Copyright 2009 Synkera Technologies Inc.
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• Separation membranes • Industrial health & safety
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• CCaattaallyyttiicc mmeemmbbrraanneess •• AAiirr qquuaalliittyy ccoonnttrrooll
• Adsorbents & Reactors • Environmental monitoring
• Fuel cells, distributed • Homeland security
• Oil and gas, petrochemical
• Nano / microscale engineering
• Scalable manufacturing
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• Life Sciences
• Bioanalysis • Ceramic MCPs
• Ultra/nanofiltration • Microcomponents
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for harsh environments
• Water purification
• Gen-3 PV for solar cells
• Chips for cell culturing,
• Photocatalysts
bioanalysis & bioimaging
• Radiation Detection
• Bio- and life sciences
• Photonics
7 Copyright 2009 Synkera Technologies Inc.
SSYYNNKKEERRAA MMCCPP DDEEVVEELLOOPPMMEENNTT PPRROOGGRRAAMM
AAO as Ceramic MCP Substrate
• Opportunity: low cost, high resolution replacement of glass MCPs
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• MCPs with Micromachined Channels (channel size 3-10 µm)
Status: functional MCPs with channel diameter < 4 µm produced and tested
(cid:79)
Current effort: 25 mm diameter prototypes
(cid:79)
• MCPs with Intrinsic Channels ((sub-µµm channel size))
Current NSF Phase II SBIR project – development of functional MCPs
(cid:79)
LAPD subcontract – development of large MCP substrates
(cid:79)
ALD as a Tool for MCP Developpment
• Synkera used ALD for development of AAO-based products since 2000
Modification of AAO geometry and properties
(cid:79)
Nanocomposites, membranes & reactors, gas sensors, energy conversion materials
(cid:79)
• First ALD-modified MCP prototypes produced in 1999-2000
• In-house ALD facility in 2005
Partners
•• SStteevveenn GGeeoorrggee ((UUnniivveerrssiittyy ooff CCoolloorraaddoo)) - AALLDD pprroocceessss ddeevveellooppmmeenntt
• Ossy Siegmund, Anton Tremshin (Space Science Lab, UC Berkeley) - testing
Proprietary and Confidential Information
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Intrinsic Pores
Micromachined Channels
Synkera Synkera
Generic AAO Glass MCPs
0.01 0.1 0.5 1 5 10 µm
Main chhallllenges:
• Implement 0.5 – 1 µm diameter channels
• Scale to dimensions and formats of detector targeted by LAPD
• Produce MCP substrates for fabrication of functional MCP prototypes
• Validate performance and cost reduction potential
• Define the path for high volume low-cost manufacturing.
Proprietary and Confidential Information
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Status: contract negotiation wrapped up, proposal submitted to ANL
Overall goal: develop ceramic MCPs substrates targeting the need for next
generation low-cost large-area detectors.
Year 1 – Development of Required Channel Structure
• Objective: maximize the channel diameter and enable a funnel-shaped opening, while
maintaining well-aligned channels.
• Deliverables:
Demonstrate AAO with channel diameter ≥0.5 µm, OAR ≥60%, L/D of 50-100
(cid:79)
MCP substrates for the LAPD project team (32.8 mm, qty ≥ 15) targeting above specs
(cid:79)
Initial cost projections for 8”x8” AAO substrates
(cid:79)
Year 2 Option – Support of MCP Development and Scale-Up
• Objective: enable targeted MCP performance via development of AAO substrates;
limited scale-up to validate the size (8”x8”) and cost reduction potential.
• Deliverables:
Demonstrate channel diameter ≥0.7 µm, funnel-shaped opening, OAR≥65%, and L/D 40-100.
(cid:79)
MMCCPP subbsttrattes ffor tthhe LLAAPPDD projjectt tteam ((3322.88 mm, qtty ≥ 4400)) ttargettiing abbove specs
(cid:79)
Optional: scaled 8”x8” “demo” substrates
(cid:79)
Validated cost projections for 8”x8” AAO substrates.
(cid:79)
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going R&D and scale-up efforts at Synkera.
Proprietary and Confidential Information
12 Copy©ri g2h0t0 290 S0y9n Skyenrkae rTae cTehcnhonloogloiegsies Inc.