Table Of ContentEBOOKS Spectroscopic Ellipsometry T
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FOR THE M
Practical Application to Thin Film
P AND ANALYSIS COLLECTION
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Harland G. Tompkins • James N. Hilfiker S
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Ellipsometry is an experimental technique for determining the L
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thickness and optical properties of thin films. It is ideally suited I
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books you buy, for films ranging in thickness from sub-nanometer to several E
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the higher your microns. Spectroscopic measurements have greatly expanded
discount! the capabilities of this technique and introduced its use into all
areas where thin films are found: semiconductor devices, flat
THE CONTENT panel and mobile displays, optical coating stacks, biological and
Spectroscopic
medical coatings, protective layers, and more.
• Manufacturing
Engineering
While several scholarly books exist on the topic, this book
• Mechanical Ellipsometry
provides a good introduction to the basic theory of the
& Chemical
technique and its common applications. The target audience is
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not the ellipsometry scholar, but process engineers and students p
• Materials Science
of materials science who are experts in their own fields and e Practical Application
& Engineering c
wish to use ellipsometry to measure thin film properties without t
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becoming an expert in ellipsometry itself. o to Thin Film
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Harland G. Tompkins received his BS in physics from the o Characterization
• Electrical
University of Missouri and his PhD in physics from the University p
Engineering i
of Wisconsin–Milwaukee. He is a consultant for the J. A. Woollam c
Company in Lincoln, NE, as well as for other companies. He E
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has written numerous journal articles in the reviewed technical l
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• Perpetual access for literature, is the author of four books, and has edited two books.
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• No subscriptions or James N. Hilfiker graduated from the Electrical Engineering m
access fees Department of the University of Nebraska, where he studied e
• Unlimited under Professor John Woollam. He joined the J.A. Woollam tr
concurrent usage Company upon graduation and has worked in their applications y
• Downloadable PDFs lab for 20 years. His research at the J.A. Woollam C ompany
• Free MARC records has focused on new applications of ellipsometry, including
characterization of anisotropic materials, liquid crystal films, and, Harland G. Tompkins
For further information, more recently, thin film photovoltaics. He has authored over
a free trial, or to order, 40 technical articles involving ellipsometry. James N. Hilfiker
contact:
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ISBN: 978-1-60650-727-8
SPECTROSCOPIC
ELLIPSOMETRY
SPECTROSCOPIC
ELLIPSOMETRY
P a
ractical PPlication
t F c
to hin ilm haracterization
HARLAND G. TOMPKINS
AND JAMES N. HILFIKER
MOMENTUM PRESS, LLC, NEW YORK
Spectroscopic Ellipsometry: Practical Application to Thin Film
Characterization
Copyright © Momentum Press®, LLC, 2016.
All rights reserved. No part of this publication may be reproduced, stored
in a retrieval system, or transmitted in any form or by any means—
electronic, mechanical, photocopy, recording, or any other—except for
brief quotations, not to exceed 400 words, without the prior permission
of the publisher.
First published by Momentum Press®, LLC
222 East 46th Street, New York, NY 10017
www.momentumpress.net
ISBN-13: 978-1-60650-727-8 (print)
ISBN-13: 978-1-60650-728-5 (e-book)
Momentum Press Materials Characterization and Analysis Collection
Collection ISSN: 2377-4347 (print)
Collection ISSN: 2377-4355 (electronic)
Cover and interior design by Exeter Premedia Services Private Ltd.,
Chennai, India
10 9 8 7 6 5 4 3 2 1
Printed in the United States of America
To our wives
Rose Ann Tompkins
Lisa Hilfiker
a
bstract
Ellipsometry is an experimental technique for determining the thickness
and optical properties of thin films. It is ideally suited for films ranging
in thickness from subnanometer to several microns. Spectroscopic
measurements have greatly expanded the capabilities of this technique and
introduced its use into all areas where thin films are found: semiconductor
devices, flat panel and mobile displays, optical coating stacks, biological
and medical coatings, protective layers, and more. While several s cholarly
books exist on the topic, this book provides a good introduction to the
basic theory of the technique and its common applications. It follows in
the footsteps of two previous books written by one of the authors with
important updates to emphasize modern instrumentation and applications.
The target audience is not the ellipsometry scholar, but process engineers
and students of materials science who are experts in their own fields and
wish to use ellipsometry to measure thin film properties without becoming
an expert in ellipsometry itself.
KEYWORDS
Cauchy equation, dispersion equations, ellipsometry, optical constants,
polarized light, refractive index, thin film thickness
c
ontents
List of figures xiii
List of tabLes xxv
Preface xxvii
acknowLedgments xxix
1 PersPective, Previous works, and PurPose of this voLume 1
1.1 Historical Aspects 1
1.2 Focus of This Book and Target Audience 1
1.3 Overview of Topics 2
2 basic PhysicaL Phenomena 5
2.1 The Electromagnetic Wave 5
2.2 Interactions Between the Electromagnetic Wave
and Matter 10
2.3 Laws of Reflection and Refraction 14
2.4 Polarized Light 14
2.5 The Reflection and Transmission of Light 18
2.6 Measurement Quantities 26
3 sPectroscoPic eLLiPsometry comPonents and instrumentation 31
3.1 Components of a Spectroscopic Ellipsometer 31
3.2 Spectroscopic Ellipsometers 45
4 generaL data features 57
4.1 Spectra for Substrates 58
4.2 Spectra for Films on a Substrate 65
5 rePresenting oPticaL functions 71
5.1 Tabulated List 71
5.2 Dispersion Equations 73
