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About Solid State Processing and Integrated Circuit Laboratory EE504L
This document discusses a lecture on contamination control in clean rooms. It notes that the main sources of contamination are tools (40%), people (26%), and piece parts (15%). It emphasizes prevention measures like using clean rooms class 1 or lower, standardized mechanical interface concepts, local mini-environments with ultra-high purity nitrogen to achieve classification below 0.1, and reducing the number of operators. Key elements of clean rooms discussed include gowning areas, air pressure differentials, air showers, HEPA/ULPA filters, and static control.
Detailed Information
| Author: | ['Harshini'] |
|---|---|
| Publication Year: | 2021 |
| Pages: | 41 |
| Language: | English |
| Format: | |
| Price: | FREE |
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