Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

646 Pages·2011·27.06 MB·English

by  Madou

Mechanical Engineering/Bioengineering/Electrical Engineering/Materials Science/Manufacturing Engineering
Third Edition
Fundamentals of
MICROFABRICATION
NANOTECHNOLOGY
AND
V O LU M E I T S
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Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology d
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Covers All Aspects of the Solid-State Physics Behind Nanotechnology q
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Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and e t
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Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind s

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it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical i
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properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of h

Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the M y
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band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum
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hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked ic c
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examples, extensive references, and a comprehensive glossary of terms. r ,
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Topics include: l
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• Crystallography and the crystalline materials used in many semiconductor devices n i
• Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the d d
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context of ICs and NEMS N c
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• Single crystal Si properties that conspire to make Si so important a ,

• Optical properties of bulk 3D metals, insulators, and semiconductors n a
• Effects of electron and photon confinement in lower dimensional structures o n
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• How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in
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plasmonics c A
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• Metamaterials and how they could make for perfect lenses, changing the photonic field forever n
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• Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior a
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• Electromechanical and optical analytical processes in miniaturized components and systems l y
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The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, y a
the book presents the electronic, mechanical, and optical properties of solids that are used in integrated l

circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It
lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.
Other volumes in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set
include:
Manufacturing Techniques for Microfabrication and Nanotechnology
VOLUME I
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications
55119
Madou
ISBN: 978-1-4200-5511-5
90000
9 781420 055115
55119_COVER_final.indd 1 5/5/11 10:10 AM

Marc J. Madou
Boca Raton London New York
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Version Date: 20110720
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I dedicate this third edition of Fundamentals of Microfabrication to my family in the US and
in Belgium and to all MEMS and NEMS colleagues in labs in the US, Canada, India, Korea,
Mexico, Malaysia, Switzerland, Sweden and Denmark that I have the pleasure to work with.
The opportunity to carry out international research in MEMS and NEMS and writing a textbook
about it has been rewarding in terms of research productivity but perhaps even more in cultural
enrichment. Scientists have always been at the frontier of globalization because science is the
biggest gift one country can give to another and perhaps the best road to a more peaceful world.

Contents
Roadmap ix
Author xi
Acknowledgments xiii
INTRODUCTION
MEMS and NEMS Foundations
Introduction 2
1 HistoricalNote:TheAscentofSilicon,MEMS,andNEMS 5
2 Crystallography 37
3 QuantumMechanicsandtheBandTheoryofSolids 75
4 SiliconSingleCrystalIsStillKing 215
5 Photonics 299
6 Fluidics 435
7 ElectrochemicalandOpticalAnalyticalTechniques 517
ix

Roadmap
InSolid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nano technologywelaythefoundations
foraqualitativeandquantitativetheoreticalunderstandingofmicro-andnanoelectromechanicalsystems,
i.e.,MEMSandNEMS.Inintegratedcircuits(ICs),MEMS,andNEMS,silicon(Si)isstillthesubstrateand
constructionmaterialofchoice.Ahistoricalnoteabouttheascentofsilicon,MEMSandNEMSisthetopic
ofChapter1.Thenecessarysolid-statephysicsbackgroundtounderstandingtheelectronic,mechanical,
andopticalpropertiesofsolidsreliedoninICs,MEMSandNEMSiscoveredinChapters2–5.Manyimpor-
tantsemiconductordevicesarebasedoncrystallinematerialsbecauseoftheirreproducibleandpredictable
electricalproperties.WecovercrystallographyinChapter2.Theultimatetheoryinmodernphysicstoday
topredictphysical,mechanical,chemical,andelectricalpropertiesofatoms,molecules,andsolidsisquan-
tummechanics.QuantummechanicsandthebandtheoryofsolidsarepresentedinChapter3.Therel-
evanceofquantummechanicsinthecontextofICsandNEMScannotbeunderestimated,andtheprofound
implicationsofquantumphysicsfornanoelectronicsandNEMSarearecurringtopicthroughoutthisbook.
Given theimportanceofsingle-crystalSi(SCS)forIC,MEMS,andNEMSapplications,weanalyzesilicon
crystallographyandbandstructureinmoredetailinChapter4.Thischapteralsoelucidatesallthesingle-
crystalSipropertiesthatconspiredtomakeSisoimportantinelectronic,optical,andmechanicaldevices
thatonemightrightlycallthesecondhalfofthe20thcenturytheSiliconAge.Photonics,treatedinChapter
5,involvestheuseofradiantenergyandusesphotonsthesamewaythatelectronicapplicationsuseelectrons.
Wereviewthedistinctiveopticalpropertiesofbulk3Dmetals,insulators,andsemiconductorsandsumma-
rizeeffectsofelectronandphotonconfinementinlower-dimensionalstructures.Weshowhowevanescent
fieldsonmetalsurfacesenabletheguidingoflightbelowthediffractionlimitinplasmonics.Plasmonics
isofgrowingimportanceforuseinsubmicronlithography,near-fieldopticalmicroscopy,enhancementof
light/matterinteractioninsensors,high-densitydatastorage,andhighlyintegratedopticchips.Wealso
delveintothefascinatingnewtopicofmetamaterials,man-madestructureswithanegativerefractiveindex,
andexplainhowthiscouldmakeforperfectlensesandcouldchangethephotonicfieldforever.InChapter
6weintroducefluidics,comparevariousfluidicpropulsionmechanisms,anddiscusstheinfluenceofminia-
turizationonfluidbehavior.Giventhehighlevelofinterest,fluidicsforminiaturizedanalyticalequipment
iscoveredinthischapteraswell.Chapter7combinesatreatiseonelectrochemicalandopticalanalytical
processeswhoseimplementationisoftenattemptedinminiaturizedcomponentsandsystems.
Note to the Reader: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnologywas
originallycomposedaspartofalargerbookthathassincebeenbrokenupintothreeseparatevolumes.
Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology representsthefirstvolumein
thisset.TheothertwovolumesincludeManufacturing Techniques for Microfabrication and Nanotechnologyand
From MEMS to Bio-NEMS: Manufacturing Techniques and Applications.Cross-referencestothesebooksappear
throughoutthetextandwillbereferredtoasVolumeIIandVolumeIII,respectively.Theinterestedreaderis
encouragedtoconsultthesevolumesasnecessary.
xi