Table Of ContentSMART SENSOR
SYSTEMS
SMART SENSOR
SYSTEMS: EMERGING
TECHNOLOGIES AND
APPLICATIONS
Editedby
GerardMeijer
DelftUniversityofTechnologyandSensArt,
TheNetherlands
MichielPertijs
DelftUniversityofTechnology,TheNetherlands
KofiMakinwa
DelftUniversityofTechnology,TheNetherlands
Thiseditionfirstpublished2014
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LibraryofCongressCataloging-in-PublicationData
Smartsensorsystems:emergingtechnologiesandapplications/editedbyGerardC.M.Meijer,MichielPertijs,
KofiMakinwa.
p.cm.
Includesbibliographicalreferencesandindex.
ISBN978-0-470-68600-3(cloth)
1.Detectors–Designandconstruction.2.Detectors–Industrialapplications.3.Microcontrollers.I.Meijer,
G.C.M.(GerardC.M.)
TA165.S552008
681′.25–dc22
2008017675
AcataloguerecordforthisbookisavailablefromtheBritishLibrary.
ISBN:9780470686003
Coverpicture:©MartilInstruments
Typesetin10/12ptTimesLTStdbyLaserwordsPrivateLimited,Chennai,India
1 2014
Contents
AbouttheEditors xi
ListofContributors xiii
Preface xv
1 SmartSensorDesign 1
KofiMakinwa
1.1 Introduction 1
1.2 SmartSensors 2
1.2.1 InterfaceElectronics 3
1.2.2 CalibrationandTrimming 5
1.3 ASmartTemperatureSensor 5
1.3.1 OperatingPrinciple 6
1.3.2 InterfaceElectronics 6
1.3.3 RecentWork 8
1.4 ASmartWindSensor 8
1.4.1 OperatingPrinciple 8
1.4.2 InterfaceElectronics 10
1.4.3 RecentWork 11
1.5 ASmartHallSensor 11
1.5.1 OperatingPrinciple 11
1.5.2 InterfaceElectronics 12
1.5.3 RecentWork 13
1.6 Conclusions 14
References 14
2 CalibrationandSelf-CalibrationofSmartSensors 17
MichielPertijs
2.1 Introduction 17
2.2 CalibrationofSmartSensors 18
2.2.1 CalibrationTerminology 18
2.2.2 LimitedValidityofaCalibration 19
vi Contents
2.2.3 SpecificsofSmartSensorCalibration 20
2.2.4 StoringCalibrationDataintheSensor 20
2.2.5 CalibrationintheProductionProcess 23
2.2.6 OpportunitiesforSmartSensorCalibration 24
2.2.7 CaseStudy:ASmartTemperatureSensor 24
2.3 Self-Calibration 27
2.3.1 LimitationsofSelf-Calibration 27
2.3.2 Self-CalibrationbyCombiningMultipleSensors 27
2.3.3 Self-CalibratingSensactors 30
2.3.4 CaseStudy:ASmartMagneticFieldSensor 31
2.3.5 Null-BalancingSensactors 33
2.3.6 CaseStudy:ASmartWindSensor 35
2.3.7 OtherSelf-CalibrationApproaches 36
2.4 SummaryandFutureTrends 38
2.4.1 Summary 38
2.4.2 FutureTrends 39
References 40
3 PrecisionInstrumentationAmplifiers 42
JohanHuijsing
3.1 Introduction 42
3.2 ApplicationsofInstrumentationAmplifiers 43
3.3 Three-OpAmpInstrumentationAmplifiers 44
3.4 Current-FeedbackInstrumentationAmplifiers 46
3.5 Auto-ZeroOpAmpsandInstAmps 48
3.6 ChopperOpAmpsandInstAmps 52
3.7 Chopper-StabilizedOpAmpsandInstAmps 56
3.8 Chopper-StabilizedandAZChopperOpAmpsandInstAmps 62
3.9 SummaryandFutureDirections 65
References 66
4 DedicatedImpedance-SensorSystems 68
GerardMeijer,XiujunLi,BlagoyIliev,GheorghePop,Zu-YaoChang,
StoyanNihtianov,ZhichaoTan,AliHeidariandMichielPertijs
4.1 Introduction 68
4.2 Capacitive-SensorInterfacesEmployingSquare-WaveExcitationSignals 71
4.2.1 MeasurementofSingleElements 71
4.2.2 Energy-EfficientInterfacesBasedonPeriodModulation 71
4.2.3 MeasurementofCapacitiveSensorswithHighSpeedandHigh
Resolution 74
4.2.4 MeasurementofGroundedCapacitors:Feed-ForwardActive
Guarding 76
4.3 DedicatedMeasurementSystems:DetectionofMicro-Organisms 78
4.3.1 CharacterizationofConductanceChangesDuetoMetabolism 78
4.3.2 ImpedanceMeasurementswithaRelaxationOscillator 81
Contents vii
4.4 DedicatedMeasurementSystems:Water-ContentMeasurements 83
4.4.1 Background 83
4.4.2 CapacitanceVersusWaterContent 83
4.4.3 SkinandProximityEffects 85
4.4.4 DedicatedInterfaceSystemforWater-ContentMeasurements 87
4.5 DedicatedMeasurementSystems:ACharacterizationSystem
forBloodImpedance 89
4.5.1 CharacteristicsofBloodandElectricalModels 89
4.5.2 In-vivoBloodAnalysisSystem 92
4.5.3 ExperimentalResults 95
4.6 Conclusions 97
References 98
5 Low-PowerVibratoryGyroscopeReadout 101
ChinwubaEzekweandBernhardBoser
5.1 Introduction 101
5.2 Power-EfficientCoriolisSensing 101
5.2.1 ReviewofVibratoryGyroscopes 102
5.2.2 ElectronicInterface 102
5.2.3 ReadoutInterface 103
5.2.4 ImprovingReadoutInterfacePowerEfficiency 105
5.2.5 ExploitingtheSenseResonance 106
5.3 ModeMatching 108
5.3.1 EstimatingtheMismatch 109
5.3.2 TuningOuttheMismatch 112
5.3.3 ClosingtheTuningLoop 114
5.3.4 PracticalConsiderations 116
5.4 ForceFeedback 119
5.4.1 Mode-MatchingConsideration 119
5.4.2 PreliminarySystemArchitectureandModel
forStabilityAnalysis 120
5.4.3 AccommodatingParasiticResonances 121
5.4.4 PositiveFeedbackArchitecture 126
5.5 ExperimentalPrototype 133
5.5.1 Implementation 133
5.5.2 ExperimentalResults 138
5.6 Summary 142
References 143
6 IntroductiontoCMOS-BasedDNAMicroarrays 145
RolandThewes
6.1 Introduction 145
6.2 BasicOperationPrincipleandApplicationofDNAMicroarrays 146
6.3 Functionalization 149
6.4 CMOSIntegration 150
viii Contents
6.5 ElectrochemicalReadoutTechniques 153
6.5.1 DetectionPrinciples 153
6.5.2 PotentiometricSetup 160
6.5.3 ReadoutCircuitry 162
6.6 FurtherReadoutTechniques 165
6.6.1 Labeling-BasedApproaches 165
6.6.2 Label-FreeApproaches 166
6.7 RemarksonPackagingandAssembly 169
6.8 ConcludingRemarksandOutlook 169
References 170
7 CMOSImageSensors 173
AlbertTheuwissen
7.1 ImpactofCMOSScalingonImageSensors 173
7.2 CMOSPixelArchitectures 175
7.3 PhotonShotNoise 180
7.4 Analog-to-DigitalConvertersforCMOSImageSensors 181
7.5 LightSensitivity 184
7.6 DynamicRange 186
7.7 GlobalShutter 187
7.8 Conclusion 188
Acknowledgment 188
References 188
8 ExploringSmartSensorsforNeuralInterfacing 190
TimDenison,PengCongandPedramAfshar
8.1 Introduction 190
8.2 TechnicalConsiderationsforDesigningaDynamicNeuralControlSystem 192
8.3 PredicateTherapyDevicesUsingSmart-SensorsinaDynamicControl
Framework:LessonsDerivedfromClosed-LoopCardiacPacemakers 195
8.4 TheApplicationof“Indirect”SmartSensingMethods:ACaseStudy
ofPostureResponsiveSpinalCordStimulationforChronicPain 198
8.4.1 OverviewofthePostureResponsiveControlSystem 198
8.4.2 TheDesignChallenge:DefiningtheDesiredPatientState 198
8.4.3 ThePhysicalSensor:ThreeAxisAccelerometer 200
8.4.4 DesignDetailsoftheThree-AxisAccelerometer 202
8.4.5 MakingtheSensor“Smart”withStateEstimation:ThePosition
DetectionAlgorithmandTitrationAlgorithm 205
8.4.6 “ClosingtheLoop”:MappingInertial-InformationtoStimulation
ParametersforPosture-BasedAdaptiveTherapy 206
8.5 DirectSensingofNeuralStates:ACaseStudyinSmartSensorsfor
MeasurementofNeuralStatesandEnablementofClosed-Loop
NeuralSystems 207
8.5.1 ImplantableBidirectionalBrain-Machine-InterfaceSystemDesign 209
8.5.2 DesignOverviewofaChopperStabilizedEEGInstrumentation
Amplifier 210
Description:Uses a multidisciplinary approach to review recent developments in the field of smart sensor systems, providing complete coverage of all important system and design aspects, their building blocks and methods of signal processing.The book systematically deals with topics over the whole range of senso
