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About Silvaco TCAD Part I - Overview
This document provides an overview of the Silvaco TCAD simulation software. It describes the main modules of Silvaco including Athena for 2D process simulation, Atlas for 1D/2D/3D device simulation, SSuprem3 for 1D process simulation, Mercury for 2D device simulation, and Mocasim for Monte Carlo transport simulation. It also provides examples of using SSuprem3 for diffusion and oxidation simulations and Athena for oxidation, diffusion, and ion implantation simulations.
Detailed Information
| Author: | ['Tuấn Hoàng'] |
|---|---|
| Publication Year: | 2015 |
| Pages: | 19 |
| Language: | English |
| Format: | |
| Price: | FREE |
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