Table Of ContentSensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki
Copyright © 2001 Wiley-VCH Verlag GmbH
ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic)
Sensors Applications
Volume 1
Sensors in Manufacturing
Sensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki
Copyright © 2001 Wiley-VCH Verlag GmbH
ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic)
Sensors Applications
Upcoming volumes:
(cid:1)
Sensors in Intelligent Buildings
(cid:1)
Sensors in Medicine and Health Care
(cid:1)
Sensors in Automotive Technology
(cid:1)
Sensors in Aerospace Technology
(cid:1)
Sensors in Environmental Technology
(cid:1)
Sensors in Household Appliances
Related Wiley-VCH titles:
W. Göpel, J. Hesse, J.N. Zemel
Sensors Vol. 1–9
ISBN 3-527-26538-4
H. Baltes, W. Göpel, J. Hesse
Sensors Update
ISSN 1432-2404
Sensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki
Copyright © 2001 Wiley-VCH Verlag GmbH
ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic)
Sensors Applications
Volume 1
Sensors in Manufacturing
Edited by
H.K. Tönshoff, I. Inasaki
Series Editors:
J. Hesse, J.W. Gardner, W. Göpel
Weinheim – New York – Chichester – Brisbane – Singapore – Toronto
Sensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki
Copyright © 2001 Wiley-VCH Verlag GmbH
ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic)
SeriesEditors (cid:1) This book was carefully produced. Nevertheless,
authors,editorsandpublisherdonotwarrantthe
Prof.Dr.J.Hesse informationcontainedthereintobefreeofer-
CarlZeiss rors.Readersareadvisedtokeepinmindthat
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73447 Oberkochen orotheritemsmay inadvertently beinaccurate.
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All rightsreserved(includingthoseoftranslation
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ISBN 3-527-29558-5
Sensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki V
Copyright © 2001 Wiley-VCH Verlag GmbH
ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic)
Preface to the Series
As the use of microelectronics became increasingly indispensable in measure-
ment and control technology, so there was an increasing need for suitable sen-
sors. From the mid-Seventies onwards sensors technology developed by leaps and
bounds and within ten years had reached the point where it seemed desirable to
publish a survey of what had been achieved so far. At the request of publishers
WILEY-VCH, the task of editing was taken on by Wolfgang Göpel of the Univer-
sity of Tübingen (Germany), Joachim Hesse of Carl Zeiss (Germany) and Jay Ze-
mel of the University of Philadelphia (USA), and between 1989 and 1995 a series
called Sensors was published in 8 volumes covering the field to date. The material
was grouped and presented according to the underlying physical principles and
reflected the degree of maturity of the respective methods and products. It was
written primarily with researchers and design engineers in mind, and new devel-
opments have been published each year in one or two supplementary volumes
called Sensors Update.
Both the publishers and the series editors, however, were agreed from the start
that eventually sensor users would want to see publications only dealing with
their own specific technical or scientific fields. Sure enough, during the Nineties
we saw significant developments in applications for sensor technology, and it is
now an indispensable part of many industrial processes and systems. It is timely,
therefore, to launch a new series, Sensors Applications. WILEY-VCH again commis-
sioned Wolfgang Göpel and Joachim Hesse to plan the series, but sadly Wolfgang
Göpel suffered a fatal accident in June 1999 and did not live to see publication.
We are fortunate that Julian Gardner of the University of Warwick has been able
to take his place, but Wolfgang Göpel remains a co-editor posthumously and will
not be forgotten.
The series of Sensors Applications will deal with the use of sensors in the key
technical and economic sectors and systems: Sensors in Manufacturing, Intelligent
Buildings, Medicine and Health Care, Automotive Technology, Aerospace Technology,
Environmental Technology and Household Appliances. Each volume will be edited by
specialists in the field. Individual volumes may differ in certain respects as dic-
tated by the topic, but the emphasis in each case will be on the process or system
in question: which sensor is used, where, how and why, and exactly what the ben-
efits are to the user. The process or system itself will of course be outlined and
VI Preface to the Series
the volume will close with a look ahead to likely developments and applications in
the future. Actual sensor functions will only be described where it seems neces-
sary for an understanding of how they relate to the process or system. The basic
principles can always be found in the earlier series of Sensors and Sensors Update.
The series editors would like to express their warm appreciation in the col-
leagues who have contributed their expertise as volume editors or authors. We are
deeply indebted to the publisher and would like to thank in particular Dr. Peter
Gregory, Dr. Jörn Ritterbusch and Dr. Claudia Barzen for their constructive assis-
tance both with the editorial detail and the publishing venture in general. We
trust that our endeavors will meet with the reader’s approval.
Oberkochen and Conventry, November 2000 Joachim Hesse
Julian W. Gardner
VII
Preface to Volume 1 of “Sensors Applications”
Manufacturing technology has undergone significant developments over the last
decades aiming at improving precision and productivity. The development of nu-
merical control (NC) technology in 1952 made a significant contribution to meet-
ing these requirements. The practical application of NC machine tools have stim-
ulated technological developments that make the tools more intelligent, and al-
lows the machining process to be carried out with higher reliability. Today, thanks
to the significant developments in sensor and computer technologies, it can be
said that the necessary tools are available for achieving the adaptive control of
manufacturing processes, assisted by monitoring systems, which was a dream in
the 1950’s.
For the following reasons, monitoring technology with reliable sensors is be-
coming more and more important in modern manufacturing systems:
(cid:1) Machine tools operate with speeds that do not allow manual intervention. How-
ever, collisions or process failures may cause significant damage.
(cid:1) Manufacturing systems have become larger in scale, and monitoring of such
large-scale systems is already beyond the capability of human beings.
(cid:1) Increase of labor costs and the shortage of skilled operators calls for operation
of the manufacturing system with minimum human intervention; this requires
the introduction of advanced monitoring systems.
(cid:1) Ultra-precision manufacturing can only be achieved with the aid of advanced
metrology and process monitoring technology.
(cid:1) The use of sophisticated machine tools requires the integration of monitoring
systems to prevent machine failure.
(cid:1) Heavy-duty manufacturing processes with higher energy consumption should
be conducted with minimum human intervention, from the safety point of
view.
In addition,
(cid:1) Environmental consciousness in the manufacturing of today requires monitor-
ing emissions from the process.
This book deals with monitoring technologies in various manufacturing pro-
cesses, and aims to provide the latest developments in those fields together with
VIII Preface to Volume 1 of “Sensors Applications”
the necessary principles behind these developments. We are convinced that the
readers of this book, both in research institutes and in industry, can obtain infor-
mation necessary for their research and developmental work.
The editors wish to thank the specialists who contributed their expertise and
forbearance during the various stages of preparation. In addition to the assistance
of the authors, we would like to thank the staff of Wiley-VCH for their support.
Hannover and Yokohama, November 2000 Hans Kurt Tönshoff
Ichiro Inasaki
Sensors in Manufacturing. Edited by H.K. Tönshoff, I. Inasaki IX
Copyright © 2001 Wiley-VCH Verlag GmbH
ISBNs: 3-527-29558-5(Hardcover); 3-527-60002-7(Electronic)
Contents
List of Contributors XVII
1 Fundamentals 1
1.1 Roles of Sensors in Manufacturing and Application Range 1
I. Inasaki, H. K. Tönshoff
1.1.1 Manufacturing 1
1.1.2 Unit Processes in Manufacturing 2
1.1.3 Sensors 3
1.1.4 Needs and Roles of Monitoring Systems 4
1.1.5 Trends 5
1.1.6 References 6
1.2 Principles of Sensors for Manufacturing 6
D. Dornfeld
1.2.1 Introduction 6
1.2.2 Basic Sensor Classification 10
1.2.3 Basic Sensor Types 13
1.2.3.1 Mechanical Sensors 13
1.2.3.2 Thermal Sensors 17
1.2.3.3 Electrical Sensors 17
1.2.3.4 Magnetic Sensors 18
1.2.3.5 Radiant Sensors 18
1.2.3.6 Chemical Sensors 18
1.2.4 New Trends – Signal Processing and Decision Making 19
1.2.4.1 Background 19
1.2.4.2 Sensor Fusion 21
1.2.5 Summary 23
1.2.6 References 23
1.3 Sensors in Mechanical Manufacturing – Requirements, Demands,
Boundary Conditions, Signal Processing, Communication 24
T. Moriwaki
1.3.1 Introduction 24
1.3.2 Role of Sensors and Objectives of Sensing 24
1.3.3 Requirements for Sensors and Sensing Systems 27
X Contents
1.3.4 Boundary Conditions 31
1.3.5 Signal Processing and Conversion 32
1.3.5.1 Analog Signal Processing 32
1.3.5.2 AD Conversion 34
1.3.5.3 Digital Signal Processing 36
1.3.6 Identification and Decision Making 39
1.3.6.1 Strategy of Identification and Decision Making 39
1.3.6.2 Pattern Recognition 40
1.3.6.3 Neural Networks 41
1.3.6.4 Fuzzy Reasoning 42
1.3.7 Communication and Transmission Techniques 43
1.3.8 Human-Machine Interfaces 44
1.3.9 References 45
2 Sensors for Machine Tools and Robots 47
H.K. Tönshoff
2.1 Position Measurement 47
2.2 Sensors for Orientation 58
2.3 Calibration of Machine Tools and Robots 60
2.4 Collision Detection 62
2.5 Machine Tool Monitoring and Diagnosis 65
2.6 References 70
3 Sensors for Workpieces 71
3.1 Macro-geometric Features 71
A. Weckenmann
3.1.1 Mechanical Measurement Methods 72
3.1.1.1 Calipers 72
3.1.1.2 Protractors 73
3.1.1.3 Micrometer Gages 73
3.1.1.4 Dial Gages 75
3.1.1.5 Dial Comparators 76
3.1.1.6 Lever-type Test Indicators 76
3.1.2 Electrical Measuring Methods 76
3.1.2.1 Resistive Displacement Sensors 77
3.1.2.2 Capacitive Displacement Sensors 77
3.1.2.3 Inductive Displacement Sensors 78
3.1.2.4 Magnetic Incremental Sensors 81
3.1.2.5 Capacitive Incremental Sensors 81
3.1.2.6 Inductive Incremental Sensors 82
3.1.3 Electromechanical Measuring Methods 83
3.1.3.1 Touch Trigger Probe 84
3.1.3.2 Continuous Measuring Probe System 84
3.1.4 Optoelectronic Measurement Methods 86
3.1.4.1 Incremental Methods 86
