Table Of ContentSENSORS
AND
MICROSYSTEMS
Also published by World Scientific:
1s t Italian Conference on Sensors and Microsystems
Edited by C. Di Natale and A. D’Amico
ISBN: 981- 02-2808-2
2nd Italian Conference on Sensors and Microsystems
ARTIFICIAL AND NATURAL PERCEPTION
Edited by C. Di Natale, A. D’Amico and F. Davide
ISBN: 981 -02-3299-3
3rd Italian Conference on Sensors and Microsystems
Edited by C. Di Natale, A. D’Amico and G. Sberveglieri
ISBN: 981- 02-3759-6
4th Italian Conference on Sensors and Microsystems
Edited by C. Di Natale, A. D’Amico and F. Davide
ISBN: 981- 02-419 9-2
5th Italian Conference on Sensors and Microsystems
Extended to Mediterranean Countries
Edited by C. Di Natale, A. D’Amico and P. Siciliano
ISBN: 981- 02-4487-8
6th Italian Conference on Sensors and Microsystems
Edited by C. Di Natale, A. D’Amico and P. Dario
ISBN: 981 -02-4895-4
7th Italian Conference on Sensors and Microsystems
Edited by C. Di Natale, A. D’Amico , L. Dori, G. C. Cardinali and
S. Nicoletti
ISBN: 981- 238-18 1 -3
Proceedings of the 8th Italian Conference
SENSORS
AND
MICROSYSTEMS
Trento, Italy 12 - 14 February 2003
Editors
C. Di N a d e
A. D'Amico
University ofRome //TorV mgtatta"
and CNR-IMM, Ittaly
G. Soncini
University of Trento, Ittaly
I,.
Ferraxio
M. Zen
ITC-irst, Ittaly
\:
World Scientific
- -
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British Library Cataloguing-in-PublicationD ata
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SENSORS AND MICROSYSTEMS
Proceedings of the 8th Italian Conference
Copyright 0 2004 by World Scientific Publishing Co. Re. Ltd.
All rights reserved. This book, or parts thereof; may not be reproduced in any form or by any means,
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ISBN 981-238-747-1
Printed in Singapore
CONFERENCE SPONSORS
The following sponsorships of the Conference are gratefully acknowledged:
Agilent Technologies, Milano
Associazione Artigiani della Provincia Autonoma di Trento
Associazione Industriali di Trento
Electron-Mec s,~lM. ilano
Camera di Cornrnercio, Industria, Artigianato e Agricoltura di Trento
CCEII Centri Europei d’lmpresa e Innovazione, Trento
APT-Azienda di Promozione Turistica, Trento
Agenzia per lo Sviluppo di Trento
Provincia Autonoma di Trento
Progetto PAT/CNR “fonnazione e ricerca in rnicrosisterni”
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Conference Chair
Giovanni Soncini, Universita’ di Trento
Mario Zen, ITC-irst Trento
Steering Commitee
A. D’Amico Universitci di Roma “Tor Vergata” ,
Chairperson of AISEM
G. Martinelli Universith di Ferrara
G. Sberveglieri Universith di Brescia
L. Campanella Universitci di Roma “La Sapienza”
U. Mastromatteo STMicroelectronics
P. Siciliano CNR-IMM-IME Lecce
P. De Gasperis CNR-IMM-PSM Roma
A. Mignani IROE-CNR Firenze
G. Soncini Universitci di Trento
C. Mari Universitci di Milano
M. Prudenziati Universitci di Modena
Scientific Committee
F. Davide Telecom Italia, Roma
A. Diligenti Universitci di Pisa
C. Di Natale Universitd di Roma “Tor Vergata”
L. Dori CNR-IMM Bologna
G. Faglia Universith di Brescia
C. Malvicino CRF Orbassano
M. Mascini Universitci di Firenze
B. Morten Universitci di Modena
G. Palleschi Universitci di Roma “Tor Vergata
”
F. Villa STMicroelectronics
M. Zen ITC-irst Trento
Local Organisation
Lorenza Ferrario ITC-irst
Secretariat
Loredana Panato, Marzia Lucianer, ITC, Univ. Trento
Chiara Cereghini
vii
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FOREWORD
This book gathers the proceedings of the papers presented and discussed at
the 8th italian conference on Sensors and Microsystems held in Trento,
from. 12 to 14 February 2003, and sponsored by the AISEM (Associazione
Italiana Sensori e Microsistemi), the University of Trento, the ITC-irst and a
number of companies and organization listed in the next page.
As it happened in previous editions, the conference has been designed to
show the pluridisciplinary character of the Italian research in the always
evolving field of sensors, microsystems and actuators. In fact, aspects of
chemistry, biology, electronics, material science, actuators, specials sensor
applications of industrial interest were covered with a spontaneous
homogeneity. In particular, the presentation of aspects of sensing actions in
living cells has opened a new research direction which looks promising
indeed.
The conference has represented a unique forum, at national level, for
fkuitful interactions among participants, as evidenced by the numerous
research initiatives which have taken off during the threee days meeting.
Also the AISEM school organized by the University of Trento and ITC-irst
on MEMS design has had a sound success and due to this a similar
experience will be reconsidered the next year.
The editors would like to thank the numerous participants who have kept the
conference pretty alive and all the collaborators of the local organizers for
their superb job in organizing a pleasant conference.
The Steering Committee, the ScientiJc Committee and the Local Organizing
Committee would like to express their appreciation to Dr. P. Siciliano, who
has addressed felt thoughts toward the missing of our friend and colleague
Pro$ A. Rizzo, a splendid person who has supported, since its beginning,
our Association. We dedicate this book to his memory as a little human
touch, thinking to his extraordinary human and scientijk qualities.
Arnaldo D’Amico
Corrado Di Natale
Giovanni Soncini
Lorenza Ferrario
Mario Zen
IX
