Semiconductor Sensors in Physico-Chemical Studies (Handbook of Sensors and Actuators)

413 Pages·1996·18.7 MB·English

by  L.Yu Kupriyanov

Semiconductor Sensors
in Physico-Chemical Studies
HANDBOOK OF SENSORS AND ACTUATORS
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Series Editor: S. Middelhoek, Delft University of Technology,
The Netherlands
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Volume 1 Thick Film Sensors (edited by M. Prudenziati)
Volume 2 Solid State Magnetic Sensors (by C.S. Roumenin)
Volume 3 Intelligent Sensors (edited by H. Yamasaki)
Volume 4 Semiconductor Sensors in Physico-Chemical
Studies (edited by L. Yu. Kupriyanov)
Volume 5 Mercury Cadmium Telluride Imagers
(by A. Onshage)
Volume 6 Micro Mechanical Systems (edited by T. Fukuda
and W. Menz)
Volume 7 Measuring Current, Voltage and Power
(by K. Iwansson, G. Sinapius and W. Hoomaert)
Volume 8 Micro Mechanical Transducers
Pressure Sencors, Accelerometers and
Gyroscopes (by M.-H. Bao)
HANDBOOK OF SENSORS AND ACTUATORS 4
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Semiconductor Sensors
in Physico- Chemical Studies
Edited by
L. Yu. Kupriyanov
Department of Chemical Sensors
Karpov Institute of Physical Chemistry
Moscow, Russia
Translated from Russian by
V. Yu. Vetrov
ELSEVIER
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First edition 1996
Second impression 2002
Library of Congress Cataloging in Publication Data
Poluprovodnlkovye sensory v ftzlko-khtalchesklkh lssledovanl~kh.
English
Semiconductor sensors in physlco-chemlcal studies / edited by
L.Yu. Kuprtyanov.
p. cm. -- (Handbook oF sensors and actuators . v. 4)
Includes bibliographical references.
ZSBN 0-444-82261-5 (acid-Free paper)
1. Chemical detectors. 2. Semiconductors. I. Kupr]yanov, L. Yu.
II. Series.
TP159.C46P6513 1996
543',0871--dc20 96-5829
CIP
ISBN: 0-444-82261-5
The paper used in this publication meets the requirements of ANSI/NISO Z39.48-1992
(Permanence of Paper).
Printed in The Netherlands.
Introduction to the Series
The arrival of integrated circuits with very good performance/price ratios and relatively low-
cost microprocessors and memories has had a profound influence on many areas of technical
endeavour. Also in the measurement and control field, modern electronic circuits were
introduced on a large scale leading to very sophisticated systems and novel solutions.
However, in these measurement and control systems, quite often sensors and actuators were
applied that were conceived many decades ago. Consequently, it became necessary to improve
these devices in such a way that their performance/price ratios would approach that of modern
electronic circuits.
This demand for new devices initiated worldwide research and development programs in the
field of "sensors and actuators n. Many genetic sensor technologies were examined, from
which the thin- and thick-film, glass fiber, metal oxides, polymers, quartz and silicon
technologies are the most prominent.
A growing number of publications on this topic started to appear in a wide variety of
scientific journals until, in 1981, the scientific journal Sensors and Actuators was initiated.
Since then, it has become the main journal in this field.
When the development of a scientific field expands, the need for handbooks arises, wherein
the information that appeared earlier in journals and conference proceedings is systematically
and selectively presented. The sensor and actuator field is now in this position. For this
reason, Elsevier Science took the initiative to develop a seres of handbooks with the name
"Handbook of Sensors and Actuators" which will contain the most meaningful background
material that is important for the sensor and actuator field. Titles like Fundamentals of
Transducers, Thick Film Sensors, Magnetic Sensors, Micromachining, Piezoelectric Crystal
Sensors, Robot Sensors and Intelligent Sensors will be part of this seres.
The series will contain handbooks compiled by only one author, and handbooks written by
many authors, where one or more editors bear the responsibility for bringing together topics
and authors. Great care was given to the selection of these authors and editors. They are all
well known scientists in the field of sensors and actuators and all have impressive
international reputations.
Elsevier Science and I, as Editor of the series, hope that these handbooks will receive a
positive response from the sensor and actuator community and we expect that the series will
be of great use to the many scientists and engineers working in this exciting field.
Simon Middelhoek
vi
PUBLISHER'S NOTE
We are pleased to present to you this book on Semiconductor Sensors in
Physico-Chemical Studies, edited by Dr. Leonid Kupriyanov of the Karpov
Institute of Physical Chemistry in Moscow. Translated from Russian by a
professional translator, the prose still retains some of its local flavour
although, we trust, it is clearly understandable throughout.
Had we further polished the language we would not only have lost at least
another six months in bringing the book to you but we would also have
incurred costs which would have been reflected in a higher price. We trust
you will not find the readability of the text detracts unduly from your
appreciation of this work, which we feel makes a most worthwhile
contribution to the available literature in this field.
Mark Eligh
Publishing Editor
VIeQI
ABSTRACT
The monograph is devoted to scientific basis of semiconductor
chemical sensors technique. Its attention is focused at the usage of semi-
conductor sensors in the precision physico-chemical studies. The mono-
graph expounds physical and chemical basis underlying the semiconduc-
tor sensor method, discusses the mechanism of processes occurring under
interaction of gas with semiconductor adsorbent surface, leading to
changed electrophysical parameters of the latter.
The monograph is intended for the scientists and engineers special-
ized in physical-chemistry of heterogeneous and heterogeneous-
homogeneous processes and designing of semiconductor chemical sensors.
viii
List of Contributors:
Prof. L A.Myamikov ( Chapters 3,4 )
Chiefo f Department of Chemical Sensors, Karpov Institute ofP hysieal Chemistry,
Moscow, Ru~a.
Dr. V.YL S ~ ( Chaptm 1,2 )
Sentor Researeher, D~artment of Clu~cal Smsors, Karpov Institute ofP hysical
Chemts~, Moscov, aussid .
Dr. L Yu. Kupriyanov ( Chapter 5 )
Senior Researcl~r, Department of Chontcal Sensors, Karpov Institute ofP hysical
Chemistry,M oscov, Russia.
Dr. S.~_ 7_z~z~ov ( Ch,p~r 6 )
Senior Researcher, Department o/Chemical Sensors, Karpov Institute o/Physical
ChemEmy, Moscov, Rusaa.
Present addv~: LSI Logic Corporation, 3115 Alfred St~ee~ MS J-201, Ssnta
Clam, CA 95054, USA.
ix
CONTENTS
Introduction ........................................................................
Chapter 1 Physical and chemical basics of the method of semi-
conductor sensors .................................................
1.1. What are the semiconductor chemical sensors9
1.2. The role of electronic theory of chemisorption in
developing ideas on effects of adsorption on
electrical and physical properties of semiconduc-
tor adsorbents ............................................. 10
1.3. Various forms of adsorption .......................... 13
1.4. Adsorption isotherms ................................... 17
1.5. Kinetics of adsorption .................................. 20
1.6. Characteristic temperature intervals of gas-
solid body interaction .................................. 23
1.7. Effect of adsorption on electrophysical proper-
ties of semiconductors .................................. 25
1.7.1. Chemisorption induced band bending in
semiconductor ............................................. 26
1.7.2. The effect of adsorption charging of the
surface on the value of conductivity of surface-
adjacent layers and semiconductor adsorbent
work function ............................................. 35
1.8. Role of recharging of biographic surface states
during chemisorption charging of a semiconduc-
tor surface .................................................. 41
t.9. The kinetic of adsorption charging of the surface
of semiconductor under relaxation of biographic
surfacing charge .......................................... 45
1.10. The effect of adsorption surface charging on
electrophysical characteristics of polycrystalline
semiconductor adsorbents .............................. 51
1.10.1. Adsorption of acceptor particles ......... 55
t. 10.2. Adsorption of donor particles ............. 67
1.t0.3. Adsorption response of electrophysical
characteristics of semiconductor sensors made of
barrier-disordered polycrystalline oxides ......... 72
1.11. The effect of adsorption on concentration of the
surface and volume interstitial defects in semi-
conductor adsorbent and resultant change in
electric conductivity .................................... 81