Science and Technology of Integrated Ferroelectrics: Selected Papers from Eleven Years of the Proceedings of the International Symposium of Integrated Ferroelectronics

761 Pages·55.5 MB·\761

by  Carlos Pazde-Araujo (Author), Ramamoorthy Ramesh (Author), George W Taylor (Author)

SCIENCE AND
TECHNOLOGY
OF
INTEGRATED
FERROELECTRICS
Ferroelectricity and Related Phenomena
Editor: George W. Taylor, Princeton Resources, Princeton, New Jersey, USA
Associate Editor: Lev A. Shuvalov, Institute of Crystallography, Russian
Academy of Sciences, Moscow, Russia
Volume 1
An Introduction to the Physics of Ferroelectrics
T. Mitsui, I. Tatsuzaki and E. Nakamura
Volume 2
Sourcebook of Pyroelectricity
S.B. Lang
Volume 3
Ferroelectrics and Related Materials
G.A. Smolenskii, V.A. Bokov, V.A. Isupov, N.N. Krainik, R.E. Pasynkov and A.I. Sokolov
Volume 4
Piezoelectricity
Edited by G.W. Taylor, J.J. Gagnepain, T.R. Meeker, T. Nakamura and L.A. Shuvalov
Volume 5
Medical Applications of Piezoelectric Polymers
Edited by Pierre M. Galletti, Danilo E. De Rossi and Aime S. De Reggi
Volume 6
Defects and Structural Phase Transitions
A. P. Levanyuk and A.S. Sigov
Volume 7
Ferroelectric Liquid Crystals: Principles, Properties and Applications
J.W. Goodby, R. Blinc, N.A. Clark, S.T. Lagerwall, M.A. Osipov, S.A. Pikin, T. Sakurai, K. Yoshino
and B. Zeks
Volume 8
The Photovoltaic and Photorefractive Effects in Noncentrosymmetric Materials
B. I. Sturman and V.M. Fridkin
Volume 9
Microwave Dielectric Spectroscopy of Ferroelectrics and Related Materials
J. Grigas
Volume 10
Ferroelectric Thin Films: Synthesis and Basic Properties
Edited by C. Paz de Araujo, J.F. Scott and G.W. Taylor
Volume 11
Science and Technology of Integrated Ferroelectrics: Selected Papers from Eleven Years of the
Proceedings of the International Symposium on Integrated Ferroelectrics
Edited by C. Paz de Araujo, O. Auciello, R. Ramesh, and G. W. Taylor
This book is part of a series. The publisher will accept continuation orders which
may be cancelled at any time and which provide for automatic billing and shipping
of each title in the series upon publication. Please write for details.
Science and Technology of Integrated Ferroelectrics
Selected Papers from Eleven Years of the
Proceedings of the International Symposium
on Integrated Ferroelectrics
Edited by
Carlos Paz de Araujo
University of Colorado at Colorado Springs, CO, USA
Symetrix Corporation, Colorado Springs, CO, USA
Orlando Auciello
Argonne National Laboratory
Materials Science Division
Argonne, IL, USA
Ramamoorthy Ramesh
University of Maryland
Department of Materials and Nuclear Engineering
College Park, MD, USA
George W. Taylor
Princeton Resources Inc.
Princeton, NJ, USA
Boca Raton London New York
CRC Press is an imprint of the
Taylor & Francis Group, an informa business
First published 2000 by Gordon and Breach Science Publisher
Published 2018 by CRC Press
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Boca Raton, FL 33487-2742
© 2000 by Taylor & Francis Group, LLC
CRC Press is an imprint of Taylor & Francis Group, an lnforma business
No claim to original U.S. Government works
ISBN 13: 978-90-5699-704-5 (hbk)
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British Library Cataloguing in Publication Data
Science and technology of integrated ferroelectrics:
selected papers from eleven years of the International
Symposium ofFerroelectrics Proceedings. -
(F erroelectricity and related phenomena ; v. 11)
I. Ferroelectric thin films 2. Ferroelectricity
I. Araujo, Carlos Paz de II. International Symposium of
F erroelectrics Proceedings)
537.2'448
DEDICATED TO:
Professor Rainer Zuleeg
Technical Program Chair, International Symposium on
Integrated Ferroelectrics 1994
Guest Editor, the international journal,
Integrated Ferroelectrics,
March 1994
Book Review Editor, the international journal,
Integrated Ferroelectrics,
from 1992 to 1999
and
Alona S. Miller
Symposium Coordinator, International Symposium on
Integrated Ferroelectrics, 1989 to 1998
ACKNOWLEDGMENTS
The authors would like to thank Ms. Kerry Baugh for her work in making
this project possible. We also would like to thank the authors of the original
papers published in the last 11 years of the international journal Integrated
Ferroelectrics.
CONTENTS
Series Editor’s Foreword xiii
G.W. Taylor
Preface xv
C. Paz de Araujo, O. Auciello, R. Ramesh and G.W. Taylor
Introduction: Science and Technology of Ferroelectric Filins
and Heterostructures for Non-Volatile Ferroelectric Memories:
Past Eleven Years and the Future xvii
C. Paz de Araujo, O. Auciello and R. Ramesh
1. Processing and Parameters of Sol-Gel PZT Thin-Films for
GaAs Memory Applications 1
S.K. Dey and R. Zuleeg
2. Pulsed Laser Deposition of Oriented PbZr^Ti^Oa 13
K.S. Grabowski, J.S. Horwitz and D.B. Chrisey
3. Processing-Structure Relations for Ferroelectric Thin
Films Deposited by Ion Beam Sputter Deposition 29
A. Kingon, M. Ameen, O. Auciello, K. Gifford, H. Al-Shareef
T. Graettinger, S.-H. Rou and P. Hren
4. Recent Results on Switching, Fatigue and Electrical
Characterization of Sol-Gel Based PZT Capacitors 45
B. M. Melnick, C.A. Paz de Araujo, L.D. McMillan,
D.A. Carver and J.F. Scott
5. Microscopic Modeling of Thin-Film Ferroelectrics:
Fatigue 61
P.D. Beale and H.M. Duiker
6. A Circuit Model for a Thin Film Ferroelectric Memory
Device 67
A.K. Kulkami, G.A. Rohrert S. Narayan and L.D. McMillan
1. Radiation Damage in Ferroelectric Thin-Film Memories 79
J.F. Scott, C.A. Paz de Araujo and L.D. McMillan
8. Integrated Ferroelectrics 83
C. A. Paz de Araujo and G.W. Taylor
vii
viii CONTENTS
9. Ferroelectric PbZr0<2Ti0<gO3 Thin Films on Epitaxial
Y-Ba-Cu-O 97
R. Ramesh, A. Inam, W.K. Chan, B. Wilkens, F. Tillerot,
T. Sands, J.M. Tarascon, J. Bullington and J. Evans
10. Statistical Theory of Fatigue in Ferroelectric Devices 105
C.A. Paz de Araujo, R. Zuleeg, T. Mihara, H. Watanabe,
A. Carrico, L.D. McMillan and J.F. Scott
11. Sol-Gel Derived Ferroelectric Thin Films in Silicon
Micromachining 123
C. -C. Hsueh, T. Tamagawa, C. Ye, A. Helgeson and
D. L. Polla
12. Theory of Conduction and Breakdown in Perovskite
Thin Films 135
R. Waser and M. Klee
13. Numerical Analysis of Ferroelectric Characteristics for
Memory Use hy Using a Lattice Model 153
M. Omura, H. Adachi and Y Ishibashi
14. Anomalous Remanent Polarization in Ferroelectric
Capacitors 163
N. E. Abt, R. Moazzami and Y Nissan-Cohen
15. Chemical Aspects of Ph-Zr-Ti Oxide Thin Film Syntheses
by PE-MOCVD Below 500°C 175
W.T. Petuskey, D.A. Richardson and S.K. Dey
16. Epitaxial Lao.5Sr0^Co03 Electrode Films for Ferroelectric
Device Applications 203
J.T. Cheung, P.E.D. Morgan, R. Neugoankar and M. Goorsk
17. Conducting Oxide Electrodes for Ferroelectric Films 215
C.K. Kwok, D.P. Vijay, S.B. Desu, N.R. Parikh and E.A. Hill
18. Deposition of Ba1_xSrJCTi03 and SrTi03 via Liquid Source
CVD (LSCVD) for ULSI DRAMs 225
L.D. McMillan, M. Huffman, T.L. Roberts, M.C. Scott and
C.A. Paz de Araujo
CONTENTS IX
19. A Theory of Polarization Reversals in Finite Systems 231
Y. lshibashi
20. Electrochemical Models of Failure in Oxide Perovskites 235
S. B. Desu and I.K. Yoo
21. Defect Chemistry and Transport Properties of
PbCZr^Ti^Oa 247
M.V. Raymond and DM. Smyth
22. Large-Area Growth of Pb(Zr,Ti)03 Thin Films by
MOCVD 257
T. Shiosaki, M. Fujimoto, M. Shimizu, M. Fukagawa,
K. Nakaya and E. Tanikawa
23. Plasma Etching of PLZT: Review and Future Prospects 265
C.B. Fleddermann
24. Ferroelectric La-Sr-Co-O/Pb-La-Zr-Ti-O/La-Sr-Co-O
Heterostructures on Silicon 275
J. Lee, R. Ramesh, B. Dutta, T.S. Ravi, T. Sands and
V.G. Keramidas
25. Fatigue and Retention of Pb(Zr0^3Tio.47)03 Thin Film
Capacitors with Pt and Ru02 Electrodes 285
H.N. Al-Shareef, K.R. Bellur, O. Auciello and A.I. Kingon
26. 256Kb Ferroelectric Nonvolatile Memory Technology
for 1T/1C Cell with 100ns Read/Write Time at 3V 297
T. Sumi, N. Moriwaki, G. Nakane, T. Nakakuma, Y. Judai,
Y. Uemoto, Y. Nagano, S. Hayashi, M. Azuma, T. Otsuki,
G. Kano, J.D. Cuchiaro, M.C. Scott, L.D. McMillan and
C. A. Paz de Araujo
27. Study on Ferroelectric Thin Films for Application to
NDRO Non-Volatile Memories 311
Y. Nakao, T. Nakamura, A. Kamisawa and H. Takasu
28. Integrated Ferroelectric Microelectromechanical Systems
(MEMS) 323
D. L. Polla and P.J. Schiller