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About Project Final Report: Usually The Contact Person of The Coordinator As Specified in Art. 8.1. of The Grant Agreement
The project developed an integrated high-volume production process for piezoelectric microsystems to address three key bottlenecks: high volume deposition of PZT thin films, in-line testing of piezoelectric thin film quality, and piezoelectric modeling tools. Significant advances were made including demonstrating a world record PZT transverse piezoelectric coefficient of -20 C/m2 using sputtering on 200mm wafers. Process tools, quality monitoring equipment, and piezoelectric modeling software were also developed and show potential for commercialization. Prototypes were fabricated to demonstrate the complete production process chain and its ability to produce high performing piezoelectric MEMS for applications like inkjet printing heads and medical
Detailed Information
Author: | ['nayeem banu'] |
---|---|
Publication Year: | 2020 |
Pages: | 41 |
Language: | English |
Format: | |
Price: | FREE |
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