Table Of ContentEdited by
Ghenadii Korotcenkov
POROUS
SI LICON
From Formation to Application
Biomedical and Sensor Applications, Volume Two
© 2016 by Taylor & Francis Group, LLC
CRC Press
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Contents
Preface .............................................................................................................................................................................................................................................................................xi
Editor .............................................................................................................................................................................................................................................................................xiii
Contributors ...............................................................................................................................................................................................................................................................xv
Section i—Sensors
chapter 1 Solid State Gas and Vapor Sensors Based on Porous Silicon ...........................................................................................................................3
Ghenadii Korotcenkov
chapter 2 Optimization of PSi-Based Sensors Using IHSAB Principles ...........................................................................................................................45
James L. Gole and Caitlin Baker
chapter 3 Porous Silicon-Based Optical Chemical Sensors...................................................................................................................................................69
Luca De Stefano, Ilaria Rea, Alessandro Caliò, Jane Politi, Monica Terracciano, and Ghenadii Korotcenkov
chapter 4 PSi-Based Electrochemical Sensors ..............................................................................................................................................................................95
Yang Zhou, Shaoyuan Li, Xiuhua Chen, and Wenhui Ma
chapter 5 Porous Silicon-Based Biosensors: Some Features of Design, Functional Activity, and Practical Application ...............107
Nicolai F. Starodub
chapter 6 MEMS-Based Pressure Sensors .....................................................................................................................................................................................135
Ghenadii Korotcenkov and Beongki Cho
chapter 7 Micromachined Mechanical Sensors .......................................................................................................................................................................147
Ghenadii Korotcenkov and Beongki Cho
chapter 8 Porous Silicon as a Material for Thermal Insulation in MEMS .....................................................................................................................167
Pascal J. Newby
chapter 9 PSi-Based Microwave Detection .................................................................................................................................................................................185
Jonas Gradauskas and Jolanta Stupakova
Section ii—Auxiliary Devices
chapter 10 PSi-Based Ultrasound Emitters (Acoustic Emission) ........................................................................................................................................197
Ghenadii Korotcenkov and Vladimir Brinzari
chapter 11 Porous Silicon in Micromachining Hotplates Aimed for Sensor Applications .................................................................................207
Ghenadii Korotcenkov and Beongki Cho
v
© 2016 by Taylor & Francis Group, LLC
vi Contents
chapter 12 PSi-Based Preconcentrators, Filters, and Gas Sources ....................................................................................................................................223
Ghenadii Korotcenkov, Vladimir Brinzari, and Beongki Cho
chapter 13 Silicon Nanostructures for Laser Desorption/Ionization Mass Spectrometry .................................................................................239
Sergei Alekseev
chapter 14 PSi Substrates for Raman, Terahertz, and Atomic Absorption Spectroscopy ..................................................................................265
Ghenadii Korotcenkov and Songhee Han
chapter 15 PSi-Based Diffusion Membranes .................................................................................................................................................................................279
Andras Kovacs and Ulrich Mescheder
chapter 16 Liquid Microfluidic Devices.............................................................................................................................................................................................299
Ghenadii Korotcenkov and Beongki Cho
Section iii—Biomedical Applications
chapter 17 Biocompatibility and Bioactivity of Porous Silicon ............................................................................................................................................319
Adel Dalilottojari, Wing Yin Tong, Steven J.P. McInnes, and Nicolas H. Voelcker
chapter 18 Applications of Porous Silicon Materials in Drug Delivery ...........................................................................................................................337
Haisheng Peng, Guangtian Wang, Naidan Chang, and Qun Wang
chapter 19 Tissue Engineering ...............................................................................................................................................................................................................363
Pierre-Yves Collart Dutilleul, Csilla Gergely, Frédérique Cunin, and Frédéric Cuisinier
chapter 20 Use of Porous Silicon for In Vivo Imaging Techniques ....................................................................................................................................381
Igor Komarov and Sergei Alekseev
index ..........................................................................................................................................................................................................................................................................401
© 2016 by Taylor & Francis Group, LLC
Contents for Porous Silicon: Formation
and Properties, Volume One
Section i—introduction
chapter 1 Porous Silicon Characterization and Application: General View
Ghenadii Korotcenkov
Section ii—Silicon Porosification
chapter 2 Fundamentals of Silicon Porosification via Electrochemical Etching
Enrique Quiroga-González and Helmut Föll
chapter 3 Technology of Si Porous Layer Fabrication Using Anodic Etching: General Scientific and Technical Issues
Ghenadii Korotcenkov and Beongki Cho
chapter 4 Silicon Porosification: Approaches to PSi Parameters Control
Ghenadii Korotcenkov
Section iii—Properties and Processing
chapter 5 Methods of Porous Silicon Parameters Control
Mykola Isaiev, Kateryna Voitenko, Dmitriy Andrusenko, and Roman Burbelo
chapter 6 Structural and Electrophysical Properties of Porous Silicon
Giampiero Amato
chapter 7 Luminescent Properties of Porous Silicon
Bernard Jacques Gelloz
chapter 8 Optical Properties of Porous Silicon
Gilles Lérondel
chapter 9 Thermal Properties of Porous Silicon
Pascal J. Newby
chapter 10 Alternative Methods of Silicon Porosification and Properties of These PSi Layers
Ghenadii Korotcenkov and Vladimir Brinzari
chapter 11 The Mechanism of Metal-Assisted Etching of Silicon
Kurt W. Kolasinski
© 2016 by Taylor & Francis Group, LLC
viii Contents
chapter 12 Porous Silicon Processing
Ghenadii Korotcenkov and Beongki Cho
chapter 13 Surface Chemistry of Porous Silicon
Yannick Coffinier and Rabah Boukherroub
chapter 14 Contacts to Porous Silicon and PSi-Based p-n Homo- and Heterojunctions
Jayita Kanungo and Sukumar Basu
index
© 2016 by Taylor & Francis Group, LLC
Contents for Porous Silicon: Optoelectronics,
Microelectronics, and Energy Technology
Applications, Volume Three
Section i—optoelectronics and Photoelectronics
chapter 1 Electroluminescence Devices (LED)
Bernard Jacques Gelloz
chapter 2 Photodetectors Based on Porous Silicon
Ghenadii Korotcenkov and Nima Naderi
chapter 3 PSi-Based Photonic Crystals
Gonzalo Recio-Sánchez
chapter 4 Passive and Active Optical Components for Optoelectronics Based on Porous Silicon
Raghvendra S. Dubey
Section ii—electronics
chapter 5 Electrical Isolation Applications of PSi in Microelectronics
Gael Gautier, Jérôme Billoué, and Samuel Menard
chapter 6 Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices
Alexey Ivanov and Ulrich Mescheder
chapter 7 Porous Silicon as Substrate for Epitaxial Films Growth
Eugene Chubenko, Sergey Redko, Alexey Dolgiy, Hanna Bandarenka, and Vitaly Bondarenko
chapter 8 Porous Silicon and Cold Cathodes
Ghenadii Korotcenkov and Beongki Cho
chapter 9 Porous Silicon as Host and Template Material for Fabricating Composites and Hybrid Materials
Eugene Chubenko, Sergey Redko, Alexey Dolgiy, Hanna Bandarenka, Sergey Prischepa, and Vitaly Bondarenko
Section iii—energy technologies
chapter 10 Porous Si and Si Nanostructures in Photovoltaics
Valeriy A. Skryshevsky and Tetyana Nychyporuk
© 2016 by Taylor & Francis Group, LLC
x Contents
chapter 11 PSi-Based Betavoltaics
Ghenadii Korotcenkov and Vladimir Brinzari
chapter 12 Porous Silicon in Micro-Fuel Cells
Gael Gautier and Ghenadii Korotcenkov
chapter 13 Hydrogen Generation and Storage in Porous Silicon
Valeriy A. Skryshevsky, Vladimir Lysenko, and Sergii Litvinenko
chapter 14 PSi-Based Microreactors
Caitlin Baker and James L. Gole
chapter 15 Li Batteries with PSi-Based Electrodes
Gael Gautier, François Tran-Van, and Thomas Defforge
chapter 16 PSi-Based Supercapacitors
Diana Golodnitsky, Ela Strauss, and Tania Ripenbein
chapter 17 Porous Silicon as a Material for Thermoelectric Devices
Androula G. Nassiopoulou
chapter 18 Porous Silicon Based Explosive Devices
Monuko du Plessis
index
© 2016 by Taylor & Francis Group, LLC
