Piezoelectric Solutions: Piezo Components & Materials, Piezo Actuators & Transducers, Piezo

108 Pages·2016·14.95 MB·English

Piezoelectric Solutions
Part I - Piezo Components & Materials
Part II - Piezo Actuators & Transducers
BAUELEMENTE, TECHNOLOGIE, ANSTEUERUNG
Part III - Piezo Actuator Tutorial
PWIWEZWO. PTIECCERHANMOILCO.DGEY
Contents
Part I - Piezo Components & Materials .......... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
Part II - Piezo Actuators & Transducers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .40
Part III - Piezo Actuator Tutorial ........ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .73
Imprint
PI Ceramic GmbH, Lindenstrasse, 07589 Lederhose, Germany
Registration: HRB 203 .582, Jena local court
VAT no .: DE 155932487
Executive board: Albrecht Otto, Dr . Peter Schittenhelm, Dr . Karl Spanner
Phone [phone], Fax [phone]
info@piceramic .com, www .piceramic .com
Although the information in this document has been compiled with the greatest care, errors cannot be ruled out
completely . Therefore, we cannot guarantee for the information being complete, correct and up to date . Illustrati-
ons may differ from the original and are not binding . PI reserves the right to supplement or change the information
provided without prior notice . All contents, including texts, graphics, data etc ., as well as their layout, are subject to
copyright and other protective laws . Any copying, modification or redistribution in whole or in parts is subject to a
written permission of PI . The following company names and brands are registered trademarks of Physik Instrumente
(PI) GmbH & Co . KG : PI®, PIC®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PIn-
ano®, PIMag® . The following company names or brands are the registered trademarks of their owners: μManager,
LabVIEW, Leica, Linux, MATLAB, MetaMorph, Microsoft, National Instruments, Nikon, Olympus, Windows, Zeiss .
WWW.PICERAMIC.COM
Product Overview
IN-HOUSE DEVELOPMENT AND PRODUCTION
Piezoelectric Components
! Various different versions in many dif-
ferent geometries such as disks, plates,
tubes, customized shapes
! High resonant frequencies to 20 MHz
OEM Adaptations
! Piezo transducers for ultrasonic
applications
! Assembly of complete transducer
components
! 2D or line arrays
DuraAct Piezo Patch Transducers
! Actuator or sensor, structural health
monitoring
! Bendable and robust, preloaded due to
lamination
Control Electronics
! Different performance classes
! OEM modules and benchtop devices
3
PIEZO TECHNOLOGY
PICMA® Multilayer Piezo Actuators
! Low piezo voltage to 120 V
! High stiffness
! Travel ranges to 100 µm
PICA High-Load Actuators
! Travel ranges to 300 µm
! Forces to 100 kN
PICMA® Multilayer Bending Actuators
! Bidirectional displacement to 2 mm
! Low operating voltage to 60 V
! Contractors, variable contours
Piezo Actuators with
Customized Equipment
! For use in a harsh environment
! Position and temperature monitoring
! For cryogenic temperatures
WWW.PICERAMIC.COM
PI Ceramic
LEADERS IN PIEZOELECTRIC TECHNOLOGY
PI Ceramic is one of the world’s market lead -
ers for piezoelectric actuators and sensors . PI Core Competences
Ceramic provides everything related to piezo of PI Ceramic
ceramics, from the material and components Standard piezo com-
!
right through to the complete integration . ponents for actuators,
PI Ceramic provides system solutions for ultrasonic and sensor
applications
research and industry in all high-tech mar-
kets including medical engineering, mechan- ! System solutions
ical engineeri ng and automobile manufac- Manufacturing of piezo-
!
ture, or semiconductor technology . electric components of
up to several million
Materials Research and Development units per year
PI Ceramic develops all its piezoceramic Certified Quality ! Development of
custom-engineered
materials itself . To this end PI Ceramic main- Since 1997, PI Ceramic has been certified
solutions
tains its own laboratories, prototype manu- according to the ISO 9001 standard, where
High degree of flexibi-
facture as well as measurement and testing the emphasis is not only on product quali- !
lity in the engineering
stations . Moreover, PI Ceramic works with ty but primarily on the expectations of the process, short lead
leading universities and research institutions customer and his satisfaction . PI Ceramic times, manufacture of
at home and abroad in the field of piezoelec- is also certified according to the ISO 14001 individual units and
tricity . (environmental management) and OHSAS very small quantities
18001 (occupational safety) standards, All key technologies
Flexible Production !
which taken together, form an Integrated and state-of-the-art
In addition to the broad spectrum of standard Management System (IMS) . PI Ceramic is equipment for ceramic
products, the fastest possible realization of a subsidiary of Physik Instrumente (PI) and production in-house
customer-specific requirements is a top pri- develops and produces all piezo actuators for ! Certified in accordance
ority . Our pressing and multilayer technology PI’s nanopositioning systems . The drives for with ISO 9001,
enables us to shape products with a short PILine® ultrasonic piezomotors and NEXLINE® ISO 14001 and OHSAS
18001
lead time . We are able to manufacture indi- high-load stepping drives also originate from
vidual prototypes as well as high-volume PI Ceramic .
production runs . All processing steps are
undertaken in-house and are subject to con-
tinuous controls, a process which ensures
quality and adherence to deadlines .
Company building of PI Ceramic in Lederhose, Thuringia, Germany .
5
PIEZO TECHNOLOGY
Reliability and Close Contact with our Customers
OUR MISSION
Our aim is to maintain high, tested qual- After-Sales Service
PI Ceramic provides ity for both our standard products and for
Even after the sale has been completed,
! Piezoceramic materials custom-engineered components . We want our specialists are available to you and can
(PZT) you, our customers, to be satisfied with the
advise you on system upgrades or technical
! Piezoceramic performance of our products . At PI Ceramic, issues . This is how we at PI Ceramic achieve
components customer service starts with an initial infor- our objective: Long-lasting business rela-
! Customized and appli- mative discussion and extends far beyond tions and a trusting communication with
cation-specific ultrasonic the shipping of the products . customers and suppliers, both of which
transducers/transducers
are more important than any short-term
! PICMA® monolithic Advice from Piezo Specialists success .
multilayer piezo actuators
You want to solve complex problems – we
Miniature piezo actuators
! won’t leave you to your own devices . We
PI Ceramic supplies piezo-ceramic solutions
! PICMA® multilayer use our years of experience in planning,
bender actuators to all important high-tech markets:
developing, designing and the production
! PICA high-load piezo of individual solutions to accompany you ! Industrial automation
actuator
from the initial idea to the finished product . Semiconductor industry
!
! PT Tube piezo actuators We take the time necessary for a detailed Medical engineering
!
Preloaded actuators understanding of the issues and work out
! Mechanical and precision engineering
with casing a comprehensive and optimum solution at !
Piezocomposites – an early stage with either existing or new ! Aviation and aerospace
!
DuraAct patch technologies . Automotive industry
!
transducers
Telecommunications
!
WWW.PICERAMIC.COM
Experience and Know-How
STATE-OF-THE-ART MANUFACTURING TECHNOLOGY
Developing and manufacturing piezoceram- particularly high degree of precision . Spe-
ic components are very complex processes . cial milling machines accurately shape the
PI Ceramic has many years of experience in components when they are still in the “green
this field and has developed sophisticated state“, i .e . before they are sintered . Sintered
manufacturing methods . Its machines and ceramic blocks are machined with precision
equipment are state of the art . saws like the ones used to separate indi-
vi dual wafers . Very fine holes, structured
Rapid Prototyping ceramic surfaces, even complex, three-
The requirements are realized quickly and dimen sional contours can be produced .
flexibly in close liaison with the customer .
Prototypes and small production runs of Automated Series Production –
custom-engineered piezo components are Advantage for OEM Customers
available after very short processing times . An industrial application often requires large
The manufacturing conditions, i .e . the quantities of custom-engineered compo-
composition of the material or the sintering nents . At PI Ceramic, the transition to large
temperature, for example, are individually production runs can be achieved in a reliable
adjusted to the ceramic material in order to and low-cost way while maintaining the high
achieve optimum material parameters . quality of the products . PI Ceramic has the ca-
pacity to produce and process medium-sized
Precision Machining Technology
and large production runs in linked automat-
PI Ceramic uses machining techniques from ed lines . Automatic screen printers and the
the semiconductor industry to machine the latest PVD units are used to metallize the
sensitive piezoceramic elements with a ceramic parts .
Automated processes optimize throughput
7
PIEZO TECHNOLOGY
L
˝
Polarisation
axis
˝L ˝ L
C
Polarisation 1
(Z) axis fm fn
3 ˝ L
C
C0 (Z) L1 1 fm fn
L +o P 6 5 3 C0 danz Z L1
L +o (X)1 4 2(Y) P 6 5 R1 Impen danz Z 0 V
1 4 2(Y) R1Frequenz f mpen 0 V
(X) I
Frequenz f
1
ODD
1 (1) TH P
3
TH 2 5 6 (PX)1 T4H(Z3)26 5 5 2(Y) 6 3 (PX)1 4(Z3)6 5 2(Y) (2) L˝L +o ((12)) ˝L Polaarxisiastion (PX)1 (4Z3)(61–+)+––5–+–+––++ +–+2(Y)(2)+++––– +++––– +++––– +++––– (3)–++––+C–+––++0+–+–+–+––+–+ (1–+)+–––+–+––++ +–+ (2)RLC+++–––111+++––– +++––– +++––– (3)–++––+ –+––+++–+–+–+––+–+ Impendanz Z +–fUm fn +U ˝ L T0H ODOIDDDL P P V OIDDL P
Polarisation
˝L axis P C/m2 Frequenz f – L ˝ L
C
PTH L L LTHTPHW2 WTH P5 PPLTTH1THTHH 22WLPLTP5LH5L 6LL11P3WWL(PXWWL)TT1HHPLPPT4PHT6(6HWZ3)62W3T3HL((PPXPX))5L115 L2441(PY((Z3)Z3W))66WTH P 556 22((YY)3) (PX)1 P4T(HZ3T)H6 2 55L 2L(Y1) W WTH P 63 33 (PX1)13(r()r)RDLL˝LOPT4äaibic2n,d(k Zg3Ziea+)srnlss6soccchhhwwwiininnggg((uu12unn))n5ggg RDLO2ai(c2dYkiea)3+ln3sscoch3hwwiningguun((n((112g112g())3())rr())r3)OPTOPT3Pbi2bi,2,o ZZlarrarxisias1t3(ir(o)rn)DLOPTäiLbic2nT,k gZHesrn3+RsRDscaPacihodc2hdowkiaiwleaalislnansircns5cxighcshgiwuhasw1u((wnti112nnii2n(goi())gnPXgrgnug)u)nu1nRDgngaiOPTgc63dkbi2i,ea Zlnss3rcc(h4Zh3ww)ini6nggu1unng5g(PX)1RDaicd-kPi2eas(lnsY(sc4Z3c)hh)ww6iningguun5n-gTEg2HcL˝L233+2o(5Y–)+LD1+–äCi+2cn+–P0(–k1(gr–+ePX+((–)1s+112n)–s(+-))1s+––r–Pc63c–+)–+h–rh–+w+w–+–OPTi–3ni++bni2,g g(Zu4Z3+u-–rn-+)PnPgsgs61EC(cP52P0( ()1Cr–+++1–––+–)++/)+m+++–––––-––2-–+E––+E–+++–––c-c+P+–R+++–––––s2a–++P++(dPEoYisa l+)k+al–s+–aV+rcRLCxi(h/s3c11i1was–)m–++–+–+t–i++LDni+–- (o–+äPg(–+–iE+2P+––P++c2nn+–P–u )c– kCr)+++–––++ngC–+r+++––––+e–+––/gs/m–nm+++––––+-+s–+––++++–––+-–+Ps+–3Pc2+–2cr++++h––––r+++–––h–+–+w–+w-–+++–––+P+++–––inisnP–g+LDgs+u–äui+PncnC+–PnR–LC k1g(gCr0(g(3+e11(1–31s–/r)–n+++m)–)–)+–s–++E++-––s+E–+Pc(c2c–+–PX+c–h––––+–r-++h–+–++E––+w)+w–+Impendanz Z1–++c––++–+–i+––nin+–––+–++–g–++–++guun+n–g+g(4Z3PEP)Es–E s+ k6+kc–V(V+P2+–P//–c )cCr+++–––+m–m5/m– +++–––+- +–P2RD+–r+++–––Impendanz Z–+ai–+c+++–––dkPfEWi3mesa k2nlV(ssY/cRLcc()h3m11h1F)–+w+–wr– E+eci–+–qi–++n1nu(+–g+r–ge+–)unu3+––+–+fznnn fgLgfmPEs k1V(/rc)FCmTr0(eH 1–+q)+uImpendanz Ze––-–+E–nPfcz+nT R–fH–a++d+–W+Wi–U+als–c++h–(+P2w+–P– )COr+++RD–––+Oi–/nDDma–i+++–––+c+–gd2k+–u+++–––Wie–+fanm–+n+++–––lLgsLscTc+–h+–HhUwUFwRLC(ri3e111in)nq–++––E+gugc–+–euT–++uTnHnH+–+fnz–+–ng Lgf+––+–+ PPWTHPEs kVTTH/HTcmH PTImpendanz ZOO˝HD DLLODO+–DIDU0DTHPTHTTTHOHOHDDPP PL˝ LfTOmODHDDD0THWFWrTeHVqPuePPnfzn fL W TTTHPTHHPWH VP OOLODILDIDLLLDDLDTL0HP+–UP WWPTWPTPWTHHHLPLP PO Bcs DrPSTRIODIDDooeDuLlehiiLTanrsdnPbnHWPeitkg sedeeaW/T tsP eP /H rri c /V urP/epy bceplltiallaneeoztrdmdceLaLo ke lieln ren L lct s WeTWTHLWTO OITTOILLWTRPDT LWT HnnreeeehhhhrhhPoiuuunniieainnnnPiiiiiiddudatttceccecccfmeeeggggttnetkkkkkkLrrhhhO˝rrrttttI rnnnndennD h hhhDmddLD rLdddtOWeeeWe eeWe iiDbeLiiiLLLaaDssssssIdaaare0M:::::::ssssssmm: mmm nP m :11 mm3d1i5TTTT Teed 0 Eieeec ttttHHHHHmaaattPte .ooootttNeeo3xxxeee:::::r e rr . 26 . .58rrr0m000tS 5 e n IIo2507300P . . . .OOOD0DCl214s1Ia5e 50 m2mmmOi DD:5D: xm m ot t tm mm0 0ooo .:::mNmnmtmmo me . .o 7 222mm88ms113nmS,,0 ,, : , 03 .0 ttt ttmt, , 5 oooooT s m0 m mHP m888o7m7mmm000n44mmp Vmmmmmre mmmommqu ,,,, L eLn s t .enWWTHtPsOIDDL !!!!LTetdmaatPhh al nhu Pp Tmac Tddpt Mf3Twebscmeceaieobdernhten0xr ohhiehhyc riarimcuaraeo p -ronk tandt leeyeesp fhlmrtaiexcltspoelmisgdn su hnieoua lnhmdcmritsndeostmi mmignrhegmdraac .hoippciginf l tnm i istitlaewaanAaii lolmcdnuc lih icceioieoyvl anrctn oknllieimi w ukdlei,gatr meeteaforeneoz ngndenh elsbuiri h cnat fdacestsc .oprseieut c hihr tizdattnr th s atibtpfcosiilmrhbhaaeloranio s iailyohseoeattd mcery t enn gnhetl,p id e onrkno ii f o iisn :e i mfvi oos cnerd . tlto n t ye aealrsee ioaira .lald rtis nyt r rssel s i t . t y
P L W TH P L P 3 1(r) PTbi, Zr RadialschwingunRgadialDscich3kweninscghuwninggung TH 1 6 3 -Ec –++–++––+– –++–+–3–+–+DickenschwEincgung E kV/cm Längsschwingung W-Ps DLickenschTwHin-PgrPung P TH LSD± it0ma .O3neID DnmdsamiWTorH ndres t,s opaPs .l e ±fri r3ae n%d ces DD(seliimvgihaett nibosenin ofdrnoinm g folaf t ness T< o0 .l0e2r amnmce tpbeAinhloy eder lecc aidctodrraiildorzoteaiedrsctseihitn o it mogchn one tai hl stooeee rflmr e i caatlrr:k o edde
3 3(r) 2 5 3-Ps -Pr 1Längsschwingung 3 TH OODD LenTHgth L, width W (dimensions; tolerance) tish inno dt itsakkse onr plates L wpohsicithiv we apso taetn tthiael
L 3(r) Dickenschwingung 1 2 Dickenschw3i3ngung 1(r) RadiTaHlschwinguOOnDDg TH << 2105 mmmm;; ±± 00 . .1250 mmmm << 4800 mmmm;; ±± 00 . .2350 mmmm L into account) P during the polarization .
P 2 3 Dickenschwingung Längsschwingung DeviatiPon < 0 .02 mm
Längsschwingung 1(r) Radialschwingung
3(r) 1 Dickenschwingung3 Oinunteerr ddiiaammeetteerr IOD D, TH OODD fpTraHormal lelism L
1 2 DickenscDhicwkeinnsgcuhwnigngung 1(r) Ra(ddiiamlsecnhswioinngs;u tnoglerance) OD P
Dickenschwingung 3 1 TH 6 3 << 1250O Dmmmm;; ±± 00 . .1250 mmmm T<<H 4800 mmmm;; ID±± 00 . .2350 mmmmP Dfreovmia tion <_ 0 .4 mm
3 5Längsschwingung Dickenschwingung concentricity
3(r) Radialschwingung 2 TH 2 51 6 3 2 Dickenschwingung 3 1(r1) 3 Radialschwingung TH OODD TH TH T<< h12i00cI Dkmmnmmes;;s ±± T 00H . .P01 (50d immmmmen si<<o n48s00; mmtommleL;;r a±±n 00c . .12e50) mmPmm Ftorleeqruaenncecy TH OD ±± 51 0% P% ( <( =>2 2M MHHz)z)
TH 6 ID
Längsschwingung Tolerance of ± 20 %
5
2 electric capacitance
Dickenschwingung
Längsschwingung
Dickenschwin1gung OD
Dickenschwingung TH 6 3 Längsschwingung TH ID P
5
Radials2chwingung WWW.PICERAMIC.COM
Dickenschwingung
Radialschwingung
Längsschwingung
Radialschwingung
Dickenschwingung
Radialschwingung
Standard Dimensions
Components with standard dimensions can values cannot be combined . Geometries
 Electrodes: Fired silver be supplied at very short notice on the basis which exceed the standard dimensions are
(thick film) or PVD
of semi-finished materials in stock . Extreme available on request .
(thin film, different
materials: e . g . CuNi or
Au)
 Disk / rod / cylinder  Disk / rod
 Points: Resonant
with defined resonant frequency
frequency > 1 MHz TH OD in mm
Circles: Resonant in mm 3 5 10 16 20 25 35 40 45 50 TH OD in mm
frequency < 1 MHz • • • • • in MHz 3 5 10 16 20 25 35 40 45 50
0 .20
Electrodes: Fired silver 0 .25 • • • • • 10 .00 • • • • •
(thick film) or PVD
(thin film, different 0 .30 • • • • • • 5 .00 • • • • • •
materials: e . g . CuNi or 0 .40 • • • • • • • 4 .00 • • • • • • •
Au) 0 .50 • • • • • • • • • 3 .00 • • • • • • • •
• • • • • • • • • •
0 .75 2 .00 • • • • • • • •
 Electrodes: Fired silver • • • • • • • • • •
1 .00 • • • • • • • •
(thick film) or CuNi or Au 1 .00
• • • • • • • • • •
(thin film) 2 .00
• • • • • • • • • • 0 .75 o o o o o o o o
3 .00
• • • • • • • • • • 0 .50 o o o o o o o
4 .00
• • • • • • • • • • 0 .40 o o o o o o
5 .00
10 .00 • • • • • • • • • • 0 .25 o o o o
20 .00 • • • • • • • • • • 0 .20 o o o
 Plate / block
TH LxW in mm2
in mm 4 x 4 5 x 5 10 x 10 15 x 15 20 x 20 25 x 20 25 x 25 50 x 30 50 x 50 75 x 25
• • • • •
0 .20
• • • • •
0 .25
• • • • • • •
0 .30
• • • • • • •
0 .40
• • • • • • • • •
0 .50
• • • • • • • • • •
0 .75
• • • • • • • • • •
1 .00
• • • • • • • • • •
2 .00
• • • • • • • • • •
3 .00
• • • • • • • • • •
4 .00
• • • • • • • • • •
5 .00
• • • • • • • • • •
10 .00
• • • • • • • •
20 .00
9
PIEZO TECHNOLOGY
L
˝
Polarisation
axis
˝ L
C
1
˝L (Z3) fm fn
Polaarxisiastion C0 L1
L +o (Z) P 6 5 C1 danz Z fm fn ˝ L
3 (X)1 4 2(Y) C0 L1 R1 Impen 0 V
L +o P 6 5 anz Z Frequenz f
d
1 4 2(Y) R1 mpen 0 V
1 (X) I
Frequenz f ODD
(1) TH P
3
TH1 5 6 (Z3) OIDD P
2 6 – – – – ODD
(1) + + + + – – – – TH P L
TH 2 5 6 3 (Z3)6(PX)1 4 5 2(Y) –+––+–– +–––+– +––+ +–– +–– +–– +–– –+–+ +––++––+ +–+– + OIDD P
TH L (PX)P1 4 5 2(Y) (2) (2) ˝L ˝LPolaarxisiastion (1–+)+–––+–(PZ3o+)–l–a++arxisi+as–+tio(n1+)(2)–+++–– +++–– ++++–– +++–– ((P32P ))–+C+r+––+/m–+–+–++2+–++–+–+––++–+(Z3) (3)+ + + + Ps C1 C+–1U fm –U fn fm fn TH ˝ L L L W P ˝ L
TH P L WL P WTH O2 OPTbi2, Zr L +o L +o (PX)1 4 6 5 PP -CrE/cm2(2Y) ++–(+PX+–)1– –+++–––+ 4 C60Ps5Ec 2(Y)E kV/cm RL11 C0 Impendanz Z WRL11 L THImpendanz Z P TH L P W P0L WTH V 0 V
W P3b – –+ – + Frequenz f Frequenz f
+ – – + +
P L TH 1 1 Ti, Zr 1(r) ˝L Radialschwingung Polarisation -Ec -Ps +–++ –+ +––– Ec-Pr E kV/cm W L TH P P L WTH
WL 3 ˝L axis – –+ – + ˝ LODD ODD
L P P TH 2 5 6 TH3 2(PX)1 54(Z3)6 5 2(6Y) 3 (PX)1 4(Z3)6 5 2(Y) 1(r) 3 3(r) RDaicdkiealnsscchhwwLLiningguu++nnggooDickensc((h12w))ingung Polaarxis3iastion((12))2 3 -P((sPPXX))111 ((44ZZ33)) 66 55 22((-YYPr)) LDäicnkgesnsscchhwwininggCCuu00nn(g1–g+)+–––+–+––++ +–+ (2)+++––– +++––– +++––– +++––– 3 RRLLCC(1111113)–++––+ –+––(++1–1++–+)–++–(r+––)––+–+–+–+––++ +–+ (2)Impendanz ZImpendanz Z+++––– +++––– +++–––R+++–––adial(s3c)–++h––+w–+––++i+–+n–+–g+––+ff–+mmungFrequenffznn f TH OODD+U TH +UTH ˝ L 00 P TVVH L PPOIDDL P OIDDL P
3 Längsschwingung Frequenz f – –
1
3(r) 1 3 Dickenschwingung OODD ODD L
1 (1) 2 Dickenschwingung P C/m2 P C/m2 TH TH TH P LP L
PTTTHHH 22 55L L W WTH P 66PTH33 ((PPXX))11 L44((ZZ33L))66 W WTH55 P22((YY)) Längsschwingung3 ((21)) OPTbi2, Zr TH 2 5 1 TH3 6 23 5 1 OPTbi2,6 Zr 3 (1––+)++–––––++––-E++c––––+++ ++––++ –++(–2++–P)–+++++––––––r+–+++++–––––––++–+++++––––––1+–(–+r+++++–––––––+) (3)––+++––––++E––++––––c+++++––+––++––++––––++––+-Ec PERDs akicVdk/ice–a+m+nl–s+ s+–Pc–cr+h–hw–w++–i+–inn–+g–+guunngg Ec PEs kV/cm W L++U TH PTH W OIDD TH LP TOIHDD TH ODPPD Disks wPith specTiHPal electrodLes (wrWaWpTH-aProuOOIIDDnDDLLd coPPnTHPtacts) L WWTHP
Dickenschwingung (21)(r) Radialschwingun1g(r) Radialschwingung (1+) – + (2)+ + + + (3)+ + + + –U Design OD in mm TH in mm Electrodes: Sfoorl dueserirnsg instructions
Längsschwingung -Ps -Pr -Ps -Pr 10 / 16 / 20 / 20 / 25 / 40 0 .5 / 1 .0 / 2 .0 Fired silver
L L P C/m2 – L (thick film) Acalln o buer smoeldtaelrleizda tiino ns
TH LL P W P P DickenschwinguRnagdialschwingung Dickenschwingung Dickenschwingung PP Cr/m2 Ps  Dwiistkh /d reofidn ed resonant frequency TTHH L WW PP or PVD (thin film) mcRooenHnfSodr . tmWheae nu rcseeec woomift ha-
TH P O2 Pr Ps Rings spoolsdietiro nw iSthn t9h5e . 5c .o Amg-
W Radialschwingung Pb
+ – – + + Design OD in mm ID in mm TH in mm Electrodes: 3 .8 . Cu 0 .7 . If the
PP LL WW TTHH 33 3 1(3r)(r)TOPTbii2,, ZZrr Radialsch3wingung3(r) 2 3 1 -Ps --EE2cc 3 ––+++LD––++äi++–c––nk++g–1es––n++-+––sPsc++––rch––++hw––+winingguunnggEEcc EE kkVV//ccmmLD äicnkgesnsscc3hhwwiningguunngg1(r) RadWW3ialschw1in(rg)unLLg TTHH PPRTaHdialschwiOOnDDgung TH TH OODD PPTH LL 1111200025** . 7 WWTTHH 24551 . .* .6732 *** L P 00000 . . . . .55555/////11111 . . . . .00000/////22222 . . . . .00000 F(o(Lttirhhr eiiCcnduk f Nsifliimillmv)eP)r piatmzaseeb i lemadhoozt,esvpeo aaserecn it eroaetdahrlfd at ,eit u smoht rhC redeir urcr,eo ee rtpeui hdeiolgseeu lh mact ohtrieiuuo-ntsn t
L 1(r) DRaicdkiealnsscchhwwiningguunngg -Ps -Pr Dickenschwingung Dickenschwingung * Ts .o tlaebralen cpe . s2 7as fired, 3580 1139* .7 * 55 . .00//66 . .00/9 .5 ipna, rtahme eptieerzso .electric
L P 1 1 OD OD
This can be prevented
P Dickenschwingung TH 6 3 TH 6 3 TubeTsH ID P TH ID P by adhering to the
2 5 2 5 Design OD in mm ID in mm L in mm Electrodes: fuonlldoewr ianlgl cciorcnudmiti-ons
stances when solde-
3 76 60 50 Inside:
3 Längsschwingung ring:
40 38 40 Fired silver
3 3(r) Längsschwingung Längsschwingung 3 1 Längsschwingung 3 OODD 20 18 L 30 (thick film) ! All soldered
2 Dickenschwingung TH TH 10 9 P 30 Outside: contacts must be
3(r) 1 3 1(r) Radialschwingung OODD 10 8 L 30 Fired silver point contacts .
TH TH
Dickenschwingung Dickenschwingung 2 Dickenschwingung 1(r) DRaicdkieanlsscchhwwiinngguunngg 36 . .32 5 52 . .325 P 3300 (otrh iCcuk Nfiil mor) A u ! Tmhues ts obled earsi nsgh otirmt es
2 .2 1 .0 20 (thin film) as possible (≤ 3 sec) .
Radialschwingung Radialschwingung 1 Dickenschwingung OD
The specific
TH 1 6 3 TH OIDD P !soldering
2 5 3 TubeTsH with special elecPtrodes tneomt bpeer eaxtucreee dmeuds .t
TH 6 ID
5 Design OD in mm ID in mm L in mm Electrodes:
2
20 18 30 Inside:
Längsschwingung 10 9 30 Fired silver
10 8 30 (thick film)
Quartered outer
Längsschwingung electrodes 6 .35 5 .53 30 Outside:
Dickenschwingung 3 .2 2 .2 30 Fired silver
2 .2 1 .0 30 (thick film)
Dickenschwingung or CuNi or Au
Wrap-around
(thin film)
Radialschwingung contacts
Radialschwingung
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