Table Of ContentPhysical Processes in
Laser -Materials
Interactions
NATO ADVANCED STUDY INSTITUTES SERIES
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Physical Processes in
Laser -Materials
Interactions
Edited by
M. Bertolotti
InstItute of PhysIcs
Umverslty of Rome
Rome, Italy
PLENUM PRESS • NEW YORK AND LONDON
Published in cooperation with NATO Scientific Affairs Division
Library of Congress Cataloging in Publication Data
Main entry under title:
Physical processes in laser-materials interactions.
(NATO advanced study institutes series. Series B, Physics; v. 84)
"Proceedings of the 1980 NATO Advanced Study Institute on Physical Processes in
Laser-Materials Interaction, which was the ninth course of the Europhysics School of
Quantum Electronics, held July 13-25, 1980, in Pianore, Italy." - Verso t.p.
Includes bibliographical references and index.
1. Laser materials-Effect of radiation on-Congresses. 2. Laser beams-Con
gresses. I. Bertolotti, Mario. II. NATO Advanced Study Institute on Physical Processes
in Laser-Materials Interaction (1980: Pianore, Italy) III. Title. IV. Series.
QC374.P46 1982 621.36'6 82-13147
ISBN 978-1-4684-4324-0 ISBN 978-1-4684-4322-6 (eBook)
DOl 10.1007/978-1-4684-4322-6
Proceedings of the 1980 NATO Advanced Study Institute on Physical Processes in
Laser-Materials Interaction, which was the Ninth Course of the Europhysics School
of Quantum Electronics, held July 13-25, 1980, in Pianore, Italy
© 1983 Plenum Press, New York
Softcover reprint of the hardcover lst edition 1983
A Division of Plenum Publishing Corporation
233 Spring Street, New York, N.Y. 10013
All rights reserved
No part of this book may be reproduced, stored in a retrieval system, or transmitted,
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recording, or otherwise, without written permission from the Publisher
FOREWORD
It is a pleasure to write a few words as an introduction to the
proceedings of the 1980 NATO ASI on "Physical Processes in Laser
Naterial Interaction."
This ASI is the ninth course of a series devoted to lasers and
their applications, held under the responsibility of the Quantum
Electronics Division of the European Physical Society, and for this
reason known as the "Europhysics School of Quantum Electronics."
Since 1971 the School has been operating with the joint direc
tion of myself as representative of the academic research, and
Dr. D. Roess (formerly with Siemens AEG, Munich, and now with Sick,
Optik und Electronik, GmbH, Munich) for the industrial applications.
Indeed the aim of the School is to alternate fundamental and
applied frontier topics in the area of quantum electronics and modern
optics, in order to introduce young research people from universities
and industrial R&D laboratories to the new aspects of research
opened by the laser.
This is clearly illustrated by the sequence of titles of the
past courses:
(1) - 1971 Physical and technical measurements with lasers
(2) - 1972 Nonlinear optics and short pulses
(3) - 1973 Laser frontiers: high powers and short wavelengths
(4) - 1974 Cooperative effects in multi-component systems
(5) - 1975 Holecular spectroscopy and photochemistry with lasers
(6) - 1976 Coherent optical engineering
(7) - 1977 Coherence in spectroscopy and modern physics
(8) - 1979 Lasers in biology and medicine
NATO has become the main sponsor under the program of the
Advanced Study Institute, starting with the third course, and then
continuously since the fifth.' Therefore the School may be considered
as part of the NATO enterprises in the area of physics and applied
v
vi FOREWORD
sciences. Due to the potentialities of the laser in many areas of
applications, it became necessary to cover interdisciplinary areas.
Such was the case of the eight course, where the participants were
coming from physics, biology, and medicine.
Such is also the case of the ninth course, devoted to the ap
plication of lasers in metallurgy (a field monopolized by mechanical
engineers) as well as in semiconductor annealing (a field thus far
practiced mainly in solid-state physics laboratories).
Besides use of the laser as a tool, another area of conceptual
unification between the two fields is the common heading of "non
equilibrium thermodynamics."
As during past years, the School Directors, once having chosen
a given subject, have chosen one (or a few) outstanding person(s)
active in the field and have asked him (or them) to act as "scien
tific responsible(s)," selecting the lecturers and editing the pro
ceedings of the volume. The scientific responsible for this course
was Prof. M. Bertolotti, leader of a research group engaged in laser
annealing of semiconductors. He will detail the motivation of his
choices and show the correlations among the different contributions.
Prof. F.T. Arecchi, Director
Istituto Nazionale di Ottica
Firenze, Italia
INTRODUCTION
This ninth course of the "Europhysics School of Quantum Elec
tronics" is devoted to the study of physical processes in laser
materials interactions. The field, which is very broad indeed, has
been restricted to the effects of laser light in metals and semi
conductors having in mind applications such as metal working, drill
ing, cutting, alloying, hardening, and semiconductor annealing. The
main body of the school is therefore centered on the coupling of
laser radiation to these materials, heating, and phase transforma
tions. Practical implications of these techniques have also been
considered in some detail.
Laser treatment of materials opens also a new field of the
thermodynamics of fast processes.
To complete the scenario some information on other materials,
e.g., refractory materials, and some general background information
of laser effects in materials have also been included.
The matter has been divided into regular lessons, seminars, and
contributions from participants to the course.
I wish to express my sincere thanks for the assistance and help
given by the co-directors of the course, D. Smith, and S. Solimeno.
Miss A. De Cresce is also due for special thanks for her help
during the editing of this volume, and Mrs. F. Medici, and
C. Sanipoli for drawings.
June 1981 M. Bertolotti
vii
CONTENTS
LECTURES
1.1 I. J. Spalding
Characteristics of Laser Beams for 1
Machining
1.2 M.F.von Allmen
Coupling of Laser Radiation to Metals 49
and Semiconductors
1.3 M.Bass
Laser Heating of Solids 77
1.4 D.Turnbull
Thermodynamics and Kinetics of Laser ll7
Induced Structure Changes
1.5 C.M.Banas
CO2 Laser Materials Processing 143
1.6 G.Sepold
Hardening and Alloying of Steel 163
Surfaces by High-Power Laser Beams
1.7 M.Berto1otti
Laser Annealing of Semiconductors 175
1.8 C.Hill
Laser Annealing of Semiconductors 221
Devices
SEMINARS
II. 1 V.Bartiromo,A.Cutolo,S.Solimeno
Handling of High Power Beams for 231
Laser Metal Working Systems
IX
x CONTENTS
11.2 I.J.Spalding
Metal Processing at Culham 271
II. 3 F.T.Arecchi,C.Castellani,J.Tredicce
Time Dependent Effects in Laser 283
Heating of Organic Materials
11.4 S.U.Campisano
Ion Beam Analysis of Near Surface 289
Regions
II.5 R.Wallace, M.Bass,S.Copley
Shaping Ceramics with a Continuous 301
Wave Carbon Dioxide Laser
II. 6 M.von Allmen
Laser-Induced Structural Changes 323
in Si-Metal Thin Films
II. 7 L.D.Laude,R.Andrew,L.Baufay
Laser Ordering in Elemental 333
Semiconducting Films
11.8 M.Wautelet,M.Failly-Lovato
Laser Induced Structural Changes 345
in the Bulk and at Defect Sites in
Semiconductors
11.9 A.F.Stewart, M.Bass
Intensity Dependent Absorption in 367
Semiconductors
11.10 A.S.Epifanov
Theoretical Aspects of Interaction 377
of Laser Radiation with Hot Electrons
in Solids
11.11 V.P.Kalinushkin, V.V.Voronkov, G.I.Voronkova,
V.N.Golovina, B.V.Zubov, T.M.Murina,
A.M.Prokhorov
Impurity Clouds in Silicon and Germanium 405
11.12 J.I.B.Wilson
Amorphous Silicon Solar Cells 413
II. 13 A. Luches
Pulsed Electron Beam Applications for 443
Semiconductor Annealing
CONTENTS XI
CONTRIBUTIONS
III. 1 S.D. Allen
Laser Chemical Vapor Deposition 455
III. 2 G.Fritzsche
Cutting with CO2-Lasers in the 469
Automobile Industry
III. 3 E.L.Mathe, J.P.Eymery
Induced Effects of a Laser Pulse 475
on Defects and Disorder Creation
in Some Ordered Alloys
III. 4 S.U.Campisano
Supersaturated Solid Solution ln 485
Ion Implanted Semiconductors
III. 5 J.L.Regolini, T.Shibata, T.W.Sigmon,
J.F.Gibbons
Thin Film Reaction Induced by CW 493
Scanned Laser and E -Beam
III. 6 S.M.Metev
Physico-Chemical Basis of Laser 503
Lithography
INDEX 519
