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About Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
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Detailed Information
| Author: | Seongbo Shim, Youngsoo Shin |
|---|---|
| Publication Year: | 2018 |
| Pages: | 144 |
| Language: | English |
| File Size: | 12.313 |
| Format: | |
| Price: | FREE |
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