Optical thin films and coatings: From materials to applications

858 Pages·2013·32.956 MB·English

by  Angela Piegari, Francois Flory

Optical thin fi lms and coatings

© Woodhead Publishing Limited, 2013
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© Woodhead Publishing Limited, 2013
Woodhead Publishing Series in Electronic and Optical Materials:
Number 49
Optical thin fi lms and
coatings
From materials to applications
Edited by
Angela Piegari and François Flory

Oxford Cambridge Philadelphia New Delhi
© Woodhead Publishing Limited, 2013
Published by Woodhead Publishing Limited,
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First published 2013, Woodhead Publishing Limited
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© Woodhead Publishing Limited, 2013
Contents
Contributor contact details xv
Woodhead Publishing Series in Electronic and
Optical Materials xxi
Preface xxv
Part I Design and manufacturing of optical thin fi lms and
coatings 1
1 Recent developments in deposition techniques for
optical thin fi lms and coatings 3
H. Angus Macleod, Thin Film Center Inc., USA
1.1 Introduction 3
1.2 Early processes for the deposition of optical coatings 4
1.3 The energetic processes 6
1.4 Cathodic arc evaporation 16
1.5 Pulsed laser deposition 17
1.6 Chemical vapor deposition 17
1.7 Atomic layer deposition 18
1.8 Sol–gel processes 19
1.9 Etching 20
1.10 Other techniques 20
1.11 Conclusion 21
1.12 References 21
2 Design of complex optical coatings 26
P. G. Verly, National Research Council Canada, Canada
2.1 Introduction 26
2.2 Modern numerical thin fi lm synthesis techniques 28
2.3 Manufacturability issues 38
2.4 Hybrid design 41
v
© Woodhead Publishing Limited, 2013
vi Contents
2.5 Conclusion 51
2.6 Acknowledgements 51
2.7 References 52
3 Optical monitoring strategies for optical coating
manufacturing 62
A. V. Tikhonravov, M. K. Trubetskov and
T. V. Amotchkina, Moscow State University, Russia
3.1 Introduction 62
3.2 Classifi cation of optical monitoring strategies 65
3.3 Turning point optical monitoring and error
self-compensation effect 67
3.4 Level monitoring: passive and active monochromatic
monitoring strategies 73
3.5 Direct broad band optical monitoring 82
3.6 Indirect optical monitoring strategies 85
3.7 Conclusion 90
3.8 References 91
4 Production strategies for high-precision optical
coatings 94
H. Ehlers and D. Ristau, Laser Zentrum Hannover,
Germany
4.1 Introduction 94
4.2 Basic concept of deterministic production 96
4.3 Optical broad band monitoring 99
4.4 Virtual deposition system 105
4.5 Direct on-line correction tools 110
4.6 Design stability in production processes 111
4.7 Deposition control of coating systems with continuous
refractive index variation 117
4.8 Conclusion 125
4.9 References 127
Part II Unconventional features of optical thin fi lms and
coatings 131
5 Complex materials with plasmonic effects for optical
thin fi lm applications 133
A. Sytchkova, ENEA Optical Coatings Laboratory, Italy
5.1 Introduction 133
© Woodhead Publishing Limited, 2013
Contents vii
5.2 Physics of some classes of novel materials for plasmonic
applications 135
5.3 Ceramic matrix with embedded metal nanostructures 137
5.4 Searching for alternative plasmonic materials 146
5.5 Characterization of novel materials with plasmonic effects 152
5.6 Conclusion 162
5.7 References 163
6 Scattering properties of random structures
in thin fi lms 177
G. Berginc, Thales, France and A. A. Maradudin,
University of California, Irvine, USA
6.1 Introduction 177
6.2 Numerical solution of reduced Rayleigh equations for
scattering of light from dielectric fi lms with
one-dimensional rough surfaces 179
6.3 Reduced Rayleigh equations for the scattering of p- and
s-polarized light from, and its transmission through, a fi lm
with two one-dimensional rough surfaces 192
6.4 Numerical solution of the reduced Rayleigh equation for
the scattering of light from a two-dimensional randomly
rough penetrable surface 208
6.5 Scattering of light from a dielectric fi lm with a
two-dimensional randomly rough surface deposited on a
planar metal substrate 212
6.6 Analytical methods for the scattering from a
three-dimensional fi lm with randomly rough surfaces 219
6.7 Theoretical methods for the scattering of polarized light
from randomly rough interfaces and random media 240
6.8 Applications 271
6.9 Conclusion 279
6.10 References 280
6.11 Appendices 286
7 Optical properties of thin fi lm materials at short
wavelengths 290
J. Larruquert, Instituto de Óptica-Consejo Superior de
Investigaciones Científi cas, Spain
7.1 Introduction 290
7.2 Material behaviour over the spectrum 291
7.3 Refl ection and transmission in absorbing materials 294
© Woodhead Publishing Limited, 2013
viii Contents
7.4 The optical constants of materials at short wavelengths 299
7.5 Link between n and k: Kramers-Kronig analysis 316
7.6 Experimental determination of optical constants 317
7.7 Specifi cs of optical coatings at short wavelengths 320
7.8 Conclusion 342
7.9 Acknowledgements 343
7.10 References 343
8 Controlling thermal radiation from surfaces 357
C. G. Ribbing, Uppsala University, Sweden
8.1 Introduction 357
8.2 Blackbody radiation 359
8.3 Emissivity 363
8.4 Optically selective coatings 368
8.5 Conclusion 387
8.6 References 387
9 Color in optical coatings 391
C. Oleari, University of Parma, Italy
9.1 Introduction 391
9.2 The development of the understanding of interference
color 392
9.3 Overview of basic colorimetry 402
9.4 Optical coating colorimetry 413
9.5 Conclusion 422
9.6 Acknowledgements 422
9.7 References 422
Part III Novel materials for optical thin fi lms and coatings 425
10 Organic optical coatings 427
T. Neubert and M. Vergöhl, Fraunhofer Institute for
Surface Engineering and Thin Films – IST, Germany
10.1 Introduction 427
10.2 Specifi c properties of organic layers 428
10.3 Optical coatings with organic layers 431
© Woodhead Publishing Limited, 2013
Contents ix
10.4 Deposition techniques 432
10.5 Composites 443
10.6 Conclusion 445
10.7 References 446
11 Surface multiplasmonics with periodically
non-homogeneous thin fi lms 450
M. Faryad and A. Lakhtakia, Department of Engineering
Science and Mechanics, Pennsylvania State University,
USA
11.1 Introduction 450
11.2 Historical development 451
11.3 Periodically non-homogeneous dielectric materials 453
11.4 Canonical boundary-value problem 456
11.5 Grating-coupled confi guration 466
11.6 Turbadar–Kretschmann–Raether (TKR) confi guration 476
11.7 Conclusion 482
11.8 Future research 485
11.9 Sources of further information and advice 486
11.10 References 486
12 Optical thin fi lms containing quantum dots 493
F. Flory, Y.-J. Chen and H.-J. Lin, Ecole Centrale Marseille,
France
12.1 Introduction 493
12.2 Applications of quantum dots 494
12.3 Modeling the electronic properties of multiple
quantum wells 497
12.4 Numerical results 498
12.5 Realization of thin fi lms containing quantum dots 502
12.6 Characterization of thin fi lms containing quantum dots 503
12.7 Refractive index of layers containing quantum dots and
of quantum dots alone 509
12.8 Conclusion 512
12.9 Acknowledgements 513
12.10 References 513
© Woodhead Publishing Limited, 2013
x Contents
Part IV Applications of optical thin fi lms and coatings 517
13 Optical coatings on plastic for antirefl ection purposes 519
U. Schulz, Fraunhofer Institute of Applied Optics and
Precision Engineering, IOF, Germany and R. W. Schaffer,
Evaporated Coatings Inc., USA
13.1 Introduction 519
13.2 Transparent polymer materials for optics 520
13.3 Plastics in vacuum coating processes 522
13.4 Antirefl ection methods 528
13.5 Conclusion 534
13.6 Sources of further information and advice 534
13.7 References 535
14 Protective coatings for optical surfaces 540
T. W. Boentoro, Fraunhofer Institute for Surface
Engineering and Thin Films-IST, Germany and
B. Szyszka, Institute for High-Frequency and
Semiconductor System Technologies, Berlin, Germany
14.1 Introduction 540
14.2 Testing methods 545
14.3 Coating design 551
14.4 Application examples 555
14.5 Conclusion 560
14.6 References 560
15 Optical coatings for displays and lighting 564
C.-C. Lee, and C.-C. Kuo, National Central University,
Taiwan
15.1 Introduction 564
15.2 Optical coatings for fl at panel display (FPD) 565
15.3 Optical coatings for projectors 567
15.4 Optical coatings for projectors using light emitting diode
(LED) light source 573
15.5 Optical coating for automobiles head up display (HUD) 584
15.6 Optical coatings for LEDs 587
15.7 Conclusion 589
15.8 Acknowledgements 591
15.9 References 591
© Woodhead Publishing Limited, 2013