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Nanoscaled Semiconductor-On-Insulator Structures and Devices PDF

380 Pages·2007·14.267 MB·English
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by Lysenko V.S., Nazarov A.N., Hall S.| 2007| 380 pages| 14.267| English

About Nanoscaled Semiconductor-On-Insulator Structures and Devices

The book details many of the key issues associated with the scaling to nano-dimensions of silicon-on-insulator structures. Some papers offer new insight particularly at the device/circuit interface as appropriate for SOI which is fast becoming a mainstream technology. One of the key issues concerns mobility degradation in SOI films less than about 5nm. The advantages of combining scaled SOI devices with high permittivity (k) dielectric indicates that potential solutions are indeed available down to the 22nm node even with 5nm SOI films.

Detailed Information

Author:Lysenko V.S., Nazarov A.N., Hall S.
Publication Year:2007
Pages:380
Language:English
File Size:14.267
Format:PDF
Price:FREE
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