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About Nanolithography and Device Fabrication: Fall 2020/2021 Nil
This document provides information about a nanolithography and device fabrication module being taught in the fall semester of 2020/2021. It lists the module number, title, academic semester and year, pre-requisites, and course instructor with their contact information and areas of research expertise. It then provides an outline of the planned weekly lectures including topics to be covered, related textbook chapters, and dates. Specific topics that will be covered include the basics of photolithography, lithography classifications, fabrication process flows for pattern transfer, and nanophotonics integration onto silicon devices.
Detailed Information
| Author: | ['Rashail Ashas'] |
|---|---|
| Publication Year: | 2021 |
| Pages: | 40 |
| Language: | English |
| Format: | |
| Price: | FREE |
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