Table Of ContentCC
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NaNotechNology/NaNoscieNce bb
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Nanofabrication inin
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Handbook aa
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“The amazing micrographs of prototype structures that are documented throughout the pages
offer an inspiring snapshot of the many and varied accomplishments of the researchers working nn
in these technology development and application fields … The style used by the authors will allow
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this volume to serve as a solid introduction to methods in current use in nanoscale research while
the breadth of topics will also permit experienced practitioners to learn about methods and ff HHaannddbbooookk
applications outside their own areas of experience.” aa
—Donald Tennant, Cornell NanoScale Science and Technology Facility bb
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Although many books are dedicated to individual aspects of nanofabrication, there is no single ii
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source that defines and explains the total vision of the field. Filling this gap, Nanofabrication
Handbook presents a unique collection of new and the most important established approaches to aa
nanofabrication. Contributors from leading research facilities and academic institutions around
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the world define subfields, offer practical instructions and examples, and pave the way for
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future research.
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Helping readers select the proper fabricating technique for their experiments, the book provides a
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broad vision of the most critical problems and explains how to solve them. It includes basic definitions
and introduces the main underlying concepts of nanofabrication. The book also discusses the
major advantages and disadvantages of each approach and offers a wide variety of examples of HH EEddiitteedd bbyy
cutting-edge applications. aa
Each chapter focuses on a particular method or aspect of study. For every method, the contributors nn
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describe the underlying theoretical basis, resolution, patterns and substrates used, and applications.
They show how applications at the nanoscale require a different process and understanding than dd
those at the microscale. For each experiment, they elucidate key solutions to problems relating to
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materials, methods, and surface considerations. SSaattoosshhii KKaawwaattaa
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A complete resource for this rapidly emerging interdisciplinary field, this handbook provides
practical information for planning the experiments of any project that employs nanofabrication oo
techniques. It gives readers a foundation to enter the complex world of nanofabrication and
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inspires the scientific community at large to push the limits of nanometer resolution.
90526
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Nanofabrication
Handbook
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TThhiiss ppaaggee iinntteennttiioonnaallllyy lleefftt bbllaannkk
Nanofabrication
Handbook
Edited by
Stefano Cabrini
Satoshi Kawata
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CRC Press
Taylor & Francis Group
6000 Broken Sound Parkway NW, Suite 300
Boca Raton, FL 33487-2742
© 2012 by Taylor & Francis Group, LLC
CRC Press is an imprint of Taylor & Francis Group, an Informa business
No claim to original U.S. Government works
Version Date: 20120117
International Standard Book Number-13: 978-1-4200-9053-6 (eBook - PDF)
This book contains information obtained from authentic and highly regarded sources. Reasonable efforts have been made to publish reliable data and
information, but the author and publisher cannot assume responsibility for the validity of all materials or the consequences of their use. The authors and
publishers have attempted to trace the copyright holders of all material reproduced in this publication and apologize to copyright holders if permission
to publish in this form has not been obtained. If any copyright material has not been acknowledged please write and let us know so we may rectify in any
future reprint.
Except as permitted under U.S. Copyright Law, no part of this book may be reprinted, reproduced, transmitted, or utilized in any form by any electronic,
mechanical, or other means, now known or hereafter invented, including photocopying, microfilming, and recording, or in any information storage or
retrieval system, without written permission from the publishers.
For permission to photocopy or use material electronically from this work, please access www.copyright.com (http://www.copyright.com/) or contact
the Copyright Clearance Center, Inc. (CCC), 222 Rosewood Drive, Danvers, MA 01923, 978-750-8400. CCC is a not-for-profit organization that provides
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Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation
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Visit the Taylor & Francis Web site at
http://www.taylorandfrancis.com
and the CRC Press Web site at
http://www.crcpress.com
To my father Antonio and my mother Ninni.
—Stefano Cabrini
To my wife Megumi for her everlasting support.
—Satoshi Kawata
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TThhiiss ppaaggee iinntteennttiioonnaallllyy lleefftt bbllaannkk
vii
Contents
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .ix
Editors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .xi
Contributors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .xiii
Part I Standard Lithography
1 Introduction to Nanofabrication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Stefano Cabrini and aditi risbud
2 Electron Beam Lithography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Stephen thoms
3 Nanofabrication with Focused Ion Beams . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Jacques Gierak, ralf Jede, and Peter Hawkes
4 Focused Ion Beam and Electron Beam Deposition . . . . . . . . . . . . . . . . . . . . . 85
Shinji Matsui
5 Plasma-assisted Pattern transfer at the Nanoscale . . . . . . . . . . . . . . . . . . .111
Steven Shannon
6 Optical Lithography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127
Patrick Naulleau
7 Soft X-ray Lithography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Herbert O . Moser and Linke Jian
8 Simulations in Micro- and Nanofabrication . . . . . . . . . . . . . . . . . . . . . . . . . . 165
Sergey Babin
Part II New Lithographic techniques
9 Nanoimprint Lithography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 187
Stephen Y . Chou
10 Scanning Probe Lithography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207
Omkar a . Nafday
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viii
11 two-Photon Lithography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
Satoru Shoji and Satoshi Kawata
12 Colloidal Inorganic Nanocrystals: Synthesis
and Controlled assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 251
Liberato Manna and roman Krahne
13 Directed Self-assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 283
Gordon S . W . Craig and Paul F . Nealey
14 Self-assembled DNa Nanostructures and DNa Devices . . . . . . . . . . . . . . 299
John H . reif, Harish Chandran, Nikhil Gopalkrishnan,
and thomas LaBean
15 New Emerging techniques . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 329
thomas Schenkel, t .-C . Shen, Yuan Wang, and Xiang Zhang
Part III Nanofabrication applications
16 Nanoelectromechanical Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 353
Hiroyuki Fujita and Yoshio Mita
17 Micro- and Nanofluidics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 379
arata aota and takehiko Kitamori
18 Fabrication of Nanophotonic Structures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 399
Stefano Cabrini, P . James Schuck, alexander Weber-Bargioni,
and allan Chang
19 Patterning Magnetic Nanostructures with Ions . . . . . . . . . . . . . . . . . . . . . . . 421
Dan Kercher
20 Plasmonic Metamaterials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 437
takuo tanaka
21 Nanoelectronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 451
Koji Ishibashi
22 Manipulation and Nanostructuring for Biological applications . . . . . . . . . . 481
Gobind Das, Carlo Liberale, Francesco De angelis, Maria Laura Coluccio,
Enzo Di Fabrizio, and Patrizio Candeloro
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 505
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ix
Preface
Nanofabrication is a relatively new field in the world of publications, but also to give some practical informa-
science—it is known as an innovative and interdisci- tion for those just entering the field. The first big
plinary field that is expanding rapidly. This handbook challenge was the definition of nanofabrication. What
is a unique collection of various approaches to nanofab- exactly is nanofabrication? Is it the scaling down of
rication. Since the field is ever changing and expanding, microfabrication? Is it engineering support for nanosci-
the challenges put upon the editors are considerable; we ences? Or is it more complex?
are well aware that we are describing a field that is con- We are developing methods, techniques, and knowl-
stantly broadening its definition. However, it is of the edge to reproduce and control matter at a nanometer
utmost importance, because of the expanding nature of scale. To do this, we need to understand the physical
the field, to address new and different approaches to phenomena that occur in that regime by controlling the
this fascinating and important field of science. In this environment (to a nanometer size) as we perform our
handbook, you will find an introduction to “nanofabri- experiments and validate our theories. Matter in that
cation” based on various approaches from different sci- size regime presents all sorts of astonishing properties
entists. Each contributor has attempted to mark that can be applied to many fields, thereby bringing tre-
boundaries, define subfields, offer practical instruc- mendous benefits to science, society, and ultimately, our
tions and examples, and pave the way for future genera- lives. Nanofabrication devices can contribute by the
tions to travel. The book is composed of many chapters transfer of such properties from the mesoscale to the
by various authors chosen for their expertise in their real world. In short, we apply all our macroskills to
given field of study. manipulate the nanoworld, better understand its prop-
The motivation for this kind of handbook arose erties, and control them for applications that will
when one of us (SC) was interim director of the enhance daily life on a global scale.
Nanofabrication Facility at The Molecular Foundry, a This handbook is the first attempt to clarify these
nanoscience and nanotechnology user facility at the aspects and provide the most complete resource for this
Lawrence Berkeley National Laboratory in Berkeley, rapidly emerging interdisciplinary field. Each chapter
California. I was in charge of the design of the labora- focuses on a particular method or aspect of study. For
tory, planning the scientific strategies, and starting every method, the contributors discuss the underlying
new programs. But one of the many duties was also to theoretical basis, resolution, patterns and substrates
act as a “tour guide” to the many visitors and potential used, and applications. This builds upon our under-
users of the facility. Chemists, biologists, electronic standing of microfabrication, while moving into the
engineers, physicists, journalists, and many others “nano” dimension and showing that its use at this scale
were coming to see and to learn more about this new requires a different process and understanding. For each
field of study that the Department of Energy was initi- experiment, it shows how to approach key problems in
ating. Some of them were already experts and some the decision-making process related to materials, meth-
were complete novices, so for every tour I was telling a ods, surface considerations, and so on.
different story; each time I had to explain the nanofab- Nanofabrication Handbook encourages readers to
rication process using different examples, different consider fabricating techniques that better fit their par-
objectives, and different perspectives. Although all of ticular research needs. It is designed to serve as an
my explanations were valid, they were also just small essential resource tool for consulting in the experimen-
pieces of a much larger puzzle. Moreover, when some tal design phase of any project utilizing nanofabrication
of the “tourists” asked for a reference, I could not point techniques. It is written for scientists and students from
them to anything. I could think of many books dedi- different disciplines, who want to approach a nanosci-
cated to the individual aspects of the field, but no sin- ence experiment using nanofabrication. We have
gle source had yet to really define, describe, and explain endeavored to provide a broad vision of the most criti-
the total vision of nanofabrication. Because of this cal problems and how to approach and solve them. The
experience, I realized that a book was necessary, not contents include basic definitions and introduce the
only to fill the large gap in the world of scientific main underlying concepts of nanofabrication. The core
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