Nano-tribology and Materials in MEMS

276 Pages·2013·10.995 MB·English

by  Biswajit Saha, Erjia Liu, Shu Beng Tor (auth.), Sujeet K. Sinha, N. Satyanarayana, Seh Chun Lim (eds.)

Sujeet K. Sinha
N. Satyanarayana
Seh Chun Lim
Editors
Nano-tribology
and Materials in
MEMS
Nano-tribology and Materials in MEMS
Sujeet K. Sinha N. Satyanarayana
•
Seh Chun Lim
Editors
Nano-tribology
and Materials
in MEMS
123
Editors
Sujeet K.Sinha N.Satyanarayana
Department of Mechanical Engineering Seh ChunLim
Indian Instituteof Technology Department of Mechanical Engineering
Kanpur National Universityof Singapore
India Singapore
ISBN 978-3-642-36934-6 ISBN 978-3-642-36935-3 (eBook)
DOI 10.1007/978-3-642-36935-3
SpringerHeidelbergNewYorkDordrechtLondon
LibraryofCongressControlNumber:2013934533
(cid:2)Springer-VerlagBerlinHeidelberg2013
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Preface
Thefieldofnanotribologyhasadvancedtoagreatextentthankstothephenomenal
growth of information storage industry. The magnetic hard disks used for
recording and retrieving digital data require extremely thin nanolubricant for the
protectionofthediskfrommechanicaldamagesandwearbythesliderwhichflies
just above the surface of the disk with flying height only a few nanometer. Even
thoughthesliderisdesignednottotouchthedisk,contactsbetweenthesliderand
the disk are inevitable and hence we require the protection of the disk by the
nanolubricant. A similar requirement, at least in length scale, is experienced in
microsystems such as micro-electro-mechanical systems (MEMS) where micron-
sized components, usually made of Si, are made to move about just like their
macro-machinecounterparts.Sliding,contactandimpactbetweenthecomponents
lead to the problems of adhesion, friction and wear. Because of the small length
scalesinvolved,theproblemsoftribologyfacedinmicrosystemsdifferdrastically
from those of the traditional macro-scale machines. Therefore, it is important to
address these issues taking into considerations the materials, micro-fabrication
process, lubricants and the lubrication methods.
A symposium titled ‘‘Nano-tribology and Related Materials Issues in MEMS’’
wasorganizedbytheDepartmentofMechanicalEngineering,NationalUniversity
of Singapore from 13 to 14 May 2010. A number of invited talks were presented
covering the fundamental nanotribology concepts, applications of new materials,
surface modifications of Si and polymer substrates and simulations of the friction
phenomenon under light load conditions. This book is a collection of the papers
that were submitted by the presenters with some additional contributions by the
experts in this field. Each chapter has been carefully selected and edited to bring
out current practices in the MEMS tribology field with the explicit aim offinding
appropriate solutions to the tribological problems faced in MEMS and nano-scale
machines.
Theeditorswouldliketoexpresstheirdeepestappreciationstotheinvitedand
posterpresentersofthissymposiumwithoutwhosehelpthiseventwouldnothave
been a reality. We thank the Dean, Faculty of Engineering and the Head of the
Department of Mechanical Engineering, NUS, who provided all the supports
needed for the organization of this event. We are also grateful to the Singapore
v
vi Preface
NationalResearchFoundation(NRF)forthegenerous research grant(Awardno.:
NRF-CRP 2-2007-04) to our team which helped to support much of the research
works thatwere presentedinthis symposium. Finally,we would liketo thank the
publisher and the authors of the chapters whose relentless effort through the
manuscript preparation and editing has resulted in this compilation of very rele-
vant works in the field of nanotribology and materials for MEMS. We earnestly
hope that this edited book will positively add to the expanding literature in this
field to help in current and future research.
April 2013 Sujeet K. Sinha
Nalam Satyanarayana
Seh Chun Lim
Contents
1 Nanotribological Phenomena, Principles and Mechanisms
for MEMS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Biswajit Saha, Erjia Liu and Shu Beng Tor
2 Biomimetic Inspiration Regarding Nano-Tribology
and Materials Issues in MEMS. . . . . . . . . . . . . . . . . . . . . . . . . . 53
Ille C. Gebeshuber
3 Nanotribology and Wettability of Molecularly Thin Film. . . . . . . 81
Yufei Mo and Liping Wang
4 Mechanical Properties and Deformation Behavior
of Ni Nanodot-Patterned Surfaces. . . . . . . . . . . . . . . . . . . . . . . . 111
Min Zou and Hengyu Wang
5 Biomimetic Surfaces for Tribological Applications
in Micro/Nano-Devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
R. Arvind Singh, Eui-Sung Yoon, Kahp Yang Suh
and Deok-Ho Kim
6 Molecular Simulation of Polymer Nanotribology. . . . . . . . . . . . . 163
Y. K. Yew, Z. C. Su, Sujeet K. Sinha and V. B. C. Tan
7 Atomistic Modeling of Polymeric Nanotribology . . . . . . . . . . . . . 183
L. Dai and V. B. C. Tan
8 Probing the Complexities of Friction in Submicron Contacts
Between Two Pristine Surfaces. . . . . . . . . . . . . . . . . . . . . . . . . . 199
Wun Chet Davy Cheong and Anna Marie Yong
9 Nano/Micro-Tribological Properties of MEMS/NEMS
Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215
R. Arvind Singh, N. Satyanarayana and Sujeet K. Sinha
vii
viii Contents
10 Friction and Wear Studies of Ultra-Thin Functionalized
Polyethylene Film Chemisorbed on Si with an
Intermediate Benzophenone Layer . . . . . . . . . . . . . . . . . . . . . . . 231
Myo Minn and Sujeet K. Sinha
11 Localized Lubrication of Micromachines: A Novel Method
of Lubrication on Micromechanical Devices . . . . . . . . . . . . . . . . 247
L. Y. Jonathan, V. Harikumar, N. Satyanarayana
and Sujeet K. Sinha
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 273
Chapter 1
Nanotribological Phenomena, Principles
and Mechanisms for MEMS
Biswajit Saha, Erjia Liu and Shu Beng Tor
Abstract Nanotribologyisreferredtoasabranchoftribology,whichinvolvesthe
interactionsbetween tworelativelymovingmaterialsincontactatananometeror
anatomicscale.Nanotribologywasstimulatedbythefabricationofmicro-electro-
mechanical systems (MEMS). With the advent of scanning force microscopy
(SPM), experimental approach to nanotribological regimes has been substantially
advanced.Mostcommonexamplesofnanotribologicalphenomenaareinharddisk
drives, MEMS, and nano-electro-mechanical systems (NEMS). Tribology is a
surface phenomenon, which can be significantly affected by a very high surface-
to-volume ratio in a micro or nanostructure. Small mass, light load, elastic
deformation,andslightwearorabsenceofweararetypicalofnanotribology.Ithas
been widely perceived that various tribological test conditions, such as load,
velocity, temperature, surface free energy, surface topography, environment, etc.
play major roles in nanotribology. The experimental study of nanotribology is
made possible by using surface force apparatus (SFA), atomic force microscope
(AFM), friction force microscope (FFM), and ball-on-disk nanotribometer. Tri-
bologyresearchexceedinglyneedsbroadenedknowledgeinvariousfieldssuchas
physics, chemistry, mechanics, materials science, etc. This chapter discusses the
various aspects of nanotribology including nanofriction, nanowear and nanolu-
brication for MEMS. The nanotribological measurement methodologies and
mathematical relationships between friction, bending and torsion forces based on
AFM/LFM (lateral force microscopy) are comprehensively reviewed. The influ-
ences of various experimental conditions on nanotribology are described with
various examples. Simulation techniques for nanotribology are also highlighted.
B.Saha(cid:2)E.Liu(&)(cid:2)S.B.Tor
SchoolofMechanicalandAerospaceEngineering,
NanyangTechnologicalUniversity,50NanyangAvenue,
Singapore639798,Singapore
e-mail:[email protected]
S.K.Sinhaetal.(eds.),Nano-tribologyandMaterialsinMEMS, 1
DOI:10.1007/978-3-642-36935-3_1,(cid:2)Springer-VerlagBerlinHeidelberg2013
2 B.Sahaetal.
Contents
Introduction................................................................................................................................ 2
MeasurementTechniques.......................................................................................................... 4
ImportanceofAFMCantilever........................................................................................... 5
LateralForceMicroscope......................................................................................................... 7
BendingofRectangularCantilever..................................................................................... 8
BendingofV-ShapedCantilever........................................................................................ 10
TorsionofRectangularCantilever...................................................................................... 12
TorsionofV-ShapedCantilever......................................................................................... 13
ChemicalMappingandTopographyUsingNanofriction........................................................ 14
Nanotribometer.......................................................................................................................... 17
ControllingParametersforFrictionCoefficient...................................................................... 18
EffectofVelocity................................................................................................................ 18
EffectofSurfaceForce....................................................................................................... 20
EffectofTemperature.......................................................................................................... 23
EffectofLoad...................................................................................................................... 24
EffectofContactArea........................................................................................................ 26
EffectofEnvironment......................................................................................................... 28
ApplicationsofNanotribology.................................................................................................. 28
Micro-Electro-MechanicalSystem...................................................................................... 28
MicrofluidicDeviceandMicromold.................................................................................. 31
MagneticRecordingSystem................................................................................................ 33
Nanowear................................................................................................................................... 35
LubricantsforNanotechnology................................................................................................. 39
MetallicandCeramicLubricants........................................................................................ 39
FluoropolymerLubricants................................................................................................... 40
SelfAssembledMonolayer................................................................................................. 41
SimulationofTribologicalPhenomena.................................................................................... 43
Summary.................................................................................................................................... 48
References.................................................................................................................................. 48
Introduction
Thescientificterm‘‘tribology’’isrelatedtotheinterfaceofmovingsurfaces,which
mainly deals with friction, wear and lubrication. Friction is resistance to relative
motionsofanystateofmaterialsincontact,wearislossofmaterialsfromonesolid
bodyoranotherorbothduringtheirrelativemotionsincontact,andlubricationisto
reduce friction and wear between two moving materials by means of a lubricant
presentattheinterface.Thoughtribologicalphenomenahaveexistedsincethevery
beginning of the world, the term ‘‘tribology’’ was only introduced by Jost in the
modern age, i.e. 1966 [1]. This term has been more on technological use in
industrialoperationforeconomy,durability,lifetimeandmaintenancecalculation.