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Nano-Optoelectronic
Sensors and Devices
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Micro & Nano Technologies Series
FrancoisLeonard PhysicsofCarbonNanotubeDevices(2009)
MamadouDiallo,JeremiahDuncan,Nora NanotechnologyApplicationsforCleanWater(2009)
Savage,AnitaStreet&RichardSustich
RolfWuthrich MicromachiningUsingElectrochemicalDischarge
Phenomenon(2009)
MatthiasWorgull HotEmbossing(2009)
WaqarAhmed&M.J.Jackson EmergingNanotechnologiesforManufacturing(2009)
RichardLeach FundamentalPrinciplesofEngineeringNanometrology(2009)
JeremyRamsden AppliedNanotechnology(2009)
VeikkoLindroos,MarkkuTilli, HandbookofSiliconBasedMEMSMaterials
AriLehto&TeruakiMotooka andTechnologies(2010)
MatthewHull&DianaBowman NanotechnologyEnvironmentalHealthandSafety(2009)
YugangSun&JohnRogers SemiconductorNanomaterialsforFlexible
Technologies(2010)
VictorZhirnov&RalphK.Cavin MicrosystemsforBioelectronics(2010)
ZeevZalevsky&IbrahimAbdulhalim IntegratedNanophotonicDevices(2010)
YiQin MicromanufacturingEngineeringandTechnology(2010)
JeremyRamsden Nanotechnology:AnIntroduction(2011)
ReginaLuttge MicrofabricationforIndustrialApplications(2011)
GurumurthyRamachandran AssessingNanoparticleRiskstoHumanHealth(2011)
RobertDorey CeramicThickFilmsforMEMSandMicrodevices(2012)
Nam-TrungNguyen Micromixers,Secondedition(2012)
JaydeepSarkar SputteringMaterialsforVLSIandThinFilmDevices(2012)
NingXi&KingWaiChiuLai Nano-OptoelectronicSensorsandDevices(2012)
KarthikeyanSubramani&WaqarAhmed EmergingNanotechnologiesinDentistry(2012)
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Nano-Optoelectronic
Sensors and Devices
Nanophotonics from Design to
Manufacturing
Edited by
Ning Xi
Michigan State University
King Wai Chiu Lai
Michigan State University
Amsterdam•Boston•Heidelberg•London•NewYork•Oxford
Paris•SanDiego•SanFrancisco•Singapore•Sydney•Tokyo
WilliamAndrewisanimprintofElsevier
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Preface
This book presents a comprehensive report on the research on nanosensors and -devices conducted
by the researchers in the Robotics and Automation Laboratory at Michigan State University and our
collaborators. The Robotics and Automation Laboratory was established after I joined the faculty
of Michigan State University in 1997. For the last decade, the research directions of the laboratory
havebeenexpandedfromtraditionalindustrialrobotstonanorobots.Afterwesuccessfullytestedour
nanoroboticsystemfornanomanipulationsandassembly,wewerelookingforopportunitiestodevelop
nanodevicestodemonstratethecapabilityofournewlydevelopednanoroboticsystem.In2004,Imet
Dr Harold Szu, US Army Night Vision and Electronic Sensors Directorate (formerly with Office of
Naval Research), in a conference. We had a very interesting discussion on nanomanufacturing and
nanosensors. He inspired me to consider using nanorobots to manufacture nanowire-based infrared
detectors.Thishasledtomanyinterestingprojects.Overtheyears,Haroldhasprovideduswithmuch
valuableadvice.Iwishtoexpressmydeepappreciationforhisinspirationandassistance.
Dr King Wai Chiu Lai was my first research associate working on the nanodevices. He played
important roles in many of the research efforts reported in the book. King, as my coeditor, has put
a lot of effort into this book. The completion of this book would have not been possible without his
tireless and careful work. In addition, all of the contributors of this book are my former or current
PhDstudents,postdoctoralresearchassociates,andcollaborators.Iwishtothankallofthemfortheir
contributionstothisbook.
Lastbutnotleast,IexpressmysincerethankstoOfficeofNavalResearch,inparticularDrsJames
Buss,KeithKrapels,JamesWaterman,andMichaelDuncan,andtheNationalScienceFoundationfor
providingfinancialsupportfortheresearcheffortsreportedinthisbook.
NingXi
xi
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Acknowledgments
MaterialcontainedinthisbookhasbeendevelopedoveryearsintheRoboticsandAutomationLabora-
toryatMichiganStateUniversity,USA.Manyofcollaborators,studentsandpost-doctoralresearchers
have made important contributions to the results. We would like to express our sincere acknowledg-
mentsandgratitudetothem,especiallywewouldexpressourappreciationtoGuangyongLi,Jiangbo
Zhang, Heping Chen, Wai Keung Fung, Yantao Shen, Uchechukwu Wejinya, Lianqing Liu, Carmen
KarmanFung,HongzhiChen,JianyongLou,YilunLuo,RuiguoYang,BoSongandLiangliangChen.
ManyresultsdescribedinthebookhavebeenpartiallysupportedbyNationalScienceFoundationand
OfficeofNavalResearch.
Finally,theoutstandingteamoftheElsevierLimited,especiallyFrankHellwig(EditorialProject
Manager),MatthewDeans(SeniorPublisher),WayneYuhaszandMelissaRead,providedustremen-
dous help and support. We would also like to thank Dr. Chanmin Su of Bruker Nano Surface
InstrumentationGroup(formerlyVeecoInstrumentInc.)forhistechnicaladviceandhelpduringthe
developmentoftheatomicforcemicroscopicnanorobot.
NingXiandKingWaiChiuLai
xiii
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XiandLai — About˙the˙Editors-9781437734713 — 2011/10/12 — 15:07 — Page 15 — #1
About the Editors
Dr Ning Xi received his DSc degree in Systems Science and Math-
ematics from Washington University in St. Louis, Missouri, USA in
December, 1993. He is a University Distinguished Professor and the
John D. Ryder Professor of Electrical and Computer Engineering, and
DirectoroftheRoboticsandAutomationLaboratoryatMichiganState
University. Currently, he serves as the Head and Chair Professor of
Department of Mechanical and Biomedical Engineering at the City
University of Hong Kong. Dr Xi received the Best Paper Award in
IEEE/RSJInternational Conferenceon IntelligentRobots andSystems
(IROS) in August, 1995, and the Best Paper Award in the 1998 Japan-
USASymposiumonFlexibleAutomation.DrXiwasawardedthefirst
Early Academic Career Award by the IEEE Robotics and Automation
SocietyinMay,1999.HealsoreceivedTheBestPaperAwardofIEEE
Transactions on Automation Science and Engineering in 2007. Dr Xi was awarded the SPIE Nano
EngineeringAwardin2007.Inaddition,heisarecipientofUSNationalScienceFoundationCAREER
Award.DrXiisafellowofIEEE.HeservesasthePresidentofIEEENanotechnologyCouncil(2010–
2011).Hisresearchinterestsincluderobotics,manufacturingautomation,micro/nanomanufacturing,
nanosensorsanddevices,andintelligentcontrolandsystems.
Dr King Wai Chiu Lai is currently the postdoctoral research asso-
ciate and the lab manager of the Robotics and Automation Labora-
tory in the Electrical and Computer Engineering at Michigan State
University (MSU), USA. He received his Ph.D. degree in Automation
andComputer-AidedEngineeringfromTheChineseUniversityofHong
Kongin2005.AfterjoiningtheMSU,hewasdevotedtotheinvestiga-
tion of nanomanufacturing technology for nano optoelectronic sensors
and devices and the characterization of nano-optoelectronic sensors.
He has authored and co-authored more than 80 high-quality journals,
patent applications, book chapters, and conference papers including
Applied Physics Letters, Nanotechnology, Nanomedicine, The Inter-
national Journal of Robotics Research (IJRR), etc. His findings were
nominated as the Best Conference Paper and Best Student Paper at the
5thIEEEInternationalConferenceonNano/MicroEngineeredandMolecularSystems(IEEENEMS),
International Conference on Intelligent Mechatronics and Automation (ICIMA), and International
ConferenceonInformationSocietyinthe21stCentury(IS2000).Hisworkoncarbonnanotube-based
infrared sensors has been featured on many information sites for nanoscience and nanotechnology
includingPhysOrg,NanowerkLLC,andSPIENewsrooms.
15
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List of Contributors
HepingChen
IngramSchoolofEngineering,TexasStateUniversity,Texas
HongzhiChen
DepartmentofElectricalandComputerEngineering,MichiganStateUniversity,Michigan
LiangliangChen
DepartmentofElectricalandComputerEngineering,MichiganStateUniversity,Michigan
CarmenKarManFung
HongKongProductivityCouncil,HongKong
GuangyongLi
DepartmentofElectricalandComputerEngineering,UniversityofPittsburgh,Pittsburg,Pennsylvania
LianqingLiu
StateKeyLabofRobotics,P.R.China
LimingLiu
DepartmentofElectricalandComputerEngineering,UniversityofPittsburgh,Pennsylvania
JianyongLou
The State Key Laboratory of Electrical Insulation and Power Equipment, Xi’an Jiaotong University,
China
YilunLuo
DepartmentofBiosystemsEngineering,MichiganStateUniversity,Michigan
MeyyaMeyyappan
CenterforNanotechnology,NASAAmesResearchCenter,California
BalasubramaniamShanker
DepartmentofElectricalandComputerEngineering,MichiganStateUniversity,Michigan
BoSong
DepartmentofElectricalandComputerEngineering,MichiganStateUniversity,Michigan
XuhuiSun
InstituteofFunctionalNanoandSoftMaterials(FUNSOM),SoochowUniversity,P.R.China
Tzyh-JongTarn
DepartmentofElectricalandSystemsEngineering,WashingtonUniversityinSt.Louis,Missouri
xvii
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xviii List of Contributors
UchechukwuC.Wejinya
DepartmentofMechanicalEngineering,UniversityofArkansas,Arkansas
ZhengfangZhou
DepartmentofMathematics,MichiganStateUniversity,Michigan
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XiandLai — Ch01-9781437734713 — 2011/10/11 — 0:40 — Page 1 — #1
CHAPTER
1
Introduction
KingWaiChiuLaiandNingXi
DepartmentofElectricalandComputerEngineering,
MichiganStateUniversity,Michigan
CHAPTER OUTLINE
1.1 Overview...................................................................................................... 1
1.2 ImpactofNanomaterials .................................................................................... 2
1.3 ChallengesandDifficultiesinManufacturingNanomaterials-BasedDevices............................ 4
1.3.1 RoleofMicrofluidics...................................................................... 5
1.3.2 RoleofRoboticNanoassembly............................................................ 6
1.4 Summary...................................................................................................... 6
References......................................................................................................... 7
1.1 OVERVIEW
Nanomaterialscanbeusedasnovelsensingelementsandtheyallowustobuilddevicesmuchsmaller
thanbefore.Researchintonanomaterialsandnanomanufacturingistremendouslyimportant,because
mostnanoscalematerialsandsystemsaredifferentfromcurrentmacro-andmicrosystems.Thisbook
coversarangeofmattersregardingthedevelopmentofnano-optoelectronicdevices.
Optoelectronicsplaysasignificantroleinthesemiconductorindustry,andsilicon-basedoptoelec-
tronic devices are now so ubiquitous in modern society. The range of applications for optoelectronic
devices like light-emitting diodes (LEDs), laser, optical sensors, and solar cells continues to grow,
resultinginanewgenerationofelectronicsproductssuchascomputerdisplays,flatscreenTVs,high-
speedcommunicationdevices,etc.Whilesilicon-baseddevicesandelectronicshavebeendeveloped
for 30 years, scaling down and further improving the performance of current silicon-based devices
are still very challenging. Therefore, new technologies and materials have to be developed to meet
these challenges. In 1971, the feature widths of semiconductor manufacturing processes were about
10µm. Nowadays the smallest feature size of silicon-based devices is about 32nm. Highly special-
ized techniques, facilities, and equipment are essential to further reduce the size of conventional
optoelectronicdevices.Withtherecentadvanceinnanotechnology,variouskindsofnovelnanomate-
rialshavebeenintroduced.Thesematerialsoffersuperiorquantumoptical,electrical,andmechanical
effects due to their sizes (nanometer scale), which opens up the possibility to replace silicon for
NingXi&KingWaiChiuLai(eds):Nano-OptoelectronicSensorsandDevices.DOI:10.1016/B978-1-4377-3471-3.00001-0 1
Copyright(cid:13)c 2012ElsevierInc.Allrightsreserved.
