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About NANO- AND MICROELECTROMECHANICAL SYSTEMS
The fundamental goal of this book is to develop the basic theoretical foundations in order to design and develop, analyze and prototype highperformance NEMS and MEMS. This book is focused on the development of fundamental theory of NEMS and MEMS, as well as their components and structures, using advanced multidisciplinary basic and applied developments. In particular, it will be illustrated how to perform the comprehensive studies with analysis of the processes, phenomena, and relevant properties at nano- and micro-scales, development of NEMS and MEMS architectures, physical representations, structural design and optimization, etc.
Detailed Information
Author: | Sergey Edward Lyshevski |
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Publication Year: | 2012 |
Pages: | 344 |
Language: | other |
File Size: | 8.3692 |
Format: | |
Price: | FREE |
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