Multi-stage actuation systems and control

213 Pages·2019·15.46 MB·English

by  Du

Multi-Stage Actuation
Systems and Control

Multi-Stage Actuation
Systems and Control
Chunling Du and Chee Khiang Pang
CRC Press
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Library of Congress Cataloging-in-Publication Data
Names: Du, Chunling, author. | Pang, Chee Khiang, author.
Title: Multi-stage actuation systems and control / Chunling Du and Chee
Khiang Pang.
Description: First edition. | Boca Raton, FL : CRC Press/Taylor & Francis
Group, 2018. | Includes bibliographical references.
Identifiers: LCCN 2018032541 | ISBN 9781138480759 (hardback : acid-free paper) |
ISBN 9781351062183 (ebook)
Subjects: LCSH: Microactuators. | Automatic control.
Classification: LCC TJ223.A25 D83 2018 | DDC 629.8—dc23
LC record available at https://lccn.loc.gov/2018032541
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To my families.
C. Du
To tbt. For our adventure.
C. K. Pang

Contents
Preface ......................................................................................................................xi
Authors .................................................................................................................xiii
List of Abbreviations ............................................................................................xv
1. Mechanical Actuation Systems....................................................................1
1.1 Introduction ...........................................................................................1
1.2 Brief Description of Application Examples .......................................2
1.2.1 Dual-Stage Actuation Systems ...............................................2
1.2.2 Micro X–Y Stages......................................................................3
1.3 Actuators ................................................................................................4
1.3.1 Primary Actuator .....................................................................4
1.3.2 Secondary Actuators ...............................................................6
1.4 Single-Stage Actuation Systems ..........................................................8
1.5 Dual-Stage Actuation Systems ............................................................9
1.6 Three-Stage Actuation Systems ........................................................10
References .......................................................................................................11
2. High-Precision Positioning Control of Dual-Stage
Actuation Systems ........................................................................................15
2.1 Introduction .........................................................................................15
2.2 Control Schemes ..................................................................................15
2.3 Controller Design Method in the Continuous-Time Domain ......18
2.4 Controller Design Method in the Discrete-Time Domain ............22
2.5 Application in the Controller Design of a Dual-Stage
Actuation System ................................................................................25
2.5.1 Actuator Modeling Based on Frequency Responses
Measurement ..........................................................................25
2.5.2 Controller Design and Simulation ......................................25
2.5.3 Experimental Results ............................................................29
2.6 Conclusion ............................................................................................29
References .......................................................................................................31
3. Control of Thermal Microactuator-Based, Dual-Stage
Actuation Systems ........................................................................................33
3.1 Introduction .........................................................................................33
3.2 Modeling of a Thermal Microactuator.............................................33
3.3 Controller Design and Performance Evaluation ............................37
3.4 Experimental Results ..........................................................................41
3.5 Conclusion ............................................................................................45
References .......................................................................................................45
vii
viii Contents
4. Modeling and Control of a Three-Stage Actuation System ................47
4.1 Introduction .........................................................................................47
4.2 Actuator and Vibration Modeling ....................................................47
4.3 Control Strategy and Controller Design ..........................................52
4.4 Performance Evaluation .....................................................................56
4.5 Experimental Results ..........................................................................60
4.6 Different Configurations of the Control System.............................61
4.7 Conclusion ............................................................................................66
References .......................................................................................................67
5. Dual-Stage System Control Considering Secondary Actuator
Stroke Limitation ..........................................................................................69
5.1 Introduction .........................................................................................69
5.2 More Freedom Loop Shaping for Microactuator
Controller Design ................................................................................70
5.3 Dual-Stage System Control Design for 5 kHz Bandwidth ............70
5.4 Evaluation with the Consideration of External Vibration
and Microactuator Stroke ..................................................................74
5.5 Conclusion ............................................................................................76
References .......................................................................................................76
6. Saturation Control for Microactuators in Dual-Stage
Actuation Systems ........................................................................................79
6.1 Introduction .........................................................................................79
6.2 Modeling and Feedback Control ......................................................79
6.3 Anti-Windup Compensation Design ...............................................80
6.4 Simulation and Experimental Results .............................................82
6.5 Conclusion ............................................................................................87
References .......................................................................................................87
7. Time Delay and Sampling Rate Effect on Control Performance
of Dual-Stage Actuation Systems .............................................................89
7.1 Introduction .........................................................................................89
7.2 Modeling of Time Delay ....................................................................90
7.3 Dual-Stage Actuation System Modeling with Time Delay for
Controller Design ................................................................................91
7.4 Controller Design with Time Delay for the Dual-Stage
Actuation Systems ...............................................................................93
7.5 Time Delay Effect on Dual-Stage System Control Performance ....95
7.5.1 (τ + τ) < T ..............................................................................95
m c s
7.5.2 T < (τ + τ) < 2T ....................................................................97
s m c s
7.6 Sampling Rate Effect on Dual-Stage System Control
Performance .........................................................................................99
7.7 Conclusion ..........................................................................................103
References .....................................................................................................104
Contents ix
8. PZT Hysteresis Modeling and Compensation .....................................105
8.1 Introduction .......................................................................................105
8.2 Modeling of Hysteresis ....................................................................105
8.2.1 PI Model ................................................................................106
8.2.2 GPI Model .............................................................................107
8.2.3 I nverse GPI Model ...............................................................108
8.3 Application of GPI Model to a PZT-Actuated Structure .............109
8.3.1 M odeling of the Hysteresis in the PZT-Actuated
Structure ................................................................................110
8.3.2 H ysteresis Compensator Design........................................112
8.3.3 E xperimental Verification ...................................................112
8.4 Conclusion ..........................................................................................116
References .....................................................................................................117
9. Seeking Control of Dual-Stage Actuation Systems with
Trajectory Optimization ............................................................................119
9.1 Introduction .......................................................................................119
9.2 Current Profile of VCM Primary Actuator ....................................120
9.2.1 P TOS Method .......................................................................120
9.2.2 A General Form of VCM Current Profiles ........................121
9.3 Control System Structure for the Dual-Stage Actuation System ....121
9.4 Design of VCM Current Profile a and Dual-Stage Reference
v
Trajectory r ........................................................................................123
d
9.5 Seeking within PZT Milliactuator Stroke .....................................127
9.6 Seeking over PZT Milliactuator Stroke ..........................................128
9.7 Conclusion ..........................................................................................129
References .....................................................................................................131
10. High-Frequency Vibration Control Using PZT Active Damping ....133
10.1 Introduction .......................................................................................133
10.2 Singular Perturbation Method-Based Controller Design ...........134
10.2.1 Singular Perturbation Control Topology ..........................134
10.2.2 Identification of Fast Dynamics Using PZT as a Sensor ....135
10.2.3 Design of Controllers ..........................................................136
10.2.3.1 Fast Subsystem Estimator G∗ ..............................137
V
10.2.3.2 Fast Controller C .................................................137
V
10.2.3.3 Slow Controller C ................................................137
V
10.2.4 Simulation and Experimental Results ..............................138
10.2.4.1 Frequency Responses ..........................................138
10.2.4.2 Time Responses ....................................................139
10.3 H Controller Design ........................................................................141
2
10.4 Design of C (z) with H Method and Notch Filters ......................143
d 2
10.5 Design of Mixed H /H Controller C (z) ........................................144
2 ∞ d
10.6 Application Results ...........................................................................146
10.6.1 System Modeling .................................................................146