Modeling and Control of Precision Actuators

262 Pages·2013·16.33 MB·English

by  Tan Kok Kiong

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Contents
Preface..................................................................xi
Acknowledgments......................................................xv
AbouttheAuthors.....................................................xvii
1. Introduction.........................................................1
1.1 GrowingInterestinPreciseActuators...........................1
1.2 TypesofPreciseActuators......................................3
1.2.1 PiezoelectricActuator...................................3
1.2.1.1 StackActuator.................................3
1.2.1.2 PiezoelectricShearActuator...................3
1.2.1.3 PiezoelectricBendingActuator................4
1.2.2 LinearMotor ........................................... 5
1.2.2.1 PermanentMagnetLinearMotor..............5
1.2.2.2 LinearPiezoStage.............................7
1.2.2.3 LinearAirBearingStage.......................8
1.3 ApplicationsofPreciseActuators...............................9
References ..........................................................10
2. NonlinearDynamicsandModeling.................................11
2.1 Hysteresis.....................................................11
2.2 Creep .........................................................14
2.3 Friction.......................................................15
2.4 ForceRipples..................................................17
References ..........................................................19
3. IdentificationandCompensationofPreisachHysteresis
inPiezoelectricActuators...........................................21
3.1 SVD-BasedIdentificationandCompensation
ofPreisachHysteresis.........................................23
3.1.1 ParameterIdentificationofPreisachHysteresis.........23
3.1.1.1 Least-SquaresEstimationbySVD.............23
3.1.1.2 IdentificationRevisionUsing
SVDUpdating................................25
3.1.1.3 SimulationStudyofProposed
IdentificationApproach......................27
v
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vi Contents
3.1.2 CompensationStrategyofPreisachHysteresis..........27
3.1.2.1 Preisach-BasedInversionCompensation......27
3.1.2.2 ProposedCompositeControlStrategy........30
3.1.2.3 SimulationStudyofProposed
CompensationStrategy.......................31
3.1.3 ExperimentalStudies..................................31
3.1.3.1 ExperimentalSetup...........................32
3.1.3.2 HysteresisIdentificationatLow
Frequencies..................................32
3.1.3.3 PerformanceofProposedComposite
ControlleratLowFrequencies................33
3.1.3.4 PerformanceofProposedComposite
ControlleratHigherFrequencies.............38
3.1.4 Discussions............................................38
3.2 High-BandwidthIdentificationandCompensation
ofHystereticDynamicsinPiezoelectricActuators..............40
3.2.1 ProposedModelIdentificationStrategy................42
3.2.1.1 ModelofPASystems.........................42
3.2.1.2 IdentificationofQuasi-StaticHysteresis.......43
3.2.2 ProposedCompositeController........................45
3.2.2.1 AnalysisofFeedforwardandFeedback
ControllersatHighFrequencies .............. 45
3.2.2.2 DesignofFeedforwardController............47
3.2.2.3 DesignofFeedbackController................48
3.2.3 ExperimentalStudies..................................50
3.2.3.1 IdentificationofQuasi-StaticHysteresis.......50
3.2.3.2 DriftSuppression.............................50
3.2.3.3 PreisachHysteresisIdentification.............50
3.2.3.4 IdentificationofNonhysteresicDynamics.....52
3.2.3.5 ControllerDesign............................54
3.2.3.6 PerformanceEvaluation......................54
3.2.4 Discussions............................................58
3.3 ConcludingRemarks..........................................60
References ..........................................................60
4. IdentificationandCompensationofFrictionandRippleForce......63
4.1 RelayFeedbackTechniquesforPrecisionMotionControl ...... 63
4.2 IdentificationandCompensationofFrictionModel............64
4.2.1 SystemModel.........................................64
4.2.2 DCRFeedbackSystem.................................66
4.2.3 FrictionModelingUsingDCRFeedback................69
4.2.3.1 Low-VelocityMode:StaticFriction
Identification.................................69
4.2.3.2 High-VelocityMode:Coulomb
andViscousFrictionIdentification............69
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Contents vii
4.2.3.3 EstimatingtheBoundaryLubrication
VelocitybyOptimization.....................71
4.2.4 Simulation.............................................72
4.2.4.1 LimitCycleVariationwithRelayGains.......72
4.2.4.2 Phase1:Low-VelocityMode..................73
4.2.4.3 Phase2:High-VelocityMode.................74
4.2.4.4 EstimationofδviaOptimization..............74
4.2.5 Real-TimeExperiments................................76
4.3 ModelingandCompensationofRipples
andFrictioninPermanentMagnetLinearMotors..............81
4.3.1 OverallPMLMModel .................................81
4.3.2 ModelIdentification...................................82
4.3.2.1 Dual-InputDescribingFunction(DIDF)
forNonlinearPortionofPMLMModel ....... 83
4.3.2.2 ParameterEstimationfromHarmonic
Balance.......................................86
4.3.2.3 ExtractionofFrequencyComponents
fromDFT.....................................87
4.3.3 Simulation.............................................88
4.3.4 Real-TimeExperiments................................89
4.3.4.1 IdentificationoftheSpatialCogging
Frequency....................................89
4.3.4.2 ParameterEstimation.........................91
4.3.4.3 ModelCompensation.........................92
References ..........................................................97
5. ModelPredictiveControlofPreciseActuators......................99
5.1 ModelPredictiveControlConceptsforMotionTracking......101
5.1.1 PredictionandOptimization..........................102
5.1.2 Offset-FreeandRobustMPC..........................103
5.1.2.1 Offset-FreeTracking.........................104
5.1.2.2 RobustFormulation.........................107
5.2 HybridMPCforUltrasonicMotors...........................108
5.2.1 PiecewiseAffineModelofMotion....................108
5.2.2 ModelPredictiveControlforPWAModel.............111
5.2.2.1 TerminalGain...............................112
5.2.2.2 TerminalCost...............................112
5.2.2.3 TerminalSet.................................112
5.3 FromParametricMPCtoPIDGainScheduling
Controllers...................................................113
5.4 SimulationStudyandExperimentResults....................114
5.4.1 SimulationStudies....................................114
5.4.2 Experiment...........................................117
5.5 ConcludingRemarks.........................................118
References.........................................................119
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viii Contents
6. ModelingandControlofAirBearingStages.......................123
6.1 ProblemStatements..........................................124
6.2 ControlofLinearAirBearingStage...........................124
6.3 ControllerDesignfortheSystem.............................127
6.4 ExperimentalResults.........................................133
6.5 ControlofSphericalAirBearingStage........................137
6.5.1 MechanicalStructure.................................137
6.5.1.1 VoiceCoilActuators.........................138
6.5.1.2 PneumaticSystem...........................141
6.5.2 ControlSystem.......................................142
6.5.2.1 HardwareofControlSystem................142
6.5.2.2 ModelingofAirBearingStage...............146
6.5.2.3 ParameterIdentification.....................146
6.5.2.4 NoiseFilter..................................147
6.5.2.5 Model-BasedControllerDesign..............149
6.6 PerformanceAnalysisofSphericalAirBearingSystem........150
6.6.1 ModelIdentification..................................151
6.6.2 NoiseFilter...........................................151
6.6.3 ControlResults.......................................154
6.7 ConcludingRemarks.........................................155
References.........................................................156
7. FaultDetectionandAccommodationinActuators.................157
7.1 ProblemStatements..........................................158
7.2 TypesofFailure..............................................159
7.2.1 ExamplesofActuatorFailure.........................159
7.2.2 SensorFailure........................................160
7.3 FaultDiagnosisScheme......................................161
7.3.1 FaultDetection.......................................161
7.3.2 FaultIsolation........................................161
7.3.3 FaultIdentification...................................162
7.4 ControloftheSystemunderNo-FaultCondition.............163
7.5 AccommodationControlafterFaultDetection................164
7.6 ExtensiontoOutputFeedbackControlDesign................165
7.6.1 FaultDiagnosisScheme...............................165
7.6.1.1 FaultDetection..............................165
7.6.1.2 FaultIsolation...............................166
7.6.2 RobustControlfortheSystemunder
No-FaultCondition...................................167
7.6.3 AccommodationControlafterFaultDetection.........168
7.7 ExperimentalTests...........................................168
7.8 ConcludingRemarks.........................................172
References.........................................................175
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Contents ix
8. CaseStudiesofPreciseActuatorApplications.....................177
8.1 RobustAdaptiveControlofPiezoelectric
ActuatorswithanApplicationtoIntracytoplasmic
SpermInjection..............................................178
8.1.1 ModelingofthePiezoelectricActuator................179
8.1.2 RobustAdaptiveControl.............................181
8.1.3 ExperimentalResults.................................185
8.1.4 BiomedicalApplication...............................191
8.1.4.1 Instruments.................................191
8.1.4.2 TheStructureofOocytes....................192
8.1.4.3 ICSIProcess.................................194
8.1.4.4 Results......................................194
8.2 Controlofa2-DOFUltrasonicPiezomotorStage
forGrommetInsertion.......................................196
8.2.1 Background..........................................197
8.2.1.1 ControlObjectives...........................199
8.2.2 SystemModeling.....................................200
8.2.2.1 ModelofSingle-AxisUSMStage.............200
8.2.2.2 Modelof2-DOFUSMStage.................201
8.2.2.3 ParameterEstimation........................203
8.2.3 ControllerDesign.....................................206
8.2.3.1 LQR-AssistedPIDControl...................206
8.2.3.2 NonlinearCompensation....................207
8.2.3.3 Controlof2-DOFUSMStage................208
8.2.4 ExperimentalResults.................................210
8.3 Vision-BasedTrackingandThermalMonitoring
ofNonstationaryTargets.....................................214
8.3.1 ComputerImagingTechnologies......................215
8.3.2 DecoupledTrackingandThermalMonitoring.........216
8.3.2.1 OverallSystemConfiguration...............217
8.3.2.2 VisionandImageProcessingSystem.........220
8.3.2.3 NoncontactTemperatureMeasurement
System......................................225
8.3.2.4 TrackingControlofLinearMotor............226
8.3.2.5 PracticalIssues..............................228
8.3.2.6 ExperimentalResults........................231
References.........................................................239
Index..................................................................243