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Microsystem Technology PDF

514 Pages·2001·34.837 MB·English
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by Wolfgang Menz, Jürgen Mohr, Oliver Paul| 2001| 514 pages| 34.837| English

About Microsystem Technology

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

Detailed Information

Author:Wolfgang Menz, Jürgen Mohr, Oliver Paul
Publication Year:2001
ISBN:9783527613014
Pages:514
Language:English
File Size:34.837
Format:PDF
Price:FREE
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