Microlens arrays

238 Pages·2001·3.14 MB·English

by  Dan Daly

MicroleAnrsr ays
Thet rentdo warmdisn iaturisianot pitoinac nsd e lectro-ohpatsli ecdts o a demand
fors ub-millismieztermdei crloe nseMsi.c rolAernrsa ydse scritbheels a rgneu mber
ofa pplicatfioormn isc rloe nsaensd t hev arieotfym anufactumreitnhgo dwsh ich
haveb eend evelopteofd u lftihle snee edsA. d etailed desicsrg iipvteoinfo t nhe
meltepdh otoremsainsutf actutreicnhgn iqiunoe r detro g ivet her eadeern ough
informattiomo ank el ensoefst heoiwrn .
Them easuremeonftt h eo pticpaelr formaonfct eh em icrloe nsperso duciesdv ital
toe nsurteh atth eayr es uitafbolrte h ei ntendaepdp licatAi corni.t ical eviasl uation
providoefdt hem easuremetnetc hniqauveasi lafbolrbe o tihn dividmuiaclr olenses
andm icrolens arraysi.n cCloundtee:n ts
'" an overvioefwa pplicatriaonngsi,nf gr omt elecommunicaatnidoo pntsi cal
computitnhgr outgohb eams haping, visuaaln ddo ipstpilcsaaeylns s ors
.. a comprehensoivveer vioefwt hem ajomra nufacturtiencgh niquuseesd t o
producteh em icrloe nsethsa ftu lfitlh esreo le-si ncluddiinrg ect machining,
thed iffusoifoi no ntso chatnhgeer efracitnidveex , meolftm iantge riaanlds
theu seo fl iqucirdy sttaolg si vvea riafbolcea lle ngmtihc rolenses
co detaiolfts h em osts uitaibnltee rferodmeestiegrun sse id na ssessmiincgr loe ns
performance
ill informatoinmo inc rloe nmsa nufacturers.
MicroleAnrsr ayiss a n essentrieafle renbcoet hf ort hosweo rkinogn the
developmefnatb,r icaatnidotn e stionfgm icro-opstyisct emasn df oru serosf
micro lens ianar rreaasysus c ahs t elecommunicasteinosnoasrn,sd d isplays.
Dan Dalys penotv ert eny earastt heN ationPahly sicLaalb oratoUrKy,, w orking
on thed evelopmeanntdm easuremeonftb othd iffracatnidvr ee fractmiivcer o­
opticcaolm ponenatnsd s ystemSsi.n c1e9 99h eh asw orkeadt L eistPerro cess
Technologies, Switzerland, devperloodpuicnbtgas s ecodon mt mheerscneie awl
technoloHgei seesr.v oenst heI nternational Standardsc oOmmrigtatnefieos ra tion
microleanrsr ayasn dh aso rganistehdel asttw oI nstitoufPt eh ysi/c Esu ropean
OpticSaolc iectoyn ferenocne tsh itso piHce. canb e contactbeyde -maialt
[email protected]
© 2000 by Taylor & Francis Group, LLC
© 2000 by Taylor & Francis Group, LLC
MicroleAnrsr ays
DanD aly

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V CRC Press
Taylor&FrancisGroup
BocRaa tonL ondonN ewY ork
CRC Preisassn i mproiftn hte
Tay&l Forra nGcriosua pni, n fobrumsai ness
© 2000 by Taylor & Francis Group, LLC
CRC Press
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Version Date: 20140421
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© 2000 by Taylor & Francis Group, LLC
Contents
Chapt1e Irn troduction 1
1.A1 B riHeifos rtoyfM icrsoelse n 1
12. Glorsyos faT erms 2
13. Outloiftn heBe o ko 4
Chapt2eA rpp licaatniFdoa nbsr icTaetcihonni ques 7
21.A pplications 7
21..V1a rioefMt iyc roAlpelpnitsci aons 7
21.2. BeamS haping 8
21.3. ArrGaeyn eration 10
21.4. OptiAcrarlIa nyt erconnection 12
21.5. CoupliinnCtgoo mponAernrta ys 16
21.6. ConecntraLtiiginhngtCt oC DA rrays 18
21.7. MesauremAepnptl ications 19
21.8. ImaFgoer mation 22
21.9. SummarMyi corfo Alpepnlsi cations 25
2.M2a nufacturing 25
2.12 V.arioefMt ayn ufacMteutrdhison g 25
2.2M.i2c roelsWe intRsher factIinvdee x Profiles 26
2.2D.r3a wCny lindMriiccraoells e ns 28
2.2M.i4c lreoensMs adbey SweDlelnfiienRdge gions 28
2.2M.i5c roelsFe onrsmbeyEd t ching 31
2.2H.o6Pt r ensgs i 32
2.2M.ec7h anFiacbarli coafLt airogMnei rc rolenses 32
2.2M.i8c roelsoe ntn hsEen do fF ibres 34
2.2M.i9c rojMeitctreoedls e ns 36
2.120P. horteosMiisctr oelse ns 37
2.121V. ariFaoblclLe ae ngMtihc roelse ns 37
2.122.S ummaorfLy e nMsa kiTnegc hniques 39
Chpate3r T hMee thoofMd a naucftuMriicnrgo lenses
byM eltPihnogt oresist 40
3.I1n troduction 40
32. BasDiecgs niE quation 42
3.C3h anogfRe es iVsotl ume 43
34. WorkiEnngv ironment 51
3.S5u bstCrlaetaen ing 51
3.P6h otsoirCseoatt ing 51
37. PhotsoirCseota tFilnagst sn e 52
3.B8e sCto atPianrga meters 53
3.S9pn iC oatCiunrgv es 61
3.1Pr0e -batkhPeih nogts oirset 63
31.1R emovtihnEegd gBeea d 64
3.1R2es Eixspto sure 66
3.1Re3s iDsetvl eopment 71
© 2000 by Taylor & Francis Group, LLC
3.41 MelttihnPegh otsoirset 72
3.1Co5n clusion 77
ChpaterI mprovetmote hnPeter sof rmanocfMe i croAlrernasy s 78
4
4.I1n troduction 78
4.I2n carsoeefF o cLaeln gUtsnhig a nI ndex MaFtlcuhiidn g 78
4.S3t eapnR de peEaxtp osure 81
4.G4r eSyac lMea sk 84
4.I5n terMsatsiktsi al 87
4.F6i eSltdo ps 90
4.R7e plication 92
4.I8o Bne aEmt ching 95
4.C9o nclusion 95
ChpaterM easuerneotmfM icrolenses 96
5
5.I1n troduction 96
5.I2n divLiendsueasl 97
52..F1o claelngth 97
52..I2m aPglea Mneeau srements 140
52..S3u rfParcoef ile 131
53. Arrays 181
54. CombinaotfAi rornasy s 132
5.C5o nclusion 128
Chpate6r I nteermroeftetroMs e asMuircer olenses 130
61.I ntroduction 103
6.T2h Fei zeIanut erferometer 132
6.T3h Tew ymaGnrne-Iennt erferometer 143
63..I1n troduction 143
6..32Z eiLsisn nIinkte errefnMcireco spceo 143
6.3D.e3id ctaeTdw ymnaG-nreIennt erferometer 135
6.T4h Mea chh-nZdeIenrt erferometer 141
64..I1n troduction 141
6.4D.e2id caMtaecdh -ZeDhesnidgenr 142
6.4P.h3a Sstee pping 145
6.4S.ou4r coefMse asur�Emrernotr 148
6.4I.n5t erfeArccoumreatceyr 145
6.4T.e6s tPirnoguc reed 158
6.O5t hIenrt erferometers 146
6.C6o nclusions 176
ChpaterO ptiPceaorlrf manocfIen divMiidcuraoll enses 186
7
71. Introduction 186
7.R2e rfactIinvdee x 186
73. SpcetrTarla nsssmiion 171
7.D4ev iatoifFoo ncl L aengFtrho m CTahlactu lated 147
7.T5h eoreMtoiedcloaf Sl p herAibcearlr ation 177
75..I1n troduction 177
© 2000 by Taylor & Francis Group, LLC
7.5C.o2n tAancgtBl eet weLeenn asn Sdu bstrate 187
7.5P.o3l ynoAmpiparlo xiomfat thMeii ocnr oPlreonfsi le 138
7..54F ourthP oOlrydnerow miitPahrl ee -tDermLiennHesed i hgt 188
7.5A.b5e rraPtrieodnibscy tt heed ForPtho lyOnrodemri al1 98
75..C6o mparoifPs roend iAcbteerdr awtiitTohhns oseM easure1d29
7.75 C.onclusions 139
7.A6b erraotfMi iocnrso luesneOsdfe- fsA xis 149
7.A7b erraotfMi iocnrsoe lswe intUshn usAupaelr tures 195
7.F8o cRaalt Liiom its 202
7.C9o nclusions 203
Chpate8r S ummary 240
8.S1u mmaornMy a nufacMtiucrrionelgse ns 204
8.S2u mmaornMy e sauremTeencth niques 270
8.F3u tuwroer k 211
83..M1a nufacture 211
8.3M.e2a surement 211
Apepnd-iMxi croSlupeplnise rs 213
Reefrences 218
Index 232

© 2000 by Taylor & Francis Group, LLC
Preface
PURPOES OF THBEO OK
Peopwlreib toeko sf omra nrye as.To hnems otivfaotmrie o nwt roi tthebi osko o n
MicroAlrernascy asm weh eInd iosvcertehdaa tl arnguem boefrp eopwleer e
phootpoycimnygP hDt ehs.iI stw asi mmdeiatcellrety ah atth ewraesa s trong
demafnodar p ractsuiorccaoelfi nformoanht oiwot nom akmei clreoen s-s what
restious sthe o,w t oc onttrhfoecol a lle negtt-cha ntdh tahte irse s nion sguolrec e
ofa ltlh ree leivnafnoatrt miIotwn a.s a lscolr et ahaptr act"ihocwa ldt ooi t"
adviwcaesr equiornte hdce h aractertihsmeai tclireoonn ts heoapsfte opwleer e
prodiun.cg hIo pteh tahtbi oso akd dsrsetehsse en ee.d s
I hfacovues oenrd e framcitcirvoe leansts h seaehr arvaaepyl psi caitniaw o indse r
ranogfea retahsa dnir fafcteilveem ednutems a,i ntloty h eliorw cehrr omatic
aberorn.asT thiem arkdeetm afnodrr e framcitcilrveoena sr raiysgs r owiantag
remarkraabtilenae la lra esw itpha rtiicnutleafrorrem s ttt heel ecommunications,
datsat oraangddei spilnadyu stries.
Thibsoo kc oncenotnrt ahtpeeh so tsoirrseetfl otwe chnbiequcusaeei ti sa
particeualsamyre lthyo dm afkoirmn igc lresoneasn dc anp ruocdev ergyo od
res.uN lott sechniisrqi ugfeho ter v earpyp licaanttdih oiinsts,r ufeot rh ree flow
methtoood,b uitdt oeasl laow wi drea nogfle e ensts ob em adoev elra ragree as
relateiavseillyy .
Thaei omf t hbioso ikfis r tsotp rovaind eo veorftv hifieee wlo dfm icroalrernasy s
witahb rideecfsr ipotfsi oomnoe ft hmea nmya nufactteucrhinnaignq adur eesa s
ofa plpitciaoSnu.ca hl icsnatn evbeere xhauasstn ievwme a naucftumreitnhgo ds
arbeen igp reensdta elmomsotn tahnlndye wa reoafus s aer been igf ouandsm ore
anmdo rpee opbleemc eoa waorfte h tee ncohlogy.
Sencdot,h beo ko cabne u seadsa r ecibpokeo f ofra rbicarteiflnoglw e enss.
Althotuhgmeha nufactpuarrianmgew tielnrles e db eto op tsiemfdiro each
partisceoutfla a prp aratiunsf,o rtmghaietv iheoennrw ei plrlo vaig doeos dt arting
poianntsd h ould allnoewwt ots hofieme eltodonp er odmuiccelr eona sr rvaeyrsy
quicIka llysh.oo pteh atohts meo reex pereidie ntn hcfeei lwdi lfiln ds omnee w
ideoarws i alvlo simode o ft hbel ianldl tehyaasrt de i ssceuds.
Haviwnogr kaetdt hNeP LI m ayb eo veremphtahsieim spionrgt oaftn hcee
measureomfem nitoc rlseensb,u t wistohmoewu aty t oc harraicsttehe e
perforomfta hnlece en psreuoscd etdh,me a nufacctuaornne lrcy l atiohm a evm ade
ana rroafby u pmsI.h a vneob te eanb lteo fiasn idln iegn strtuhmcaeatnpn tr ovide
alolft hien formraetqiuooinnrt ehde perfoofmr imcarnocelesse ,onI h s opteh at
thceh aptoenmr esa suregmievtneht re e ader iennfoourgmhta obt eiao bnlt eo
choostehc eh aracteerqiuisparmteeilnoetntv ota hnetni edres .
© 2000 by Taylor & Francis Group, LLC
MICORLENSAETST HEN ATINOALP HYSILCL AABORA TORY
My expenriceeo f microa lTlaeynwssa sg ainwehdi lwsotr kiinngt heN oveOlp tical
Components agtrt ohueNp a tionPahly sicLaalb orat(oNrPLy) ,T eddingtTohne.
NPL ist he UniKtiendg domn'ast iosntaaln dalradbso rataonrdiy sc oncernweidt h
boths ettianngd d isseminantaitnigo nsatla ndaarnddsp rovidimnega surement
sevricetsot hec onutry.
Overt hep astt hirytye artsh eg rouph asd eveleodpv aste xpieerncien the
farbicatoifos nu rafcer elioepft icsatlr uctusruecsha sd ifrfactigorna tings and
motheyaen trie-flcetiosnu rafcesI.nt he1 980st heg rouhpa da ni nteriensr te mote
dimensiomneatrlo logtyh,ai tsr ecrodintgh et hree-dimensshiaopnea slto rfu ctures
fors ubsequernetc sotnructiaonnd metrologiyn thel abora.t oIrntyegral
photgoraphoyf efreadn a ttracmteithvoed t or ealises otw hhiesnP opovice ta l.
(Poopvi1c9 88p)r oopsemde ltipnhgo toirsettso f onn smallle nsietws a sc elart hat
thep hotoreesxipsetr iewnicteht ihne g roucpo ulbdea pplietdom aket hen ecseasry
lensa lTaysI.n additiaosn t,h et echniqwuaes straiogrhwtafrdi,n expievnes,
versatainlde wacsa paboleff onning difrfactiloinm itmeidc rolensieths a,d
promisicnogm mercpiraolps etcs.
Latears,a demafnrodm userisn i ndustfroyrm easuremeonnt tsh eslee nses
developfeundd,i nwga sp rovidbeydt heD epartmeonfTt r ade aInndd usttroy
investitghaebt eset t echniqumeesa stuotr eh e microlentsode ess iaagnnndd b uild
appropriinastter uments.
The devoeplmento f measuremeinnts trumeenntaslb edt hem anufacturing
technitqoub ee i mprovetdoi ncretahseer angoef l endsi ametaenrdsf ocarla tios
(f/#p)o ssbilea,n dt oe nhancteh eq ualiatnyd c onsisteonftc hye l enses. These
improvelde nspelsa cgerde atdeerm andosn t hem easuremeeqnuti pmeanntdt hese
int umh adt ob ei mprovde.
Sinc1e9 91N PL hash ostead b i-annucaoln fereonncm ei croleanrrsa yTsh.i s
confereinsco er ganibseyd t heO pticGarlo upo ft heI nstitouft eP hysics and
includdiessc ussoinot nosp iscusc ahs m icrolens fdaerbsiicgant,mi eoans,u rement,
applicatainodsn tsa ndarIdths a.sb ene interesttosi enegh owt hec onferehnacse
changeodv etrh ey earass i tp rovidae uss euflb arometoeftr h ea dvnaceisn t he
field moifc rloe naslT aysA.t t hef irtstw oc onferentcheeps a perwse reb isaed
mainltyo warddess iagnn df arbicatoifom ni crloe nasr rayAstt. h el ascto fnerence
therwea sa movet owaradpsp licatainodsn yss temussi nmgi croelnsse.T hisi s
clearal syi gtnh atth et echlnoogiys m aturianngd i sf nidinigt psl acient he opto­
elercotnimcasr keptl caeI.n a ddititohnen, u mbeorf d eletgeahsa sa lmosdto buled
indicaats itnrgo gnrgo wtihnt hei nterients hti tsec hnloogy.
Theg rouwpo rkinogn m icro-opatti cNsP L swmaasl blu ta cihevead g readte al
duet ot hee xpertainsdee nthusioafsMm i keR utleayn dR ichaSrtd eveIn asm.
fortunatthea Ith ad tohpep rotunittowy o rkw itht hemd urintgh ee xciteianrgl y
stagoeft hinse wt ecnhology.
© 2000 by Taylor & Francis Group, LLC
Introduction
1
CHAPTERl
Introduction
1.A1 B RIEHFI STYO ORFM ICROLSEENS
Itw aso ve3r0 0y earasg ot haRto berHtoo ke( Hooke1 665)f rismte lterdo dosf
Venetigalna stsof orms mallle nessT.h eslee nsheasd s urprisignogoldiym aging
performaanncdew ereu seda sm icroscoopbej eicvtetso s tudiyns ectTsw.o
hundreyde arlsa teart,t he toufmt hicse nturGya,b riLeilp pman(nL ippmann
1908ba),p roopsead n umbeorf a pplicatfiooran rsr ayss moafll le nsiensc luding
ther eocrdinogf t hredei mensiopniaclt urbeys t akinpgh otogratphhrso ugh
lenticularI nat rhre1a 9y4s0D.se nniGsa bo(rG abor1 9411,9 49s)u ggetsetdh eu se
of arrasymsa lollfe nsaessc ompossiytset ems csaulpleerdl ewnhsiecsrh e plaitce
thea ctioofn convenltairognleae ln sbeustw itsho mea dvaangtoeusf eaturFeso.ra
morec ompletree vieowft heh istormyi corfo lepnlesaessse e eS teevns1 991.
Sincteh el at1e9 80tsh erhea sb eeann u psurogefi nteriensm ti crloensaesst he
benietfosf p hotonoivceser l cetronaircers e asleidD.e veplmoenitn t hiasr ehaa s
beenh elepdb yt hef arbicattieocnnh ologioreisg indaelvliyds feors liicowna fers
butw hichha vbee eand aptteodp rodumciec rloe nasr rayIsnt. u ma,s t heq ualiotfy
them icrloe nsheass i mprovebdec ausoef i mprovemeinntt sh em anufacturing
tecnholoigesn,e w applicathiaovnebs e enf oundI.n p arlaellwi tht hesnee w
devoeplmenttsh ea bilittomy a kel argaer raoysfv ersym allle snesh asr eknidled
interienLs itp pmanni'nst egprhaoltg oraphayn dG abors'uspe rlenses.
Thet echlnogoieuss etdo m ake milcernoas r rahyasv ev ariseidg nificbaotnhti lny
thet echniqtureisea dn di nt heq ualiotfyt hel ensperso udcedM.o stm icrlone s
manuafcturhearvsen ows etetdlf or lithogiroanep xhcihca,n ogred iamonpdoi nt
turninmge thotdosf ormt hel ensAels.la rec apabolfpe roudcinvge rgyo oqdu ality
difrfactiloinm itleedn seasl,t houogfthe n oav elri meidtr angoef d iametaenrds
focarla tiaonsd,e acthe chnihqauspe a rticaudlvaarn taagnedds i sadtvaagneOst.h er
tecnhologsiuecsah s i onb ema etchianrgeb enigu setdo c orrectt heo rigilneasnl
profilteo f orma spherliecn seasn dh encien creatsheep erofrmancoef t he
microlenses.
Then umbeorf a pplicaftoiron wsh miicchrl oe nasr raayrsen owu sehda sg rowsno
largieti sn ol ongreera litsotp irco viad ceo mprehenlsiisvTteh. e saep plications
canh,o wevebre,b roaddliyv idiendt boe ma shaping, iamnadgc ionugip nl.gT he
bema shapianpgp licatiinocnlsubd eema homogeinsinagn df a-noute lmeentsT.h e
imaginagp plicatiinocnlsu de itmraagnes faesr u sde in faxm achineasn d
photoopciearnsd i ntegprhaoltg oraphwyh erfeul lc olou3rD pictuarreefs o mred.
Couplianpgp licatiinocnlsu mdaet chilnigg hitn ttoh e coorfeo sp ticfairlbe s,
concternatilnigg hitn to atchtei vaer eaosf C CD arrayfsa,n o uti no ptical
computianngdc ollimatoiflo ing fhrotm l asdeirdo es.
© 2000 by Taylor & Francis Group, LLC