Micro-Electronic and Mechanical Systems

524 Pages·2009·39.431 MB·English

by  K. Takahata

Micro Electronic
and
Mechanical Systems

Micro Electronic
and
Mechanical Systems

Edited by
Kenichi Takahata
I-Tech
IV

Published by In-Teh

In-Teh
Olajnica 19/2, 32000 Vukovar, Croatia

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© 2009 In-teh
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First published December 2009
Printed in India

Technical Editor: Teodora Smiljanic

Micro Electronic and Mechanical Systems, Edited by Kenichi Takahata
p. cm.
ISBN 978-953-307-027-8
Preface

The miniaturization and performance improvement in semiconductor devices and
integrated circuits (ICs) are expected to continue through leveraging of nanotechnologies and
nanomaterials. This evolution should accelerate the System-on-a-Chip (SoC) trend, i.e., single-
chip integration of multifunctional, mixed-signal electronic components, toward realizing
embedded nanoelectronic systems. In parallel with advances in electronics, we are witnessing
the rise of micro-electro-mechanical systems (MEMS), with rapidly growing commercial
opportunities and markets extending to a broader range of industrial sectors on a global scale.
The emergence of MEMS is primarily attributed to the establishment of sophisticated IC
manufacturing techniques and processes that served as a foundation for realizing many
innovative silicon-based micromachining technologies. Advances in this area have brought
about a revolution in mechanical engineering, enabling the miniaturization and system-level
integration of mechanical structures and devices with ICs on a chip for MEMS fabrication.
With miniaturized sensors and actuators, MEMS provide us with the ability to interact with
micro-scale environments with non-electrical/-electronic parameters, found in the
mechanical, optical, chemical, biological, and other domains. This exceptional ability has led
to their application in fields ranging from implantable medical sensors to video game
controllers. There is no doubt that continued development of MEMS and microsystems with
electromechanical functionalities will extend their contribution to society, in parallel with
the evolution of IC technologies.
This book discusses key aspects of these technology areas, organized in twenty-seven
chapters that present the latest research developments in micro electronic and mechanical
systems. The book addresses a wide range of fundamental and practical issues related to
MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS)
devices, SoC technology, integrated circuit testing and verification, and other important topics
in the field. Several chapters cover state-of-the-art microfabrication techniques and materials as
enabling technologies for the microsystems. Reliability issues concerning both electronic and
mechanical aspects of these devices and systems are also addressed in various chapters.
This book is the result of contributions from many researchers worldwide. I would like
to thank the authors for their kind cooperation and efforts to provide their most up-to-date
research results. A special thanks goes to the IN-TECH team for their dedicated work in
making this book possible.

November 2009
Editor
Kenichi Takahata
Canada Research Chair
University of British Columbia, Vancouver,
Canada

Contents

Preface V

1. Membrane Micro Emboss (MeME) Process 001
for 3-D Membrane Microdevice
Masashi Ikeuchi and Koji Ikuta

2. A Review of Thermoelectric MEMS Devices for Micro-power 015
Generation, Heating and Cooling Applications
Chris Gould and Noel Shammas

3. Micro Power Generation from Micro Fuel Cell Combined 025
with Micro Methanol Reformer
Taegyu Kim

4. Non-contact Measurement of Thickness Uniformity of Chemically 051
Etched Si Membranes by Fiber-Optic Low-Coherence Interferometry
Zoran Djinovic, Milos Tomic, Lazo Manojlovic,
Zarko Lazic and Milce Smiljanic

5. Nanomembrane: A New MEMS/NEMS Building Block 061
Jovan Matovic and Zoran Jakšić

6. Nanomembrane-Enabled MEMS Sensors: 085
Case of Plasmonic Devices for Chemical and Biological Sensing
Zoran Jakšić and Jovan Matovic

7. Specific Serum-free Conditions can Differentiate 107
Mouse Embryonic Stem Cells into Osteochondrogenic
and Myogenic Progenitors.
Hidetoshi Sakurai, Yuta Inami, Naomi Nishio, Sachiko Ito,
Toru Yosikai, Haruhiko Suzuki and Ken-Ichi Isobe

8. Micromanipulation with Haptic Interface 113
Shahzad Khan, Hans H. Langen and Asif Sabanovic

9. Fabrication of High Aspect Ratio Microcoils 125
for Electromagnetic Actuators
Daiji Noda, Masaru Setomoto and Tadashi Hattori
VIII
10. Micro-Electro-Discharge Machining Technologies for MEMS 143
Kenichi Takahata

11. Mechanical Properties of MEMS Materials 165
Zdravko Stanimirović and Ivanka Stanimirović

12. Reliability of MEMS 177
Ivanka Stanimirović and Zdravko Stanimirović

13. Numerical Simulation of Plasma-Chemical Processing Semiconductors 185
Yurii N. Grigoryev and Aleksey G. Gorobchuk

14. Experimental Studies on Doped and Co-Doped ZnO 211
Thin Films Prepared by RF Diode Sputtering
Krasimira Shtereva, Vladimir Tvarozek, Pavel Sutta,
Jaroslav Kovac and Ivan Novotny

15. Self-Aligned π-Shaped Source/Drain Ultrathin SOI MOSFETs 235
Yi-Chuen Eng and Jyi-Tsong Lin

16. Accurate LDMOS Model Extraction using DC, CV and Small Signal 245
S Parameters Measurements for Reliability Issues
Mouna Chetibi-Riah, Mohamed Masmoudi, Hichame Maanane,
Jérôme Marcon, Karine Mourgues, Mohamed Ketata and Philippe Eudeline

17. Comparative Analysis of High Frequency Characteristics 267
of DDR and DAR IMPATT Diodes
Alexander Zemliak

18. Ohmic Contacts for High Power and High Temperature Microelectronics 293
Lilyana Kolaklieva and Roumen Kakanakov

19. Implications of Negative Bias Temperature Instability 319
in Power MOS Transistors
Danijel Danković, Ivica Manić, Snežana Djorić-Veljković, Vojkan Davidović,
Snežana Golubović and Ninoslav Stojadinović

20. Radiation Hardness of Semiconductor Programmable Memories 343
and Over-voltage Protection Components
Boris Lončar, Miloš Vujisić, Koviljka Stanković and Predrag Osmokrović

21. ANN Application to Modelling of the D/A and A/D Interface for Mixed- 369
mode Behavioural Simulation
Miona Andrejević Stošović and Vančo Litovski
IX
22. Electronic Circuits Diagnosis using Artificial Neural Networks 385
Miona Andrejević Stošović and Vančo Litovski

23. Integration Verification in System on Chips Using Formal Techniques 405
Subir K Roy

24. Test Generation based on CLP 431
Giuseppe Di Guglielmo, Franco Fummi,
Cristina Marconcini and Graziano Pravadelli

25. New Concepts of Asynchronous Circuits 455
Worst-case Delay and Yield Estimation
Miljana Milić and Vančo Litovski

26. Neuron Network Applied to Video Encoder 477
Branko Markoski, Jovan etrajčić, Jasna Mihailović, Branko Petrevski,
Miroslava Petrevski, Borislav Obradović, Zoran Milošević,
Zdravko Ivanković, Dobrivoje Martinov and Dušanka Tesanović

27. Single Photon Eigen-Problem with Complex Internal Dynamics 493
Nenad V. Delić, Jovan P. Šetrajčić, Dragoljub Lj. Mirjanić,
Zdravko Ivanković, Dobrivoje Martinov, Snežana Jokić,
Ivana Petrevska–Đukić, Dušanka Tešanović and Svetlana Pelemiš