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M icro-Cutting Editors
CHENG
HOU
Fundamentals and Applications
Editors
KAI CHENG | Brunel University, UK
DEHONG HOU | Newcastle University, UK
Micro-Cutting: Fundamentals and Applications comprehensively covers state of the art research and
engineering practice in micro/nano cutting: an area which is becoming increasingly important, especially
in modern micro-manufacturing, ultraprecision manufacturing and high value manufacturing.
This book provides basic theory, design and analysis of micro-toolings and machines, modelling
M
methods and techniques, and integrated approaches for micro-cutting. The fundamental characteristics,
modelling, simulation and optimization of micro/nano cutting processes are emphasized with particular
i
reference to the predictabilty, producibility, repeatability and productivity of manufacturing at micro and c
nano scales. r
o
The fundamentals of micro/nano cutting are applied to a variety of machining processes including
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diamond turning, micromilling, micro/nano grinding/polishing, ultraprecision machining, and the design C
and implementation of micro/nano cutting process chains and micromachining systems.
u
Key features: t
t
w Contains contributions from leading global experts
i
n
w Covers the fundamental theory of micro-cutting
g
w Presents applications in a variety of machining processes
w Includes examples of how to implement and apply micro-cutting for precision and
micro-manufacturing
Micro-Cutting
Micro-Cutting: Fundamentals and Applications is an ideal reference for manufacturing engineers,
production supervisors, tooling engineers, planning and application engineers, as well as machine tool
designers. It is also a suitable textbook for postgraduate students in the areas of micro-manufacturing,
micro-engineering and advanced manufacturing methods.
Fundamentals
Editors
KAI CHENG
and Applications
DEHONG HUO
The Wiley Microsystem and Nanotechnology Series | Ronald Pethig & Horacio Espinosa | Series Editors
MICRO-CUTTING
Microsystem and Nanotechnology Series
Series Editors – Ron Pethig and Horacio Dante Espinosa
Micro-Cutting: Fundamentals and Applications
Cheng, Huo, August 2013
Nanoimprint Technology: Nanotransfer for Thermoplastic and Photocurable Polymer
Taniguchi, Ito, Mizuno and Saito, August 2013
Nano and Cell Mechanics: Fundamentals and Frontiers
Espinosa and Bao, January 2013
Digital Holography for MEMS and Microsystem Metrology
Asundi, July 2011
Multiscale Analysis of Deformation and Failure of Materials
Fan, December 2010
Fluid Properties at Nano/Meso Scale
Dyson et al., September 2008
Introduction to Microsystem Technology
Gerlach, March 2008
AC Electrokinetics: Colloids and Nanoparticles
Morgan and Green, January 2003
Microfluidic Technology and Applications
Koch et al., November 2000
MICRO-CUTTING
FUNDAMENTALS AND APPLICATIONS
Editors
Kai Cheng
Brunel University, UK
Dehong Huo
Newcastle University, UK
This edition first published 2013
© 2013 John Wiley & Sons, Ltd
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John Wiley & Sons, Ltd, The Atrium, Southern Gate, Chichester, West Sussex, PO19 8SQ, United Kingdom.
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Library of Congress Cataloging-in-Publication Data
Micro cutting : fundamentals and applications / edited by Kai Cheng, Dehong Huo.
pages cm
Includes bibliographical references and index.
ISBN 978-0-470-97287-8 (cloth)
1. Micromachining. I. Cheng, K. (Kai), editor of compilation. II. Huo, Dehong, editor of compilation.
III. Title: Microcutting.
TJ1191.5.M4983 2013
671.3′5–dc23
2013015108
A catalogue record for this book is available from the British Library.
ISBN: 978-0-470-97287-8
Set in 10/12pt Times by SPi Publisher Services, Pondicherry, India
1 2013
Contents
List of Contributors xi
Series Preface xiii
Preface xv
PART ONE FUNDAMENTALS 1
1 Overview of Micro Cutting 3
Dehong Huo and Kai Cheng
1.1 Background and Scope 3
1.1.1 Micro Manufacturing 3
1.1.2 History and Development Process of Micro Cutting 5
1.1.3 Definition and Scope of Micro Cutting 7
1.1.4 Micro Cutting and Nanometric Cutting 8
1.2 Materials in Micro Cutting 10
1.3 Micro Cutting Processes 11
1.3.1 Micro Turning 12
1.3.2 Micro Milling 12
1.3.3 Micro Drilling 13
1.3.4 Micro Grinding 14
1.4 Micro Cutting Framework 14
References 16
2 Micro Cutting Mechanics 19
Dehong Huo and Kai Cheng
2.1 Introduction 19
2.2 Characterization of Micro Cutting 20
2.2.1 Micro Cutting and Ultra-Precision Machining 21
2.2.2 Enabling Technologies for Micro Cutting 22
vi Contents
2.3 Micro Cutting Mechanics 25
2.3.1 Size Effects 26
2.3.2 Chip Formation and Minimum Chip Thickness 27
2.3.3 Specific Cutting Energy and Micro Cutting Force
Modelling 29
2.3.4 Surface Generation and Burr Formation 33
2.4 Micro Machinability Issues and the Scientific Approaches 39
2.4.1 Vibration Assisted Micro Cutting 40
2.4.2 Laser Assisted Micro Cutting 40
2.5 Summary 41
References 42
3 Micro Tooling Design and Manufacturing 45
Paul T. Mativenga, Ampara Aramcharoen and Dehong Huo
3.1 Tool Size and Machining Scale 45
3.2 Manufacturing Methods for Solid Shank Micro Tools 46
3.3 Coatings and Coated Solid Shank Micro Tools 48
3.3.1 Closed Field Unbalanced Magnetron Sputter Ion Plating
(CFUBMSIP) 50
3.3.2 Coating Layout 50
3.4 Importance of Coated Micro Tools 52
3.5 Diamond Micro Cutting Tools 53
3.6 Micro Cutting Tool Wear 55
3.7 Smart Cutting Tools 58
References 59
4 Ultraprecision and Micro Machine Tools for Micro Cutting 63
Christian Brecher and Christian Wenzel
4.1 Introduction 63
4.2 Components of High Precision Machine Tools 64
4.2.1 Machine Base Materials 65
4.2.2 Drive Systems 66
4.2.3 Guidance Systems 69
4.2.4 Control Systems and Amplifiers 70
4.3 Diamond Turning Machines and Components 70
4.3.1 Typical Machine Setup 71
4.3.2 Market Comparison 73
4.3.3 Fast Tool Servo Technology 78
4.4 Precision Milling Machines 79
References 85
5 Engineering Materials for Micro Cutting 87
Sathyan Subbiah and Shreyes N. Melkote
5.1 Introduction 87
5.2 ‘Size’ Effects 88
5.3 Strain and Stress in Cutting 90
Contents vii
5.4 Elastic and Plastic Behaviours at the Micro-scale 94
5.5 Fracture 99
5.6 Metals, Brittle Materials and Others 105
5.6.1 Pure Materials 105
5.6.2 Ductile Metals 106
5.6.3 Brittle Materials – Glass, Silicon, Germanium, Tungsten
Carbide 107
5.6.4 Other Materials – Amorphous Alloys, Graphene and
Embedded Polymers 108
5.7 Summary 111
References 112
6 Modelling and Simulation of Micro Cutting 115
Ying-Chun Liang, Qing-Shun Bai and Jia-Xuan Chen
6.1 FE modelling and Analysis 116
6.1.1 Finite Element Model 116
6.1.2 Simulation on Micro-burr Formation 117
6.1.3 Influence of the Tool Edge Radius on Cutting Forces 118
6.1.4 Stress Distribution on the Micro-cutter 120
6.1.5 Micro-tool-tip Breakage 120
6.1.6 Thermal Analysis on Micro Cutting 123
6.2 Molecular Dynamics (MD) Modelling and Analysis 124
6.2.1 MD Modelling Process and Simulation 124
6.2.2 Modelling Analysis of Micro Cutting 127
6.2.3 Scratching Simulation by Using MD 128
6.2.4 Friction and Wear Simulation by Using MD 132
6.2.5 Effect of the Crystal Plane of Single Crystal and
Multicrystalline 135
6.2.6 Improvement of the MD Simulation Capability 137
6.3 Multiscale Modelling and Analysis 138
6.3.1 Advance in Multiscale Simulation Methods 140
6.3.2 Applications of Multiscale Simulation in Micro Cutting
Processes 143
6.3.3 Research Challenges and Future Trends 147
6.4 Summary 148
References 148
PART TwO APPLICATIONS 153
7 Diamond Turning and Micro Turning 155
Dehong Huo and Kai Cheng
7.1 Introduction 155
7.2 Ultra-precision Diamond Turning 155
7.2.1 A Historical Perspective of Diamond Turning 156
7.2.2 Material Perspectives 158
7.2.3 Micro Structuring by Diamond Turning 159
viii Contents
7.3 Micro Turning 166
7.3.1 Micro Turning Tool Fabrication 166
7.3.2 Micro Machines for Micro Turning 171
7.3.3 Size Effect Arising from Micro Turning 178
7.4 Challenges Arising from Micro Turning 182
References 182
8 Micro Milling: The State-of-the-art Approach Towards
Applications 185
Tao Wu and Kai Cheng
8.1 Introduction 185
8.2 Fundamental Elements in Micro Milling 186
8.2.1 Micro Milling Machines 187
8.2.2 Cutting Tools 189
8.2.3 Process Conditions 195
8.2.4 Work Materials 197
8.3 Micro Milling Mechanics 198
8.3.1 Size Effect in Micro-Scale Cutting 198
8.3.2 Minimum Chip Thickness 200
8.3.3 Work Micro Structure Effect 203
8.4 Modelling of the Micro Milling Process 205
8.4.1 Finite Element Modelling 206
8.4.2 Mechanistic Modelling 208
8.5 Metrology and Instrumentation 212
8.5.1 3D Surface Profilers 212
8.5.2 Microscopes 212
8.5.3 Process Monitoring Sensors and Systems 214
8.6 Scientific and Technological Challenges 217
8.6.1 Tool Run-out 217
8.6.2 Tool Wear and Life 218
8.6.3 Micro-Burr Formation 218
8.6.4 Process Conditions Optimization 219
8.7 Application Perspectives 220
8.8 Concluding Remarks 220
References 221
9 Micro Drilling Applications 227
M. J. Jackson, T. Novakov and K. Mosiman
9.1 Chapter Overview 227
9.2 Investigation of Chatter in Mesoscale Drilling 227
9.2.1 Torsional-axial Model 231
9.2.2 Bending Model 239
9.2.3 Combination of the Bending and Torsional-axial Models 242
9.2.4 Chatter Suppression 251
9.2.5 Research Challenges 256
9.3 Investigation of Chatter in Micro Drilling 257
