Micro- and Nano-Scale Sensors and Transducers

183 Pages·2015·4.631 MB·English

by  Ezzat G. Bakhoum

Micro- and
Nano-Scale Sensors
and Transducers
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Micro- and
Nano-Scale Sensors
and Transducers
Ezzat G. Bakhoum
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Contents
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ix
1 PressureSensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1 CapacitivePressureSensors . . . . . . . . . . . . . . . . . . . . . 1
1.1.1 Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1.2 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1.3 ExperimentalResults . . . . . . . . . . . . . . . . . . . . . 10
1.2 InductivePressureSensors . . . . . . . . . . . . . . . . . . . . . . 16
1.2.1 Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.2.2 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
1.2.3 ExperimentalResults . . . . . . . . . . . . . . . . . . . . . 23
1.2.4 SensorInterfaceCircuit . . . . . . . . . . . . . . . . . . . 27
1.3 UltrahighSensitivityPressureSensors . . . . . . . . . . . . . . . . 28
1.3.1 Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
1.3.2 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
1.3.3 ExperimentalResults . . . . . . . . . . . . . . . . . . . . . 33
1.3.4 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . 40
1.4 Quiz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
2 MotionandAccelerationSensors . . . . . . . . . . . . . . . . . . . . . 45
2.1 UltrahighSensitivity,WideDynamicRangeSensors . . . . . . . . 45
2.1.1 Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
2.1.2 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
2.1.3 ExperimentalResults . . . . . . . . . . . . . . . . . . . . . 52
2.1.4 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . 56
2.2 OtherMotionandAccelerationMicrosensors . . . . . . . . . . . . 57
v
vi (cid:4) Contents
2.3 Quiz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
3 GasandSmokeSensors . . . . . . . . . . . . . . . . . . . . . . . . . . 61
3.1 ACOGasSensorBasedonNanotechnology . . . . . . . . . . . . 61
3.1.1 Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
3.1.2 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
3.1.3 AssemblyoftheSensor . . . . . . . . . . . . . . . . . . . 64
3.1.4 ExperimentalResults . . . . . . . . . . . . . . . . . . . . . 66
3.1.5 AuxiliaryExperimentalResults . . . . . . . . . . . . . . . 69
3.1.6 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . 70
3.2 SmokeDetectors . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
3.2.1 Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
3.2.2 QualitativeDescriptionoftheDetector . . . . . . . . . . . 73
3.2.3 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
3.2.4 ExperimentalResults . . . . . . . . . . . . . . . . . . . . . 78
3.2.5 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . 80
3.3 Quiz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
4 MoistureSensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
4.1 Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
4.2 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
4.3 MainExperimentalResults . . . . . . . . . . . . . . . . . . . . . . 91
4.4 AuxiliaryExperimentalResults . . . . . . . . . . . . . . . . . . . 97
4.5 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
4.6 Quiz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
5 OptoelectronicandPhotonicSensors. . . . . . . . . . . . . . . . . . . 105
5.1 OptoelectronicMicrophone . . . . . . . . . . . . . . . . . . . . . 105
5.1.1 IntroductionandPrincipleofOperation . . . . . . . . . . . 105
5.1.2 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
5.1.3 Description of the Image Acquisition/Pattern Recognition
HardwareandSoftware. . . . . . . . . . . . . . . . . . . . 112
5.1.4 ExperimentalResults . . . . . . . . . . . . . . . . . . . . . 116
5.1.5 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . 120
5.2 OtherOptoelectronicandPhotonicMicroSensors . . . . . . . . . 121
5.3 Quiz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122
Contents (cid:4) vii
6 Biological,Chemical,and“LabonaChip”Sensors . . . . . . . . . . 125
6.1 “LabonaChip”Sensors . . . . . . . . . . . . . . . . . . . . . . . 125
6.2 OtherBiochemicalMicro-andNano-Sensors . . . . . . . . . . . . 128
6.3 Quiz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130
7 Electric,Magnetic,andRF/MicrowaveSensors . . . . . . . . . . . . . 131
7.1 MagneticFieldSensors . . . . . . . . . . . . . . . . . . . . . . . . 131
7.1.1 IntroductionandPrincipleofOperation . . . . . . . . . . . 131
7.1.2 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
7.1.3 ManufacturingandAssemblyofthePrototypeSensor . . . 140
7.1.4 NumericalDataandExperimentalResults . . . . . . . . . . 141
7.1.5 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . 146
7.2 OtherImportantElectromagnetic/RFMicro-andNano-Sensors . . 147
7.3 Quiz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
8 IntegratedSensor/ActuatorUnitsandSpecialPurposeSensors . . . . 151
8.1 AircraftIcingDetectors . . . . . . . . . . . . . . . . . . . . . . . 151
8.1.1 IntroductionandPrincipleofOperation . . . . . . . . . . . 152
8.1.2 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . 156
8.1.3 PerformanceDataandExperimentalResults . . . . . . . . 159
8.1.4 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . 164
8.2 Microfluidic,Microactuators,andOtherSpecialPurpose
Small-ScaleDevices . . . . . . . . . . . . . . . . . . . . . . . . . 165
8.3 Quiz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 169
TThhiiss ppaaggee iinntteennttiioonnaallllyy lleefftt bbllaannkk
Preface
Thepastdecadehaswitnessedsubstantialadvancesinsensortechnology.Theemerg-
ing new field of nanotechnologyand nanofabricationhas allowed the creation of a
new arrayofsensorsand transducerswith remarkableproperties.Pressuresensors,
gassensors,opticalsensors,biologicalsensors,etc.,haveallseendramaticimprove-
ments in characteristics such as sensitivity and dynamic range, in addition to sub-
stantialminiaturization.Thisbookpresentsasummaryofthestateoftheartofsen-
sor and transducer technologyas of 2014. Althougha very large numberof books
onnanotechnologyingeneralcurrentlyexistinthemarketplace,recentadvancesin
micro-andnano-scalesensorsandtransducersarenotadequatelyrepresentedinthe
literature.Thisbookattemptstofillthatgap.Theintendedaudienceforthisbookis
practicing industry engineers, corporate and governmentresearchers, and graduate
studentsinelectricalengineering,mechanicalengineering,andphysics.
Themaintopicscoveredinthebookarethefollowing:
(cid:4) PressureSensors(Chapter1):Thefirstchapterpresentsthenovelnewstruc-
turesofpressuresensors,usedextensivelyinsuchapplicationsasmechani-
calpressuresensing,gaspressuresensing,atmosphericpressuresensing,etc.
Pressure sensorsthatarebased oncapacitancevariation,in particular,have
benefitedfromthe recentadvancesin nanotechnologyand nanofabrication,
andthistypeofpressuresensoriscoveredextensively.
(cid:4) MotionandAccelerationSensors(Chapter2):Motionandaccelerationsen-
sors are used in manyapplications, fromautomobileair bags to projectiles
to smart tablets and cell phones. This category of sensors has also bene-
fitedgreatlyfromthenanotechnology/nanofabricationrevolution.Thenovel
structuresofthenewmotionandaccelerationsensorsthatappearedrecently
in archival publications along with their amazing characteristics are pre-
sentedinChapter2.
(cid:4) GasandSmokeSensors(Chapter3):Highlysensitiveandminiaturegasand
ix