Micro and Nano Fabrication Technology

956 Pages·2018·59.176 MB·English

by  Jiwang Yan

Micro/Nano Technologies
Series Editors: Zheng You · Xiaohao Wang
Jiwang Yan Editor
Micro and Nano
Fabrication
Technology
Micro/Nano Technologies
SeriesEditors
ZhengYou
DepartmentofPrecisionInstrument
TsinghuaUniversity
Beijing,China
XiaohaoWang
DepartmentofPrecisionInstrument
TsinghuaUniversity
Beijing,China
Theseriesconsistsoffivevolumes:Microandnanofabricationtechnology,MEMS,
Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in
IT. Experienced researchers and experts are invited to contribute in each of these
areas.TheseriesispublishedunderSpringerMajorReferenceworks,whichallows
continuous online update and publication. These features allow newcomers and
other readers to keep in touch with the most up-to-date information in micro-/
nanotechnologies.Itpresentsanoverviewoftheknowledgebase,aswellasselected
topics and provides comprehensive and authoritative information on the field for
researchers,engineers,scientistsandgraduatestudentswhoareinvolvedindifferent
aspects of micro-/nanotechnologies. This publication will provide inspiration for
innovativeresearchandapplicationideasforcontinuedgrowthofthefield.Micro-/
nanotechnologies are techniques to fabricate and build systems with dimensions
ranging from nanometers to microns. Advances in these technologies have created
manyinterdisciplinaryresearchopportunitiesandhavebeenappliedinvariousareas
from nanomedicine to space systems. After several decades of development, a
knowledgebaseofmicro-/nanotechnologiescoveringallareasofresearchhasnow
been created. It includes design and simulation, fabrication and manufacturing,
packagingandassembly,deviceandsystemtechnologies,andapplicationindiffer-
entareas.
Moreinformationaboutthisseriesathttp://www.springer.com/series/13903
Jiwang Yan
Editor
Micro and Nano
Fabrication Technology
With817Figuresand72Tables
Editor
JiwangYan
DepartmentofMechanicalEngineering
KeioUniversity
Yokohama,Japan
ISBN978-981-13-0097-4 ISBN978-981-13-0098-1(eBook)
ISBN978-981-13-0099-8(printandelectronicbundle)
https://doi.org/10.1007/978-981-13-0098-1
LibraryofCongressControlNumber:2018942026
#SpringerNatureSingaporePteLtd.2018
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Series Preface
Micro/nanotechnologiesarethosetechniquestofabricateandbuildsystemswith
dimensionsrangingfromnanometertomicron.Theadvancementofthesetechnol-
ogieshasbeencreatingmanyinterdisciplinaryresearchopportunitiesandhasbeen
applied in various areas from nano-medicine to space systems. After several
decades of development, a knowledge base of micro/nano technologies forms. It
comesfromeveryachievementofresearchandconsistsofdesignandsimulation,
fabrication and manufacturing, packaging and assembly, device and system tech-
nologies,andapplicationindifferentareas.
Mainstructureoftheknowledgebaseandselectedtopicsareshowninthisseries
of books. This work providesa comprehensive andauthoritative knowledge ofthe
fieldforresearchers,engineers,scientists,andgraduatestudentswhoareengagedin
different aspects of micro/nano technologies. The series consists of five books,
which are Micro and nano fabrication, MEMS, Nanomaterial, Nanomedicine, and
Applications of Micro/nano technologies in IT/IoT. In the books, the latest
researchesof micro-nano technology aresummarized andthe history androadmap
of related techniques, devices, and applications are discussed. The authors invited
comefromChina,Japan,USA,Germany,GreatBritain,Austria,etc.Theirresearch
activities in this area are remarkable and prospective. The readership is not merely
specialistsinthisfieldbutalsoabroadrangeofstudentsandresearchersfromother
relateddisciplines.
The Chinese Society of Micro/Nano Technology (CSMNT) has organized
the Micro/Nano Technologies series in cooperation with Springer. This
series would be the first systematic series of books in Micro/Nano Technologies
and provides a comprehensive and authoritative knowledge system. The series is
published under Springer Major Reference, which allows continuous online
update and publication. These features allow the new comers and other content
users to keep in touch with the most updated information in micro/nano
v
vi SeriesPreface
technologies. It is expected that this publication will provide a new window to
sparkleinnovativeresearchandapplicationideasforthecontinuousgrowthofthe
field.
December,2017 ZhengYou
TsinghuaUniversity,Beijing,China
PresidentoftheChineseSocietyof
Micro/NanoTechnology
TsinghuaUniversity,Beijing,China XiaohaoWang
Secretary-generaloftheChineseSocietyof
Micro/NanoTechnology
Volume Preface
Smaller is better. Small things can save space, reduce weight and material/energy
consumption, and improve portability and ease of system integration. For a long
time, researchers and engineers have been attempting to make things as small as
possible.Today,newfabricationtechnologieshavealreadyenabledthegenerationof
2Dand3Dstructuresanddevicesonthemicrometer,submicrometer,andevendown
tonanometerranges.Thisrepresentsatriumphformodernscienceandtechnology.
Despite various revolutionary changes in the past decades that significantly
advanced micro/nanofabrication technology, we still face new problems and new
taskstocreatenewproductswithhigherprecisionandquality.Thus,understanding
thefundamentalsandmasteringthestatusofmicro/nanofabricationtechnologyhas
become crucial for engineers and researchers working in this area. This volume
focusesonthestate-of-the-artmicroandnanofabricationtechnologiesfor creating
miniature structures with high precision. These multidisciplinary technologies
include mechanical, electrical, optical, physical, and chemical methods, as well as
hybridprocesses,coveringsubtractiveandadditivematerialmanufacturing,aswell
as net-shape manufacturing. The materials the volume deals with include metals,
alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nano-
materials.Thetargetedproductsincludemicro/nanomachines,sensors,optics,elec-
tromechanicalsystems,fluidics,biomedicalparts,andenergystoragedevices.
Thevolumeiscomposedof30chapters,whicharegroupedintofiveparts.Part1
isfocused on cutting technology, which isthemost popular method forgenerating
micro/nanostructuresonmetalmaterials.Thetopicsincludemicrochiseling,micro-
milling, microturning, nanogrooving, elliptical vibration-assisted cutting, roller
machining, and tool servo-driven diamond turning. Part 2 presents abrasive/tip-
basedmachiningtechnologies,suchasultrasonicvibration-assistedgrinding,micro-
structuregrinding,micro-fluid-jetpolishing,bonnetpolishing,chemicalmechanical
polishing, and scanning probe lithography. Part 3 deals with high-energy-beam
machining technologies, such as femtosecond laser direct writing, laser patterning,
ionbeammachining,electronbeammachining,andlaserlithographycombinedwith
ionetching.Part4coversmolding,forming,andself-organizationtechnologies.The
chapters in this part describe microinjection molding, nanoimprinting, press mold-
ing,anisotropicgelation,metalfilmdewetting/patterning,andself-assemblyoffine
particles. The subject of Part 5 is physical and chemical machining, where
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viii VolumePreface
microelectrical discharge machining, microelectrochemical machining, tip-based
localized catalytic etching, photocatalytic reaction, deep reactive ion etching, and
localwettabilitymodificationbylaserirradiationarepresented.
The chapters in this volume were mostly contributed by authors from the Asia-
Pacific region, which is a rapidly growing region with research activities that are
attracting attention in the area of micro/nanofabrication. Engaging with the latest
research in the field, these chapters provide important perspectives on key topics,
from process developments at the shop level to scientific investigations at the
academiclevel,offeringbothexperimentalworkandtheoreticalanalysis.Moreover,
thecontentofthisvolumeishighlyinterdisciplinaryinnature,withinsightsfromnot
only manufacturing technology but also mechanical/material science, optics, phys-
ics,chemistry,andmore.Ihopethisvolumecandeliveratimelyintegrationofthe
latestachievementsandadvancesinthisarea.Itisintendedtoserveasa“toolbox”
formanufacturingengineers,enablingthemtoidentifysuitable“tools”easilyforthe
cost-effectiveproductionofdifferenttypesofproducts.Furthermore,itisexpected
to stimulate more research interest in this area and help orient young researchers,
particularly graduate students, to new research directions in future. Finally, as the
volume’seditor,Iwouldliketothankallthechapterauthorsforthetimeandenergy
theyspentinpreparingandrevisingtheirmanuscripts.Itistheirgenerousdedication
thatmadetheon-schedulepublicationofthevolumepossible.
Yokohama,Japan JiwangYan
Contents
PartI CuttingTechnology ................................. 1
1 MicroChiselingofRetroreflectiveArrays ................... 3
LarsSchönemannandEkkardBrinksmeier
2 MicroMillingforFunctionalSurface ....................... 33
TakashiMatsumura
3 MicroCylindricalTurningofCalciumFluoride .............. 67
YasuhiroKakinumaandYutaMizumoto
4 Nano-groovingbyUsingMulti-tipDiamondTools ............. 97
XichunLuoandZhenTong
5 EllipticalVibrationCuttingforDifficult-to-CutMaterials ....... 139
HongjinJung,TakehiroHayasaka,andEijiShamoto
6 MicromachiningofRollerMoldforRoll-to-Roll
Manufacturing ........................................ 183
RuiHuang,XinQuanZhang,andKuiLiu
7 Tool-ServoDrivenDiamondTurningforStructuredSurface .... 215
MaoMukaidaandJiwangYan
PartII Abrasive/Tip-BasedMachiningTechnology ............. 245
8 Micro-/Nano-texturingbyUltrasonic-AssistedGrinding ........ 247
MasayoshiMizutani,ShaolinXu,KeitaShimada,and
TsunemotoKuriyagawa
9 PrecisionGrindingforFunctionalMicrostructuredSurface ..... 301
JinXie
10 MicroFluidJetPolishing ................................ 333
AnthonyT.Beaucamp
11 BonnetPolishingofMicrostructuredSurface ................. 371
LingbaoKong,ZhongchenCao,andLaitingHo
ix