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About MEMS Overview
This document provides an overview of an introduction to MEMS design course taught at UC Berkeley in Fall 2003. The course covered microfabrication fundamentals, forces and mechanics in MEMS, microfabrication processes, electronic interfaces, and MEMS design case studies. It utilized a textbook on microsystem design and a course reader. The goals of the course were to make it accessible to a broad audience with minimal prerequisites while emphasizing design and exposure to analytical techniques. The lecture outlined in the document defined MEMS, discussed the historical development of the field enabled by planar IC technology and batch fabrication processes, and noted related courses at Berkeley.
Detailed Information
| Author: | ['Magesh Mani'] |
|---|---|
| Publication Year: | 2016 |
| Pages: | 19 |
| Language: | English |
| Format: | |
| Price: | FREE |
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