Table Of ContentMechanics and Physics of Precise Vacuum Mechanisms
FLUID MECHANICS AND ITS APPLICATIONS
Volume 91
Series Editor: R. MOREAU
MADYLAM
Ecole Nationale Supérieure d’Hydraulique de Grenoble
Boîte Postale 95
38402 Saint Martin d’Hères Cedex, France
Aims and Scope of the Series
The purpose of this series is to focus on subjects in which fluid mechanics plays a
fundamental role.
As well as the more traditional applications of aeronautics, hydraulics, heat and
mass transfer etc., books will be published dealing with topics which are currently
in a state of rapid development, such as turbulence, suspensions and multiphase
fluids, super and hypersonic flows and numerical modeling techniques.
It is a widely held view that it is the interdisciplinary subjects that will receive
intense scientific attention, bringing them to the forefront of technological advance-
ment. Fluids have the ability to transport matter and its properties as well as to
transmit force, therefore fluid mechanics is a subject that is particularly open to
cross fertilization with other sciences and disciplines of engineering. The subject of
fluid mechanics will be highly relevant in domains such as chemical, metallurgical,
biological and ecological engineering. This series is particularly open to such new
multidisciplinary domains.
The median level of presentation is the first year graduate student. Some texts are
monographs defining the current state of a field; others are accessible to final year
undergraduates; but essentially the emphasis is on readability and clarity.
For other titles published in this series, go to
www.springer.com/series/5980
E.A. Deulin • V.P. Mikhailov • Yu.V. Panfilov
R.A. Nevshupa
Mechanics and Physics of
Precise Vacuum Mechanisms
E.A. Deulin V.P. Mikhailov
Bauman Moscow State Technical University Bauman Moscow State Technical University
2nd Baumanskaya 5 2nd Baumanskaya 5
Moskva 107005 Moskva 107005
Russia Russia
Contents
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ix
About the Authors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . xi
1 Using Precise Mechanisms in Modern Vacuum Technological
Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2 Typical Vacuum Mechanisms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.1 Functions of Vacuum Mechanisms . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.2 Rotary-Motion Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.3 Linear-Motion Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
2.4 Manipulators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
2.5 Micro Mechanisms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
3 Friction in Vacuum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
3.1 Friction Coefficients of Different Materials in Atmosphere and in
Vacuum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
3.2 Dry Friction Laws in Atmosphere and in Vacuum . . . . . . . . . . . . . . . . 33
3.3 The Main Factors, which Determine the Surface Coverage at
“Dry” Friction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
3.3.1 Influence of the Residual Pressure and Temperature . . . . . . . 36
3.3.2 Influence of the Sliding Velocity and Roughness Geometry . 37
3.4 The Theoretical Analysis of Friction in the Different Ranges of
Coverage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
3.4.1 Viscous Component of a Friction Force . . . . . . . . . . . . . . . . . . 40
3.4.2 Capillary Component of a Friction Force . . . . . . . . . . . . . . . . 41
3.4.3 Adhesive-Viscous Friction . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
3.4.4 Adhesive Friction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
3.4.5 Cohesion Friction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
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3.5 The Possibility to Use the Described Method for the Calculation
of the Friction Coefficient of Real Surfaces . . . . . . . . . . . . . . . . . . . . . 51
3.6 Exchange of Gases at Friction in Vacuum . . . . . . . . . . . . . . . . . . . . . . 55
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
4 Matrix Method of the Design of New Mechanisms Structure . . . . . . . . 69
4.1 The Stages of the Matrix Method of the Mechanisms Generation . . . 70
4.2 The List of the Parameters of Vacuum Mechanisms Which Are
Used in Matrix Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
4.2.1 The First (Highest) Level Parameters . . . . . . . . . . . . . . . . . . . . 77
4.2.2 The Second Level Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . 79
4.2.3 The Third Level Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
4.2.4 The Fourth Level Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . 81
4.3 Algorithm of the Matrix Method of the Generation of New
Mechanisms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
5 Precision of Vacuum Mechanisms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
5.1 The Constituents of Errors of Vacuum Mechanisms . . . . . . . . . . . . . . 87
5.2 The Basic Positions of the Precision Theory of Vacuum Mechanisms 93
5.2.1 Open-Loop-Controlled Drive . . . . . . . . . . . . . . . . . . . . . . . . . . 93
5.2.2 Completely Loop-Controlled Drive . . . . . . . . . . . . . . . . . . . . . 96
5.3 Determination of the Error Components of Different Origins . . . . . . 98
5.3.1 Calculation of the Kinematic Component of the Error . . . . . . 98
5.3.2 Calculation of the Error from Elastic Deformations . . . . . . . . 113
5.3.3 Calculation of the Error Caused by the Deformation of the
Thin-Wall Sealing Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
5.3.4 Calculation of the Positioning Error Caused by the
Resistance Forces at Movement . . . . . . . . . . . . . . . . . . . . . . . . 120
5.4 Summarizing the Components of different Types and Forms . . . . . . 129
5.5 Correlation of Total Error of the Mechanisms with Economic
Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 134
6 Vacuum Mechanisms of Nanoscale Precision . . . . . . . . . . . . . . . . . . . . . . 137
6.1 The Principles of Nanometer Precision of Vacuum Mechanisms . . . 138
6.2 Physical Effects Which Are Used for Vacuum Mechanisms of
Nanometer Precision Creation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 146
6.2.1 Piezo Effect . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 146
6.2.2 Magnetic and Electric Rheology Effects . . . . . . . . . . . . . . . . . 148
6.3 Vacuum Drives and Manipulators of Nanoscale Precision . . . . . . . . . 152
6.3.1 Vacuum Piezo Drives . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153
6.3.2 Multi-Coordinate Magnetic and Rheology Drives and
Manipulators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 157
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166
Mechanics and Physics of Precise Vacuum Mechanisms vii
7 Ultrahigh Vacuum Rotary-Motion Feedthroughs . . . . . . . . . . . . . . . . . . 167
7.1 Analysis of Design Variants of Thin-Wall Sealing Elements on
Parameter “Manufacturability” . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 167
7.2 Precision of Harmonic Gear Rotary Feedthroughs . . . . . . . . . . . . . . . 171
7.3 Longevity of Harmonic Gear Rotary Feedthrough . . . . . . . . . . . . . . . 172
7.4 Outgassing Flow of Harmonic Rotary-Motion Feedthrough . . . . . . . 173
7.5 Calculation of Hermetic Harmonic Gear Feedthrough . . . . . . . . . . . . 177
7.5.1 Determination of the Number of Teeth . . . . . . . . . . . . . . . . . . 177
7.5.2 Calculation of Main Sizes of Flexible Gears . . . . . . . . . . . . . . 178
7.5.3 Calculation of Control Rollers Size of Rigid Gear . . . . . . . . . 179
7.5.4 Calculation of Flexible Gear Geometry, Calculation of
Geometry Sizes which Ensure Hermetic Properties of
Flexible Gear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180
7.5.5 Calculation of Assurance Factor of Flexible Gear Teeth . . . . 183
7.5.6 Calculation of Flexible Gear Wave Generator . . . . . . . . . . . . . 183
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 184
8 Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs . . . . . . . 185
8.1 The Hermetic Drive Designs Principles Based on Non-Coaxial
Nut-Screw Couples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 187
8.2 Geometry of Nut-Screw Coupling of Linear-Motion Hermetic
Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 191
8.3 Kinematic Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195
8.4 Force Calculation of Hermetic Feedthroughs Based on
Non-Coaxial Nut-Screw Mechanisms . . . . . . . . . . . . . . . . . . . . . . . . . . 198
8.5 System Losses and Efficiency Factor of Hermetic Feedthroughs
Based on Non-Coaxial Nut-Screw Mechanisms . . . . . . . . . . . . . . . . . 200
8.6 Analysis of Loading Ability of Planetary Nut-Screw Feedthroughs . 203
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206
9 Vacuum Frictionless Mechanisms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 209
10 Flow of Microparticles Originating from Mechanisms in Vacuum . . . . 225
10.1 Theory of a Flow of Microparticles Originating from Mechanisms
in Vacuum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225
10.2 The Design of the Equipment Which Generates a Minimal
Number of Microparticles by the Mechanisms in Vacuum . . . . . . . . . 230
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234
Preface
The idea for this book was born between 1980–1985 when electronics, vacuum
technology and mechanical engineering in the former USSR developed into worthy
competitors in the global engineering industry and in the international scientific
world. After the transition took place in Russia in the 1990s and to the moment of
Russia’s new industry establishing, many scientific results, many talented engineers
were lost to the world science.
The authors of this book collected and accumulated the most interesting results
in the field of engineering and science of the former USSR. Up till now these re-
sults are still at the highest scientific and engineering level in the world. These re-
sults can be interesting to scientists and engineers in the field of vacuum science
and engineering, microelectronics technology, nanotechnologies, fusion experimen-
tal physics and other.
The main topics presented in this work are:
• the regulation and determination method of micro-particle flows generated by
vacuum mechanisms in vacuum equipment and in electronics;
• the precise mechanisms of nanoscale precision based on magnetic and electric
rheology phenomena;
• precise harmonic rotating UHV feedthroughs and non-coaxial nut-screw linear-
motion vacuum feedthroughs, at unique technical characteristics;
• elastically deformed vacuum multi-coordinate motion feedthroughs without fric-
tion couples in vacuum;
• the computer system for failure prediction of vacuum mechanisms.
Chapters 1 and 2 show the typical vacuum equipment. They also show different
types of precise vacuum drives. Chapter 3 considers the physical nature of different
phenomena occurring during surface friction in vacuum. Chapter 4 shows a matrix
system for the classification of vacuum drives and considers the system for estima-
tion of driver parameters. Furthermore, it deals with the new principle of drive inven-
tion of a new type, which has to meet a number of complex technical requirements.
ix
x Preface
The original matrix method of mechanism analysis presented here allows us to de-
termine the potential properties of the mechanisms on the design stage, to choose
the mechanisms with required properties and to generate new mechanisms with the
best properties. Chapter 5 considers the theory of vacuum mechanism precision. It
also shows the analysis of the ways in which precision of vacuum mechanisms can
be increased. Chapters 6 to 10 show the application of the above-mentioned top-
ics to development of precise vacuum mechanisms with enhanced characteristics.
Chapter 6 considers new types of nanoscale precision vacuum mechanisms based
on magnetic and electric rheology phenomena. This chapter describes new mech-
anisms of nanoscale precision invented and developed in Russia using the matrix
method presented in Chapter 4. Chapter 7 describes new designs of UHV harmonic
rotary-motion mechanisms (this type was invented in the USA) with the best para-
meters in the world (highest longevity, smallest weight, small outgassing rate, high
precision). Chapter 8 describes the set of new types of non-coaxial nut-screw UHV
mechanisms invented in the USSR and the method of design of these mechanisms.
Chapter 9 shows new types of elastically deformed multi-coordinate mechanisms
without friction pairs in vacuum. These mechanisms also were invented in the USSR
and have no analogues in the world. Chapter 10 shows methods of estimation and
control of microparticle flows generated by vacuum mechanisms.
Before publication, the contents of this book were examined and commented
by Professor G.L. Saksaganski (St.-Petersburg, Russia), Professor J.L. de Segovia
(Madrid, Spain), Professor T. Sawada (Akita, Japan), Professor K. Nakayama
ˇ
(Tsukuba, Japan), Professor P. Repa (Praque, Czech Republic), Professor Franek
(Vienna, Austria), Dr. M. Sherge (Ilmenay, Germany), and Professor M.J. Furey
(USA).
The authors wish to thank all those persons who sent them their high esteem on
this work.
With good wishes,
The Authors
About the Authors
Evgueni A. Deulin
Professor Deulin E.A (right) discusses the idea of a new experiment with Professor
J.L de Segovia (left).
Evgueni A. Deulin was born in Moscow in 1938. He earned his BSc (engineering)
degree at Bauman Moscow State Technical University (BMSTU) in 1962. He earned
his first doctoral degree (PhD) with a thesis on the topic of Ultra High Vacuum
(UHV) Mechanism Optimal Design in 1977. He earned his second doctoral degree
(Dr.Sci) with a treatise on the Theory of UHV Mechanisms Creation in 1987. From
1988 he worked as a professor of Mechanical Engineering Department of BMSTU
and lead the student Vacuum Technology Research Group. Twenty-two of his pupils
earned a PhD degree during this period.
From 1964–1989 E.A. Deulin researched all main types of UHV mechanisms
and designed 54 types of standard (USSR) mechanical vacuum feedthroughs,
including precise UHV harmonic rotary feedthrough, long travel UHV linear
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