Table Of ContentMaterials Modification by High-fluence Ion Beams
NATO ASI Series
Advanced Science Institutes Series
A Series presenting the results of activities sponsored by the NA TO Science Committee,
which aims at the dissemination of advanced scientific and technological knowledge,
with a view to strengthening links between scientific communities.
The Series is published by an international board of publishers in conjunction with
the NATO Scientific Affairs Division
A Life Sciences Plenum Publishing Corporation
B Physics London and New York
C Mathematical Kluwer ACademic Publishers
and Physical Sciences Dordrecht, Boston and London
D Behavioural and Social Sciences
E Applied Sciences
F Computer and Systems Sciences Springer-Verlag
G Ecological Sciences Berlin, Heidelberg, New York, London,
H Cell Biology Paris and Tokyo
Series E: Applied Sciences - Vol. 155
Materials Modification
by High-fluence Ion Beams
edited by
Roger Kelly
IBM T. J. Watson Research Center,
Yorktown Heights, NY, U.S.A.
and
M. Fernanda da Silva
Laborat6rio Nacional de Engenharia
e Tecnologia Industrial, Sacavem, Portugal
Kluwer Academic Publishers
Dordrecht / Boston / London
Published in cooperation with NATO Scientific Affairs Division
Proceedings of the NATO Advanced Study Institute on
Materials Modification by High-fluence Ion Beams
Viana do Castelo, Portugal
August 24 - September 4, 1987
Library of Congress Cataloging in Publication Data
Materials modification by high-fluence ion beams I edited by Roger
Kelly and M. Fernanda da Silva.
p. em. (NATO ASI series. Series E. Applied sciences; no.
155)
Proceedings of an institute held in Viana do Castelo. Portugal.
Aug. 24-Sept. 4. 1987.
"Published in cooperation with NATO Scientific Affairs Division."
Inc 1u des index.
1. Materials--Effect of radiation on--Congresses. 2. Ion
bombardment--Industrial applications--Congresses. I. Kelly. Roger.
II. Silva. M. Fernanda da (Maria Fernanda). 1938- III. North
Atlantic Treaty Organization. Scientific Affairs Division.
IV. Series.
TA418.6.M377 1988
620. l' 1228--dc19 88-31612
CIP
ISBN-13: 978-94-010-7063-8 e-ISBN-13: 978-94-009-1267-0
001: 10.1007/978-94-009-1267-0
Published by Kluwer Academic Publishers,
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© 1989 by Kluwer Academic Publishers.
Softcover reprint of the hardcover 1s t edition 1989
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copyright owner.
TABLE OF CONTENTS
PREFACE
DEDICATION TO BILL GRANT IX
AUTHOR INDEX XI
XIII
OVERVIEW
G. Carter, I.V. Katardjiev, M.J. Nobes
High-fluence ion irradiation: an overview 3
SPUTTERING
A. Oliva
Historical overview on the fundamentals of sputtering 31
R. J¢rgensen, M.J. Pellin, C.E. Young, W.F. Calaway, E.L.
Schweitzer, D.M. Gruen, J.W. Burnett, J.T. Yates
Depth of origin of sputtered atoms 83
J.B. Almeida
Magnetron sputtering: physics and design 87
G. Kiriakidis, S. Logothetides
On the formation and characterization of microcrystalline
Si:H prepared by RF magnetron sputtering 93
F. Rummens, P. Bertrand, Y. de Puydt
Depth profiling of Ta20s thin layer on Ta foil by ion scat-
tering spectrometry and ion sputtering 101
P. Wurz, G. Betz, W. Husinsky, K. Mader, B. Strehl, E. Wolfrum
Bombardment of alkali and alkali-earth halides by ions and
electrons 109
J. van Zwol, A.W. Kolfschoten, J. van Laar, J. Dieleman
Effects of Ar~ angle-of-incidence on the etching of Si with
Cl2 and low-energy Ar~ ions 117
J. Benit, J-P. Bibring, F. Rocard
Irradiation effects in ices by energetic ions 123
K. Wien, P. Koczon, M. Weber
Ion formation by very high energetic ion impact on solids 139
SIMULATION
W. Moller
Computer simulation of stopping and sputtering 151
I. Chakarov, D.S. Karpuzov
Computer simulation of ion-beam mixing of cobalt on silicon 185
Y-T. Cheng
On the fractal nature of collision cascades 191
R. Smith, A. Osbaldestin, G. Carter, I.V. Katardjiev, M.J. Nobes
Simple statistical models for erosion and growth 205
DEFECTS AND DISORDER
A.M. Stoneham
Defects and defect processes 217
A. Hallen, P. Hakansson, B.U.R. Sundqvist, E. Tillberg
Fast-ion-induced defects in silicon studied by deep level
transient spectroscopy 231
vi
S. Kostic, D.G. Armour, G. Carter
Low-energy (300 eV - 10 keV) Ar+ and Cl+ ion irradiation of
(100) Si 237
C.J. McHargue, P.S. Sklad, C.W. White, G.C. Farlow, A. Perez,
N. Kornilios, G. Marest
The charge state of iron implanted into sapphire 245
IMPLANTATION AND MIXING
U. Littmark, A. Gras-Marti
.Direct and recoil implantation, and collisional ion-beam
mixing: theory (not received in time to be included)
A. Gras-Marti, U. Littmark
Direct and recoil implantation, and collisional ion-beam
mixing: recent low-temperature experiments 257
R. Garcia-Molina, I. Abril
Mixing by defect-assisted migration of thin markers in sol-
ids 285
W.M. Law, C.D.P. Levy, M. McDonald, P.W. Schmor
The TRIUMF optically pumped polarized H- ion source 291
T. Taylor
Some high-current, ion sources for materials modification 295
COMPOSITIONAL AND CHEMICAL CHANGES
R. Kelly
Bombardment-induced compositional change with alloys,
oxides, and oxysalts. I The role of the surface binding en-
ergy 305
B. Baretzky
Investigation of preferential sputtering mechanisms by ana
lysing the sample surface and near-surface region with AES
and ISS 329
P. Mazzoldi
High-fluence implantation in insulators. Part I: Composi-
tional, mechanical, and optical changes 339
J-C. Dran
High-fluence implantation in insulators. Part II: Chemical
changes 357
P.L. Bonora, L. Fedrizzi
Electrochemical and corrosion behaviour of ion and laser-beam
modified metal surfaces 385
STRUCTURAL CHANGES
W.L. Johnson
Ion-irradiation induced phase changes in metallic systems 405
LH. Wilson
The topography of ion-bombarded surfaces 421
S. Chereckdjian, I.H. Wilson
Cultured blisters 467
ELECTRONIC CHANGES
H. Bernas
Electronic properties of ion-implanted metals 479
vii
MECHANICAL CHANGES
J.C. Pivin
Tribology of implantation bilayers 509
K. Kobs, H. Dimigen, R. Leutenecker, H. Ryssel
Adhesive and abrasive wear study of nitrogen implanted
steels 535
H. Ozkan
Effect of a-recoil damage on the elastic moduli of zircon
and tourmaline 541
J.C. Pivin, F. Pons, H. Bernas
Depth-resolved investigation of structural transformations
and hardness variations in implanted films on bulk samples 547
LASER PROCESSING
R.W. Dreyfus, R. Kelly
~aser etching as an alternative 559
A. Aydinli, M. Berti, A.V. Drigo, P.G. Merli
Pulsed laser irradiation of heavily Ge implanted silicon 581
Subject Index 589
PREFACE
This volume is the proceedings of a NATO Advanced study In
stitute held at the Hotel do Parque in Viana do Castelo
(Portugal). The school was directed by Roger Kelly (U.S.A.) and
M. Fernanda da Silva (Portugal), and the organizing committee
consisted of Harry Bernas (France), George Carter (U.K.), Paolo
Mazzoldi (Italy), and Edmund Taglauer (Germany). The dates were
24 August to 4 September, 1987.
The School was conceived to satisfy the needs of those who
study particle-surface interactions at high fluence, i.e. under
conditions leading to chemical, electronic, mechanical, and
structural changes rather than just doping. This community of
scientists is surprisingly large even though demonstrated ap
plications are still relatively few. As such, the community is
as much engaged in pure research as In applied work. It is very
highly developed in Western Europe but less so in North America.
This interesting state of balance has a number of causes, not
the least of which is the way in which science is funded in North
America: public relations plays a large role.
The idea of organizing the School took shape at a related
School on "Erosion and Growth of Solids Stimulated by Atom and
Ion Beams" held in Crete in September, 1985. Portugal was cho
sen by virtue of being a NATO country with still embryonic sci
ence but in a state of vigorous self-help. Two Portuguese
students, Eduardo Alves and Rui da Silva suggested that Fernanda
da Silva of the national laboratory at Sacavem be the Co
director, while Fernanda got unofficial help from Jose Soares
and Manuel da Silva of the Universidade de Lisboa. The School
secretary was Ofelia Ferreira from the national laboratory at
Sacavem.
Viana do Castelo, in northern Portugal near the Spanish
border, was chosen over better known locations to avoid the at
mosphere which prevails when the beaches are covered with tour
ists, especially topless tourists. In addition it had one of
the very few hotels in northern Portugal able to host a School
such as ours: the Hotel do Parque. The owner of the hotel (Mr.
Crispim) helped us to plan the logistics of the School and or
ganized meetings with the Burgermeister (Mr. Araujo) and the
head of tourism for the province of Alto Minho (Dr. Sampaio).
An exceptional contribution was made by Jose and Olimpia de
Souza, who helped us establish our four School outings and in
general made both the organizational visit and the School itself
agreeable experiences. Jose is the Manager of the Hotel do
Parque, while Olimpia teaches biology at the local secondary
school.
The main part of the financing of the School came, of course,
from the Scientific Affairs Division of NATO. We were com
pletely overwhelmed, however, by the extent to which Portuguese
insti tutions helped us. The list, with somewhat simplified
ix
x
spelling, is as follows: (1) Fundacao Calouste Gulbenkian, (2)
Lab. Nac. de Engenharia e Tecnol. Industrial, (3) Junta Nac.
de Investigacao Cientifica e Tecnol., (4) TAP Air Portugal, (5)
Inst. Nac. de Investigacao C.i..entifica, (6) Hotel do Parque
(Viana do Castelo), (7) Camara Municipal de Viana do Castelo,
(8) Governo Civil de Viana do Castelo, (9) Camara Municipal de
Ponte de Lima, (10) Regiao de Turismo do Alto Minho (Costa
Verde), (11) Inst. Politecnico de Viana do Castelo, (12) Adega
Cooperativa de Ponte de Lima, (13) Banco Portugues do Atlantico,
(14) Tecnodidactica, (15) Rank Xerox, (16) FOC Escolar, (17)
Canon-Copicanola.
Other funding, in some cases unexpected, was as follows: (1)
Alcan Research and Development Center (Canada), (2) Natural
Sciences and Engineering Research Council (Canada), (3) Danfysik
(Denmark), (4) Leybold and Siemens (F.R.G.), (5) MPI fur
Plasmaphysik (F.R.G.), (6) IBM (U.S.A.), (7) Ionwerks (U.S.A.),
(8) National Science Foundation (U.S.A.), (9) Office of Naval
Research, London Branch (U.S.A.; U.K.), (10) Oxford Instruments
(U.K.).
Roger Kelly
IBM Research Center
Yorktown Heights, NY 10598, U.S.A.
M. Fernanda da Silva
Laboratorio Nacional de Engenharia
e Tecnologia Industrial (LNETI)
2685 Sacavem, Portugal
June 1988
DEDICATION TO BILL GRANT
This volume is dedicated to the memory of Bill Grant, who
in the original plan of the School was to have been one of the
lecturers. The following notes were written by George Carter
(Salford Univ.) and transmitted to us by Robin Procter (Univ.
of Manchester) .
Bill Grant died at the tragically early age of 46 on 23 Oc
tober 1987 after a year of long and debilitating illness. He
bore this with fortitude and courage, and maintained a lively
and committed interest in his work right until the end.
Bill obtained his first degree and then his PhD in Elec
trical Engineering at Liverpool University, where he first be
came involved in research in Atomic Collision Processes in
Solids. After a brief lectureship appointment in Liverpool he
moved to Salford University in 1968, where he started developing
and using medium and high-energy ion accelerators for property
modification and for analysis of solids. Under his guidance,
Salford was the first U.K. University to acquire a, then,
state-of-the-art implanter. Initially his interests were asso
ciated with semiconductor substrates but then he made a major
move and concentrated on metal systems. He developed
collaborative contacts and lasting friendships with Robin Proc
ter and Vic Ashworth at the univ. of Manchester Institute of
Science and Technology, and collectively they undertook early
definitive work on the use of implantation in both understanding
and controlling aqueous corrosion. It was also through this
contact that the International Conference series on Surface
Modification of Metals by Ion Beams began. His other major in
terest was in phase changes induced by ion implantation and
again he was involved in the early definitive work on
crystalline-amorphous transitions induced by metalloid implan
tation into metals.
In addition to his own research work, Bill participated
fully in the professional and institutional activities related
to his work. This included being chairman of the Atomic Colli
sions in Solids group for the Institute of Physics and being the
deputy editor for the journal Vacuum. His pUblication list was
extensive and included a popular text on Ion Implantation in
Semiconductors written with George Carter. He was the Director
of the Thin Film and Surface Research Center at Salford.
In recognition of his research and international standing
he was appointed Reader and then, in 1984, Professor of Ion Beam
Engineering at Salford. Sadly, his ambitions to further develop
and support research have been frustrated by his untimely death.
Bill not only had a wide circle of national and interna
tional colleagues and friends but also a happy and fulfilling
family life. In addition to his widow, Mary, he leaves three
teenage children, all with bright and hopeful futures because
of Bill's dedication and care, and who, like all his colleagues,
will miss him badly.
xi
