Magnetic hysteresis phenomena in electromagnetic actuation systems

250 Pages·2017·16.55 MB·English

Magnetic hysteresis phenomena in electromagnetic actuation
systems
Citation for published version (APA):
Vrijsen, N. H. (2014). Magnetic hysteresis phenomena in electromagnetic actuation systems. [Phd Thesis 1
(Research TU/e / Graduation TU/e), Electrical Engineering]. Technische Universiteit Eindhoven.
https://doi.org/10.6100/IR780946
DOI:
10.6100/IR780946
Document status and date:
Published: 01/01/2014
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Magnetic Hysteresis Phenomena
in Electromagnetic Actuation Systems
proefschrift
ter verkrijging van de graad van doctor aan de Technische Universiteit
Eindhoven, op gezag van de rector magni(cid:28)cus, prof.dr.ir. C.J. van Duijn,
voor een commissie aangewezen door het College voor Promoties, in het
openbaar te verdedigen op maandag 27 oktober 2014 om 16.00 uur
door
Nilles Henricus Vrijsen
geboren te Eindhoven
Ditproefschriftisgoedgekeurddoordepromotorenendesamenstellingvande
promotiecommissie is als volgt:
voorzitter: prof.dr.ir. J.H. Blom
1e promotor: prof.dr. E.A. Lomonova MSc
copromotor: dr.ir. J.W. Jansen
leden: prof.dr.ir. J.P.H. Benschop (Universiteit Twente / ASML)
prof.dr. L.R.L. DuprØ (Universiteit Gent)
prof.dr.ir. M.G.D. Geers
prof.dr.-ing. B. Ponick (Leibniz Universiteit Hannover)
adviseur: dr.ir. R. Klaver (Heidenhain)
Magnetic Hysteresis Phenomena
in Electromagnetic Actuation Systems
Nilles Henricus Vrijsen
Electromechanics and Power Electronics group, Department of Electrical
Engineering, Eindhoven University of Technology, The Netherlands
ThisresearchispartofthePiekenindeDeltaprogramandisfundedbyRijksdienst
voor Ondernemend Nederland (RVO), an agency of the Dutch Ministry of
EconomicalA(cid:27)airs,andthelocalgovernmentsoftheSouth-EastoftheNetherlands.
Magnetic Hysteresis Phenomena in Electromagnetic Actuation Systems
by N.H. Vrijsen, Eindhoven University of Technology, 2014
A catalogue record is available from the Eindhoven University of Technology
Library, ISBN: 978-90-386-3709-9
Reproduction: Ipskamp Drukkers B.V., Enschede, The Netherlands
Cover design: Johan Huijbregts
E-mail: [email protected]
Copyright c 2014 by N.H. Vrijsen. All rights reserved.
(cid:13)
To my wife - Suzanne
and to my family
vi
Summary
Magnetic hysteresis phenomena
in electromagnetic actuation systems
Therequirementsontheforcedensityandpositionaccuracyforhigh-precision
actuationsystemsarecontinuouslyincreasing. Especiallyinthesemiconductor
lithographyindustry,thedemandsonthepositioningsystemsareonthephysi-
callimits, becauseproductionspeedisamajorissuewhilenanometeraccurate
positioning is required. High accelerations are necessary to improve the wafer
throughput, which determines the costs per chip. It is the force of electromag-
netic actuators which de(cid:28)nes the acceleration of a speci(cid:28)c mass. To enhance
the acceleration of future actuation systems, intrinsically di(cid:27)erent actuation
techniques are investigated other than the often applied voice-coil actuators,
which are expected to reach their limitations on force density. This research
focuses on reluctance actuators for short-stroke applications, which are able to
achieve a more than ten times higher force density than voice-coil actuators
considering the moving mass. The major restriction for applying reluctance
actuators for high-precision actuation systems is their non-linearity with re-
spect to the current and position, and the presence of magnetic hysteresis and
eddy currents in the ferromagnetic materials. This thesis aims to investigate
the accuracy of the force prediction of reluctance actuators from a physical
electromagnetic perspective.
Variouselectromagneticmodelingmethodsareevaluatedforthedetermination
of the force of reluctance actuators. The magnetic equivalent circuit (MEC)
methodandthe(cid:28)niteelementmethod(FEM)areselectedtomodeltheintrinsic
non-linear force with respect to the current and the position. The analytical
MECmethodmodelsthenon-hystereticforceintheactuationdirectionwitha
high-accuracy,whereasitisnotaccurateforobtainingtheforcesperpendicular
to the actuation direction. Besides the modeling of the evaluated reluctance
actuators with the FEM, this numerical method is also used to investigate the
in(cid:29)uence of the homogeneity of the magnetic (cid:29)ux density in the actuator core
relatedtotheamountofmagnetichysteresisinthereluctanceforce. Fromthis
viii Summary
analysis it is observed that the absolute magnitude of the magnetic hysteresis
intheforceintheactuationdirectionisdirectlyrelatedtothepeakvalueofthe
magnetic (cid:29)ux density in the major part of the core of the reluctance actuator.
The hysteresis in the force perpendicular to the actuation direction due to a
misalignment of the stator and mover is negligible compared to the hysteresis
in the actuation direction.
The physical magnetic hysteresis phenomena in ferromagnetic materials are
explained,includingthehistorydependency,thewiping-outpropertyandrate-
dependent e(cid:27)ects, i.e. macroscopic eddy currents and excess losses. These
aspects are important for the selection of a proper magnetic hysteresis model
from commonly applied modeling methods. Furthermore, the most important
propertiesforreluctanceactuatordesignarediscussedofregularlyappliedsoft-
magnetic material types, i.e. nickel-iron (NiFe), silicon-iron (SiFe), cobalt-
iron (CoFe), ferrite and stainless steel. Moreover, the in(cid:29)uence of annealing
in the production process is considered and measurement methods to qualify
ferromagnetic materials are elaborated.
ThephenomenologicalPreisachmodelisselectedtomodelthedominantferro-
magneticmaterialproperties,becausethemodelincorporatesthenon-linearity
of the magnetic hysteresis loop, the history dependency and arbitrary minor
loops. The Preisach model is combined with the MEC method to describe
the hysteretic behavior of reluctance actuators. A dynamic material model is
used to describe the rate-dependent e(cid:27)ects in the ferromagnetic materials. In
addition to the Preisach model, a commercial available FEM and a complex
impedance model are evaluated on their ability to model static and dynamic
magnetic hysteresis e(cid:27)ects.
The magnetic (cid:29)ux density obtained with the Preisach model is compared
to quasi-static measurements for three di(cid:27)erent material samples, i.e. CoFe
(Vaco(cid:29)ux 50), SiFe (M800-50A) and stainless steel (AISI 430). The dynamic
material model is also evaluated for the laminated material samples with vari-
ous lamination thicknesses of 0.10, 0.35 and 0.50 mm. The simulations show a
maximumdiscrepancyof10%formostexcitationsrangingfromaquasi-static
magnetic (cid:29)ux density variation up to excitations with a sinusoidal magnetic
(cid:29)ux density of 400 Hz.
Theforcepredictionhasbeenevaluatedwiththecombinedmagnetichysteresis
and actuator model by an experimental veri(cid:28)cation on three E-core reluctance
actuators, one has been manufactured from CoFe and two from SiFe, of which
one has a pre-biasing permanent magnet and the other one has not. The
force of the CoFe E-core actuator has been measured with an actuator test-
rig, which consists of two linear voice-coil actuators to obtain the force. A
nanometer accurate optical encoder has been used with a position feedback
controller to maintain a constant airgap. The dynamic hysteresis phenomena
in the reluctance force of the two SiFe actuators have been measured with
Summary ix
a piezoelectric load cell. The modeled magnetic hysteresis phenomena in the
reluctanceactuatorsshowgoodagreementwiththemeasurementsforboth,the
absoluteforceandtheamountofmagnetichysteresisintheforce,includingthe
history dependency, minor loops and dynamic e(cid:27)ects.