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About Lecture 2 - CMOS Fabrication
The document summarizes the key steps in the CMOS fabrication process: CMOS transistors are built up layer by layer on a silicon wafer using a series of photolithography and deposition/etching steps. The process begins by defining the n-well region, then adding layers such as a gate oxide, polysilicon for the gate, and n-type and p-type diffusions for the source and drain of each transistor type. Key steps include oxidation, photolithography to pattern masks, ion implantation of dopants, and etching processes. The goal is to self-align each layer to create an operational CMOS inverter.
Detailed Information
| Author: | ['sadia santa'] |
|---|---|
| Publication Year: | 2021 |
| Pages: | 39 |
| Language: | English |
| Format: | |
| Price: | FREE |
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