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About IntelliSuite Tutorial PDF
The document discusses IntelliSuite, a MEMS design and simulation software. It can simulate fabrication processes to develop 3D models of MEMS devices and then perform simulations like electrostatic, thermal, and coupled analyses. The tutorial covers using IntelliFab to define fabrication steps, build a process table, and visualize the 3D model. It also discusses using IntelliMask for mask design and Mematerial for accessing material property data.
Detailed Information
Author: | ['praven'] |
---|---|
Publication Year: | 2017 |
Pages: | 72 |
Language: | English |
Format: | |
Price: | FREE |
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