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Handbook of Silicon Semiconductor Metrology PDF

866 Pages·2001·12.941 MB·English
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by Alain C. Diebold (ed.)| 2001| 866 pages| 12.941| English

About Handbook of Silicon Semiconductor Metrology

A complete reference on silicon semiconductor metrology. Contains nearly 1300 references, more than 300 equations, and nearly 500 drawings, photographs and micrographs. Explains run-to-run and real-time control, considers how to improve physical measurement methods to meet more exact requirements, and more.

Detailed Information

Author:Alain C. Diebold (ed.)
Publication Year:2001
ISBN:824705068
Pages:866
Language:English
File Size:12.941
Format:PDF
Price:FREE
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