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Download Handbook of Silicon Semiconductor Metrology by Alain C. Diebold (Editor) in PDF format completely FREE. No registration required, no payment needed. Get instant access to this valuable resource on PDFdrive.to!
About Handbook of Silicon Semiconductor Metrology
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.
Detailed Information
| Author: | Alain C. Diebold (Editor) |
|---|---|
| Publication Year: | 2001 |
| ISBN: | 9780585418322 |
| Pages: | 891 |
| Language: | English |
| File Size: | 17.94 |
| Format: | |
| Price: | FREE |
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