Handbook of Purified Gases

524 Pages·2015·28.569 MB·English

by  Helmut Schoen (auth.)

Helmut Schön
Handbook of
Purified Gases
Handbook of Purified Gases
Helmut Schön
Handbook of Purified Gases
ABC
HelmutSchön
Leipzig
Germany
ISBN978-3-540-32598-7 ISBN978-3-540-32599-4 (eBook)
DOI10.1007/978-3-540-32599-4
LibraryofCongressControlNumber:2014951880
SpringerHeidelbergNewYorkDordrechtLondon
(cid:2)c Springer-VerlagBerlinHeidelberg2015
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Foreword to the English Edition
The German Version of the Handbook of purified Gases was first published in
2005. There has been a great take up from colleges and specialists, so this positive
resonance encouraged me to provide an English version of the book. In respect to
the advances in technology and the more global approach it soon became evident
to me that there will be an revision and enhancement for the handbook. Hints and
helpful suggestions from expert colleagues representing more than 50 different
companies and institutions were taken into account and I would like to express my
very grateful thanks to all concerned.
Special thanks goes to the following people; without their help this book would
not lay in your hands:
The Bavarian translation office which took the challenge of translation this very
technical handbook with elaborateness, thereby reviewing every chapter
thoroughly. Geoff Holford as native speaker war particularly helpful in this
process.
Bill Heintz, formerly and currently working for Linde AG and briefly for
PRAXAIR Inc., gave me as highly qualified US engineer very useful and
important information about the technical requirements in the USA.
Jos Swinnen from Belgian Praxair in Brussels made significant contributions to
ensure coherency applicability in European countries.
Special thanks to both gentleman for proof reading every chapter and their
provision for all multinational aspects.
The experienced chemist Anette Nieczorawski from Praxair Germany in Berlin
and expert engineer Peter Titschinski from special gases manufacturing plant of
Linde AG Germany in Unterschleißheim (Munich) reviewed and adopted the data
sheets in the annex of this book.
Unfortunately I had a stroke in December 2007 and it became significantly
more difficult to me to work on the finalization of the handbook. The above
mentioned experts gave me extensive support, especially Goeff Holford, as my
son, the chemist Dr. Oliver Schön.
Last but not least I would like to thank Springer publishing house for the
excellent support.

Leipzig in Germany, Dr. rer. nat. Helmut Schön
July 2014
Contents
1 Introduction ............................................................................................ 1
1.1 Definition of Purity ......................................................................... 2
1.2 Graduation of Gases ........................................................................ 4
1.2.1 Graduation According to Physical Data .............................. 4
1.2.2 Graduation According to Other Characteristics .................. 7
1.2.3 Standard Conditions ............................................................ 7
1.3 Regulations and Standard Publications ........................................... 8
2 Introduction to the Physics of Gases ..................................................... 11
2.1 The Ideal Gas .................................................................................. 11
2.1.1 State Equations .................................................................... 12
2.1.2 Kinetic Gas Theory ............................................................. 15
2.1.3 Enthalpy .............................................................................. 16
2.2 The Real Gas ................................................................................... 17
2.2.1 Equations of State................................................................ 19
2.2.2 The Liquefied Gas ............................................................... 22
2.2.3 Diverse Properties ............................................................... 25
2.3 Gas Mixtures ................................................................................... 29
2.4 Moisture Content ............................................................................. 31
2.5 Leak Rate ........................................................................................ 34
3 Manufacturing and Purification ........................................................... 39
3.1 Physical Processes ........................................................................... 41
3.1.1 Distillation ........................................................................... 41
3.1.2 Rectification ........................................................................ 46
3.1.3 Adsorption ........................................................................... 50
3.1.4 Permeation .......................................................................... 61
3.1.5 Isotope Separation ............................................................... 65
3.2 Chemical and Electro-chemical Procedures .................................... 67
3.2.1 Heterogeneous Catalysis ..................................................... 67
3.2.2 Electrolyses ......................................................................... 70
VIII Contents

3.2.3 Syntheses ............................................................................. 72
3.2.4 Gas Washing ....................................................................... 74
3.3 Getter and Gas Purifier .................................................................... 77
3.4 Filter ................................................................................................ 81
4 Filling Manifolds .................................................................................... 85
4.1 Filling Manifolds for Pure Gases .................................................... 85
4.1.1 Compressed Pure Gases ...................................................... 87
4.1.2 Liquefied Gases ................................................................... 91
4.2 Tips for the Construction of Stations .............................................. 92
4.2.1 Pressure Vessels and Pressure Piping.................................. 92
4.2.2 Valves and Fittings .............................................................. 98
4.2.3 Pumps and Compressors ..................................................... 110
4.2.4 Measurement and Control Technology ............................... 118
5 Mixtures of Pure Gases .......................................................................... 121
5.1 Static Procedures ............................................................................. 122
5.1.1 Gravimetric Procedure ........................................................ 122
5.1.2 Manometric and Volumetric Procedures ............................. 130
5.1.3 Homogenization and Separation ......................................... 132
5.1.4 Mixtures of Flammable and Oxidizing Gases ..................... 135
5.2 Dynamic Process ............................................................................. 141
6 Compressed Gas Cylinders .................................................................... 143
6.1 Types and Conditions ...................................................................... 143
6.2 Accessories ...................................................................................... 146
6.3 Marking ........................................................................................... 150
6.4 Preparation for Filling ..................................................................... 151
7 Analysis of Purity and Composition ..................................................... 155
7.1 Metrological Certainty .................................................................... 156
7.2 Error Analysis ................................................................................. 157
7.2.1 Mean, Error and Error Propagation ..................................... 158
7.2.2 Determining Expanded Uncertainty .................................... 161
7.2.3 Poisson Distribution ............................................................ 162
7.2.4 Noise and Limit of Detection .............................................. 163
7.2.5 Stability of a Gas Mixture ................................................... 165
7.3 Instrumental Analysis ...................................................................... 165
7.3.1 Mass Spectrometry .............................................................. 166
7.3.2 Chromatographic Methods .................................................. 172
Contents IX

7.3.3 Spectroscopic Methods ....................................................... 180
7.3.4 Electro-Analytical Methods ................................................ 188
7.3.5 Moisture Measurement ........................................................ 193
7.3.6 Determination of Oil ........................................................... 198
7.4 Chemical Absolute Methods ........................................................... 199
7.5 Particle Measurement ...................................................................... 200
7.6 Automation of Complex Systems.................................................... 202
7.7 Testing Relevance to Application Technology ............................... 204
8 Handling .................................................................................................. 205
8.1 Tips for Transport, Storage and Gas Withdrawal ............................ 205
8.2 Fittings and Equipment for Gas Withdrawal ................................... 207
8.3 Gas Mixtures at the User ................................................................. 210
8.4 Purification at the “Point of Use” .................................................... 213
9 Data Sheets .............................................................................................. 215
9.1 Classification and Limiting Values ................................................. 215
9.2 Physical-Technical Data .................................................................. 218
9.3 Synonyms and Data Sheets ............................................................. 220
10 Appendix ................................................................................................. 469
10.1 Important Physical Constants .......................................................... 469
10.2 International Units (SI) ................................................................... 469
10.3 Pressure Units ................................................................................. 471
10.4 Material Data on the Vapour-Pressure Curve ................................. 472
10.5 Constants of the Vapour Pressure Equation .................................... 488
10.6 Compressibility Factor .................................................................... 494
10.7 Vapour Pressure over Ice ................................................................ 494
10.8 Student Fischer Factor (t Distribution) ............................................ 495
10.9 C-t Values of Toxicity ..................................................................... 496
10.10 Marking Gas Cylinders ................................................................... 498
10.10.1 Precautionary Labels ........................................................... 498
10.11 Gas Cylinders – Colour Coding ...................................................... 501
10.12 Cylinder Valve Outlets .................................................................... 501
10.12.1 Filling Pressure 200 Bar...................................................... 501
10.12.2 Filling Pressure 300 Bar...................................................... 503
10.12.3 DISS Connections ............................................................... 504
10.13 Initials for CFCs .............................................................................. 505
10.13.1 Carbon Compounds ............................................................ 505
X Contents

10.13.2 Azeotropic and Non-azeotropic Mixtures ........................... 507
10.13.3 Various Organic and Inorganic Compounds ....................... 507
Symbols and Abbreviations ......................................................................... 509
Subject Index................................................................................................. 517
1 Introduction
Technical gases are used in almost every field of industry, science and medicine
and also as a means of control by government authorities and institutions. They
are regarded as indispensable means of assistance. After World War II there have
been two dominant directions of development: variety and purity. Both are closely
connected with the modern technologies of the late 20th century
Due to the rapid progress of the semiconductor industry in the 70s the gases ar-
sine, monosilane and diborane, formerley of interest for scientists, gained particu-
lar significance, previously they had only been of interest to scientists. There was
a similar development in the 90s with nitrogen trifluoride and octafluorcyclobu-
tane (RC318). There was also a steady increase in the amount of exotic compo-
nents in gas mixtures. The number of substances, gases and liquids currently used
in mixtures is estimated to be approx. 200. An example is the addition of a small
quantity of halothane, a liquid anaesthetic, to nitrogen in order to control the air in
hospital operating rooms.
Regarding the development of the purity of the gas, it is useful to look into the
past. According to the book by Müller and Gnauck, published in 1965 and consid-
ered to be the latest monograph about purest gases in the German speaking area a
gas is defined as purest if the total impurities are less than 100 ppm. (Riedel 1981)
dealt with the principles of the purity of gases, (Schön 1985) reported on the al-
ready established quality of 99.99999% for helium, argon, hydrogen and monosi-
lane. Already today there is large-scale production of gases with total impurities
less than 0.1 ppm and a supply without loss of quality for the consumer. However,
this does not mean that there is no possibility of further improvement. Roughly
speaking, each decade sees an increase in purity by the power of ten. This
development is and has been a fundamental prerequisite for the miniaturisation
of electronic and mechanic components in the semiconductor and other related
industries. It is reasonable to expect this trend to continue.

© Springer-Verlag Berlin Heidelberg 2015 1
H. Schön, Handbook of Purified Gases,
DO I: 10.1007/978-3-540-32599-4_1