Handbook of Porous Silicon

987 Pages·2014·22.307 MB·English

by  Leigh Canham (eds.)

Leigh Canham
Editor
Handbook of
Porous Silicon
1 3
Reference
Handbook of Porous Silicon

Leigh Canham
Editor
Handbook of
Porous Silicon
With247Figuresand139Tables
Editor
LeighCanham
pSiMedicaLtd
Malvern,UK
ISBN978-3-319-05743-9 ISBN978-3-319-05744-6(eBook)
ISBN978-3-319-05745-3(printandelectronicbundle)
DOI10.1007/978-3-319-05744-6
SpringerZugHeidelbergNewYorkDordrechtLondon
LibraryofCongressControlNumber:2014954093
#SpringerInternationalPublishingSwitzerland2014
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Preface
Thesemiconductorsiliconhasoftenbeenreferredtoasthemoststudiedandmost
influentialmaterialmadebymankind.Thestone,bronze,andiron“ages”became
the “silicon age” with the emergence of integrated circuits. Micromachining it
enabled complex microdevices with moving parts to be realized. Nanostructuring
it via porosification has yielded some amazing phenomena, most of which are
coveredinthishandbook.
Scientificinterestinporoussiliconhasgrownsignificantlyoverthelast25years
fundamentally because it is a form of silicon that has both highly tunable and
remarkableproperties.Thesepropertiescanbedramaticallydifferentfromthoseof
solidsiliconandhaveenabledopportunitiestoariseindiversefieldsthatstartedin
electronics but now include microsystems, optoelectronics, optics, acoustics,
energy conversion, diagnostics, nutrition, medical therapy and, cosmetics.
By having almost 100 complementary reviews, this handbook strives to be the
most comprehensive textbook on the material ever published. I hope it will be
usefultomymanyfriendsandresearchcolleaguesalreadyveryactivewithporous
siliconresearchbutalsotothosenewtothefield.
Theexpertiserequiredtocreatethishandbookrepresentsthecombinedintellect
of more than 80 scientists from more than 30 countries whose pioneering work
has shaped this multidisciplinary scientific field of endeavor. The handbook is
organized into five parts that cover fabrication, properties, characterization,
processing, and applications. Each part has an introductory review where I have
tried to show the important links with more focused reviews elsewhere and to
highlightandprovidereferencestoimportanttopicsthatdidnotreceivededicated
reviews.Nonetheless,Iapologizeinadvanceforthemanyomissionsofimportant
workthat“fellthroughthecracks.”Withineachpart,thereviewsarealsogrouped
and ordered by complementary topics. For example, the first part on fabrication
starts with the various techniques but then progresses to fabrication of different
typesofporositywiththegiventechnique(s)andthenthedifferentphysicalforms
ofporous silicon. Inasimilarmanner, the properties partof the handbookgroups
together complementary reviews on specific optical, magnetic, emissive, and
chemicalpropertiesandsoon.
Therearemanypeopletothankforsuchaboldenterprise.Ithastakenyearsof
both planning and execution, so first and foremost, I would like to thank both the
v
vi Preface
contributors and the publisher, Springer, for their patience! I would like to thank
Karin Bartsch, Coordinating Editor at Springer, for her tireless efforts at dealing
withsomanyauthors,myselfinparticular.RasidhaSulthanaalsodidagreatjobin
managing the reformatting, type-setting, and checking of proofs for 94 review
articles. I would like to thank Sonia Ojo and Lydia Mueller, Senior Editors at
Springer,fortheircontinuedfaithandsupportofthislengthyproject.Finally,thank
you, the reader, for your interest in this material. I hope this book facilitates your
researchinthefutureandperhapsstimulatesyoutojoinourvibrantandexpanding
“poroussiliconcommunity.”The“olddog”ofsemiconductorscontinuestoexhibit
newtricks.
Malvern L.Canham
August2014
Contents
PartI Fabrication ........................................ 1
RoutesofFormationforPorousSilicon ........................ 3
LeighCanham
PorousSiliconFormationbyAnodization ....................... 11
ArmandoLoni
PorousSiliconFormationbyGalvanicEtching .................. 23
KurtW.Kolasinski
PorousSiliconFormationbyStainEtching ...................... 35
KurtW.Kolasinski
PorousSiliconFormationbyMetalNanoparticle-Assisted
Etching .................................................. 49
ClaudeLe´vy-Cle´ment
PorousSiliconFormationbyPhotoetching ...................... 67
SadaoAdachi
PorousSiliconFormationbyHNO /HFVaporEtching ............ 75
3
BrahimBessa¨ıs
PorousSiliconFormationbyPorousSilicaReduction ............. 85
LeighCanham
PorousSiliconFormationbyMechanicalMeans ................. 93
JaroslawJakubowicz
MacroporousSilicon ....................................... 103
NoureddineGabouzeandFranc¸oisOzanam
MesoporousSilicon ......................................... 115
AlexeyKhokhlovandRustemValiullin
MicroporousSilicon ........................................ 129
LeighCanham
vii
viii Contents
PoreVolume(Porosity)inPorousSilicon ....................... 135
LeighCanham
UltrathinPorousSiliconFilms ................................ 143
BrahimBessa¨ıs
PorousSiliconMultilayersandSuperlattices .................... 153
VivechanaAgarwal
PorousSiliconMembranes ................................... 163
LeighCanham
MACESiliconNanostructures ................................ 171
CiroChiappini
Polymer-PorousSiliconComposites .......................... 187
EsterSegalandMaksymA.Krepker
PartII Properties ....................................... 199
TunablePropertiesofPorousSilicon .......................... 201
LeighCanham
ThermalPropertiesofPorousSilicon .......................... 207
NobuyoshiKoshida
MechanicalPropertiesofPorousSilicon ........................ 213
LeighCanham
MesoporeDiffusionWithinPorousSilicon ...................... 221
Jo¨rgK€argerandRustemValiullin
RefractiveIndexofPorousSilicon ............................. 231
HonglaeSohn
OpticalBirefringenceofPorousSilicon ........................ 245
MinoruFujiiandJoachimDiener
ColorofPorousSilicon ..................................... 255
LeighCanham
ElectricalTransportinPorousSilicon ......................... 263
SanjayK.Ram
DiamagneticBehaviorofPorousSilicon ........................ 281
KlemensRumpfandPetraGranitzer
FerromagnetismandFerromagneticSiliconNanocomposites ....... 287
PetraGranitzerandKlemensRumpf
ParamagneticandSuperparamagneticSilicon
Nanocomposites ........................................... 297
PetraGranitzerandKlemensRumpf
Contents ix
PhotoluminescenceofPorousSilicon ........................... 307
BernardGelloz
ElectroluminescenceofPorousSilicon ......................... 321
BernardGelloz
ThermoluminescenceofPorousSilicon ......................... 335
ValeriySkryshevsky
OpticalGaininPorousSilicon ................................ 345
KaterˇinaHerynkováandIvanPelant
ChemicalReactivityandSurfaceChemistryof
PorousSilicon ............................................. 355
MichaelJ.Sailor
BiocompatibilityofPorousSilicon ............................. 381
SuetP.LowandNicolasH.Voelcker
BiodegradabilityofPorousSilicon ............................. 395
QurratShabir
PartIII Characterization ................................. 403
CharacterizationChallengeswithPorousSilicon ................. 405
LeighCanham
MicroscopyofPorousSilicon ................................. 413
Rau´lJ.Mart´ın-PalmaandVicenteTorres-Costa
X-RayDiffractioninPorousSilicon ........................... 423
JefferyL.Coffer
GasAdsorptionAnalysisofPorousSilicon ...................... 431
ArmandoLoni
NMRCryoporometryandEstimationofPoreSizesin
MesoporousSilicon ......................................... 439
RustemValiullin
CharacterizationofPorousSiliconbyCalorimetry ............... 449
JarnoSalonen
MagneticCharacterizationMethodsforPorousSilicon ............ 455
KlemensRumpfandPetraGranitzer
ChemicalCharacterizationofPorousSilicon .................... 463
MihaelaKuskoandIulianaMihalache
CharacterizationofPorousSiliconbyInfraredSpectroscopy ....... 473
YukioH.Ogata