Handbook of Optical Systems, Volume 2: Physical Image Formation

716 Pages·2005·18.849 MB·English

by  Wolfgang Singer, Herbert Gross, Michael Totzeck

Handbook of Optical Systems
Edited by
Herbert Gross
Volume 2: Physical Image Formation
Wolfgang Singer, Michael Totzeck, Herbert Gross

HandbookofOpticalSystems
EditedbyHerbertGross
Volume2:
PhysicalImageFormation
Handbook of Optical Systems
Edited by
Herbert Gross
Volume 1: Fundamentals ofTechnical Optics
Volume 2: Physical Image Formation
Volume 3: Aberration Theory andCorrection ofOptical Systems
Volume 4: Survey of Optical Instruments
Volume 5: Metrology of Optical Components and Systems
Volume 6: Advanced Physical Optics
Handbook of Optical Systems
Edited by
Herbert Gross
Volume 2: Physical Image Formation
Wolfgang Singer, Michael Totzeck, Herbert Gross
HerbertGross & AllbookspublishedbyWiley-VCHarecarefullypro-
HeadofOpticalDesignDepartment duced.Nevertheless,authors,editors,andpublisher
CarlZeissAG,Oberkochen,Germany donotwarranttheinformationcontainedinthese
e-mail:[email protected] books,includingthisbook,tobefreeoferrors.Read-
ersareadvisedtokeepinmindthatstatements,data,
illustrations,proceduraldetailsorotheritemsmay
WolfgangSinger
inadvertentlybeinaccurate.
DepartmentLIT-TD
CarlZeissSMTAG,Oberkochen,Germany
LibraryofCongressCardNo.:
e-mail:[email protected]
appliedfor
MichaelTotzeck BritishLibraryCataloguing-in-PublicationData
DepartmentLIT-TD Acataloguerecordforthisbookisavailablefromthe
CarlZeissSMTAG,Oberkochen,Germany BritishLibrary.
e-mail:[email protected]
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DeutscheNationalbibliografie;detailedbibliographic
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<http://dnb.ddb.de>.
(cid:2)2005WILEY-VCHVerlagGmbH&Co.KGaA,
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WolfgangSinger HerbertGross
WolfgangSingerwasbornin1964andstudiedPhy- HerbertGrosswasbornin1955.HestudiedPhysics
sics at the University of Erlangen. He received his attheUniversityofStuttgartandjoinedCarlZeissin
Ph.D.attheInstituteofAppliedOpticsin1995with 1982.Sincethenhehasbeenworkinginthedepart-
a thesis on microoptics, propagation theory and mentofopticaldesign.Hisspecialareasofinterest
tomography.HespenthispostdoctorateattheInsti- arethedevelopmentofsimulationmethods,optical
tutedeMicrotechniqueinNeuchatel,wherehedevel- design software and algorithms, the modelling of
opeddiffractivediffusorsforDUVilluminationsys- lasersystemsandsimulationofproblemsinphysical
tems. From 1996 to 1998, he was assistant at the optics,andthetolerancingandthemeasurementof
InstituteofAppliedOpticsattheUniversityofStutt- opticalsystems.Since1995,hehasbeenheadingthe
gart.Since1998,hehasbeenwithCarlZeissSMT centralopticaldesigndepartmentatZeiss.Heserved
AG,workinginthedepartmentofopticaldesignand asalecturerattheUniversityofAppliedSciencesat
simulationforlithographicoptics.Hisworkincludes Aalen and at the University of Lausanne, and gave
tolerancingofobjectivesandthedesignofillumina- seminarsforthePhotonicsNetofBadenW(cid:3)rttem-
tionsystemsofEUVsystems.Hebecameprincipal bergaswellasseveralcompanyinternalcourses.In
scientist and was engaged at the scientific training 1995,hereceivedhisPhDattheUniversityofStutt-
programme at Carl Zeiss. His special interests are gartonaworkonthemodellingoflaserbeampropa-
imaging theory and partial coherence, and he has gation in the partial coherent region. He has pub-
written his own simulation software. He holds 50 lishedseveralpapersandhasgivenmanytalksatcon-
patentsandhaspublishedabout30papersandcon- ferences.
tributionstotextbooks.
MichaelTotzeck
MichaelTotzeckwasbornin1961.Hereceivedhis
diplomadegreeinPhysicsin1987andhisPh.D.in
1989,bothfromtheTechnicalUniversityofBerlin,
wherehealsodidhishabilitationin1995.In1991he
was awarded the Carl-Ramsauer-Award of the AEG
AG for his Ph.D. thesis on near field diffraction.
From1995to2002,heheadedagrouponhighreso-
lutionmicroscopyattheInstituteofAppliedOptics
inStuttgart,workingbyexperimental,theoreticaland
numericalmeansonopticalmetrologyattheresolu-
tionlimit.HehasbeenwiththeCarlZeissSMTAG
since 2002, working in the department for optical
design.Hiscurrentresearchtopiciselectromagnetic
imagingwithhigh-NAopticalsystems.Hehaspub-
lished 40 papers on diffraction theory, near-field
optics, high-resolution microscopy, interferometry,
metrology, optical singularities, polarization-optics
andphysicseducation.

VII
Contents of Volume I
1 Introduction 1
2 ParaxialImaging 5
3 Interfaces 61
4 Materials 111
5 Raytracing 173
6 Radiometry 229
7 LightSources 269
8 SensorTechnologyandSignalProcessing 323
9 TheoryofColorVision 379
10 OpticalSystems 425
11 Aberrations 485
12 WaveOptics 523
13 Plano-opticalComponents 569
14 Gratings 647
15 SpecialComponents 693
16 OpticalMeasurementandTestingTechniques 759