Growth and characterization of low stress amorphous carbon films by pulsed laser deposition process

2004·5.8 MB·English

by  Yoon, Sang Hyun

GROWTHANDCHARACTERIZATIONOFLOWSTRESSAMORPHOUSCARBON
FILMSBYPULSEDLASERDEPOSITIONPROCESS
By
SANGHYUNYOON
ADISSERTATIONPRESENTEDTOTHEGRADUATESCHOOL
OFTHEUNIVERSITYOFFLORIDAINPARTIALFULFILLMENT
OFTHEREQUIREMENTSFORTHEDEGREEOF
DOCTOROFPHILOSOPHY
UNIVERSITYOFFLORIDA
2004
Copyright2004
by
SangHyunYoon
ToGod,MyFamily&Puppies.
ACKNOWLEDGMENTS
Iwouldliketoexpressmysincereappreciationtomyadvisor,Dr.RajivK.Singh
forhisguidance,support,andencouragement.Thanksarealsoduetomydoctoral
committeemembers.Dr.StephenJ.Pearton,Dr.CammyAbernathy,Dr.Wolfgang
Sigmund,andDr.ArthurF.Hebard,fortheirassistanceandinterestinmywork.
IamgratefultoDr.AndrewRinzlerandhisgroupmembersfortheirsupportfor
Ramananalysis.IwouldalsoliketothankGeraldBournefordiscussionsconcerning
Nanoindentation.AdditionalthanksgotoFlyungjinBaeandDr.Yi-yeonKimfor
measurementanddiscussionsofAFMresults.ThanksareduetoDr.ValentinCraciun,
SeungwooLee,andEricLambersforhelpingwiththeXPSanalysisandKwanghoon
KimforcollectingPLdata.Thisassistancewasfundamentalforthiswork.
Iamindebtedtomyfriendsandcoworkersfortheirfriendshipandencouragement
throughoutmystayinGainesville.SpecialthanksgotoChadEssaryforgivingmealot
ofadviceonmywrittenEnglish.IalsothankHanHoChoi,Su-HoJung,Jeremiah
Abiade,andKarthikRamani.Iamalsogreatlyappreciativeofmyseniorgroupmembers.
Dr.Kyu-KongCho,Dr.JaeyoungChoi,Dr.KyoseChoi,Dr.SeungmahnLee,Dr.
WonseopChoi,Dr.HyucksooYang,Dr.JoodongPark,Dr.Won-SeokKim,Dr.Mike
Olinger,Dr.FrankKelly,Dr.JoshHoward,andDr.NabilBassim.Also,Iwanttothank
Dr.KyupilLee,Dr.JungsikBang,Dr.Ki-HongLee,Dr.HeesunYang,Dr.JungminCho,
JinhoKim,Dr.JunyoungPark,andJamieRhodesforalwayshavingbeenmygood
friends.Ofcourse,veryspecialthanksgotoMrs.MargaretRafton,whoalwaystookcare
IV
ofallourgroupmemberswithlove,andshewasagoodfriendofmyMother,too.Ithank
everyoneverymuch.IwillneverforgetmylifeinGainesville.
v
TABLEOFCONTENTS
Cage
ACKNOWLEDGMENTS iv
LISTOFTABLES viii
LISTOFFIGURES ix
ABSTRACT xii
CHAPTER
1.INTRODUCTION 1
2.LITERATUREREVIEW 4
2.1.C2.a1r.b1.onNucleusandElectronConfigurationofCarbonAtoms 44
2.1.2.Carbonallotropes 7
2.1.2.1.Diamond 7
2.1.2.2.Graphite 8
2.1.2.3.Fullerenes 8
2.1.2.4.AmorphousCarbon 9
2.2.Diamond-LikeCarbon(DLC) 9
2.3.DepositionMethods 10
2.3.1.IonBeamDeposition 11
2.3.2.MassSelectedIonBeamDeposition 11
2.3.3.Sputtering 12
2.3.4.CathodicArc 13
2.3.5.PlasmaEnhancedChemicalVaporDeposition 14
2.4.PulsedLaserDeposition 15
2.4.1.PrincipleofExcimerLasers 15
2.4.2.BasicsofPLD 15
2.4.3.AdvantagesofPLD 15
2.4.4.DisadvantagesofPLD 16
2.4.4.1.Particulates 17
2.4.4.2.Angulardistribution 19
2.5.GrowthMechanismofAmorphousCarbonFilms 20
vi
GROWTHANDCHARACTERIZATIONOFLOWSTRESSDIAMOND-LIKE
3.
CARBONFILMSBYAMULTI-CYCLEPROCESS 34
3.1.PLDGrownDiamond-likeCarbonFilms 34
3.2.ExperimentalProcedures 36
3.2.1.FilmSynthesis 36
3.2.2.FilmCharacterization 36
3.3.ResultsandDiscussion 37
4.GROWTHANDCHARACTERIZATIONOFAMORPHOUSCARBONNITRIDE
FILMSWITHLOWNITROGENCONCENTRATION 71
4.1.AmorphousCarbonNitrideFilms 71
4.2.ExperimentalProcedures 72
4.2.1.FilmSynthesis 72
4.2.2.FilmCharacterization 73
4.3.ResultsandDiscussion 74
5.INAFNLDUEPNRCOEPEORFTIDEESPOOSFITAIMOONRTPEHMOPUESRACTAURRBEONONFITLHMESMICROSTRUCTURES99
5.1.EffectofSubstrateTemperature 99
5.2.ExperimentalProcedure 99
5.2.1.FilmSynthesis 99
5.2.2.FilmCharacterization 100
5.3.ResultsandDiscussion 100
6.MECHANICALPROPERTIESOFAMORPHOUSCARBONFILMSMEASURED
BYNANOINDENTATIONMEASUREMENTS 115
6.1.MicrostructureRelatedMechanicalProperties 1H1°5
6.2.NanoindentationTest
6.2.1.IndentationHardnessandModulus 116
6.2.2.Load-DepthComplianceCurves 1H197
6.3.ResultsandDiscussion
7.CONCLUSION 138
LISTOFREFERENCES 141
BIOGRAPHICALSKETCH 148
Vll
LISTOFTABLES
Table Page
2-1.Thebondlengthandenergyofvariouscarboncouples 28
4-1.XPSresultsof(a)CIsand(b)NIsforCNXatdifferentlaserfluences 82
4-2.XPSresultsof(a)CIsand(b)NIsforCNXatdifferentnitrogenpressures 83
viii
LISTOFFIGURES
Figure page
22--1.Differenttypesofcarbonbondinghybridizations 29
23--2.Aternaryphasediagramofbondinginamorphouscarbonalloys 30
2-3.Schematicofvariousdepositionsystems 31
2-4.Schematicofdifferentbondingcharacteristiconionenergy 32
5.Schematicofthebasicprocessesinsubplantationmodel 33
1.SchematicofthePLDchamber 49
3-2.RamanspectraofDLCatdifferentlaserfluences 50
3-3.AfittingofDLCRamanspectrumbyD-peakandG-peak 51
3-4-1.FittedRamanspectraofDLCat(a)2.4and(b)4.0J/cm2 52
3-4-2.FittedRamanspectraofDLCat(c)5.6and(d)7.2J/cm2 53
3-5.DependenceofIq/IgandG-widthonlaserfluence 54
3-6.DependenceofG-peakandD-peakpositionsonlaserfluence 55
3-7.AugerspectrumofDLCbyPLD 56
3-8.IRstretchingofDLCbyPLD 57
3-9.XPSsurveyscanofDLCbyPLD 58
3-10.AfittingofXPSCIspeakofDLC 59
3-11-1.XPSCIspeakofDLCat(a)2.4and(b)4.0J/cm2 60
3-11-2.XPSCIspeakofDLCat(c)5.6and(d)7.2J/cm2 61
3-12.Variationofsp3inDLCatdifferentlaserfluences 62
3-13-1.2-DAFMimagesofDLCat(a)2.4and(b)4.0J/cm2 63
IX
3-13-2.2-DAFMimagesofDLCat(c)5.6and(d)7.2J/cm2 64
3-14-1.3-DAFMimagesofDLCat(a)2.4and(b)4.0J/cm2 65
3-14-2.3-DAFMimagesofDLCat(c)5.6and(d)7.2J/cm2 66
33--15.Dependenceof(a)RMSand(b)sp3%onlaserfluence 67
43--16.BucklingpatternsonhighlystressedDLC 68
3-17.Stressofthemulti-cycledepositedDLCatdifferentlaserfluences 69
18.XPSCIspeakofahighlystressedDLCbysinglecyclePLD 70
1.DependenceofNcontentonlaserfluence 84
4-2.DependenceofNcontentontheNPP 85
4-3.CIspeaksofN1CNXatdifferentlaserfluences 86
4-5.CIspeaksofCNXatdifferentNPP 88
4-6.NIspeaksofCNXatdifferentNPP 89
4-7.SummaryofXPSfittingfromTable4-2 90
4-
45--8.RamanspectraofCNXatdifferentlaserfluences 91
4-9.RamanspectraofCNXatdifferentlaserfluences 92
4-10.SummaryofCNXRamanresultsatdifferentlaserfluences 93
4-11.RamanspectraofCNXatdifferentNPP 94
4-12.3-DAFMimagesofCNXatNl\(a)2.4and(b)5.6J/cm2 95
4-13.DependenceofRMSofN1CNXonlaserfluence 96
4-14.AFMimagesofN2CNXat5.6J/cm2 97
15.RamanofparticulateonN2CNXat5.6J/cm2 98
1.DependenceoftheNcontentinCNXondepositiontemperature 105
5-2.XPSCIsspectraofDLCatdifferentdepositiontemperatures 106
5-3.XPSCIsspectraofN1CNXatdifferentdepositiontemperatures 107
5-4.RamanspectraforDLCatdifferentdepositiontemperatures 108
x