Table Of ContentFerroelectric Thin-film Waveguides in
title:
Integrated Optics and Optoelectronics
author: Prokhorov, A. M.; Khachaturian, O. A.
publisher: Cambridge International Science Publishing
isbn10 | asin: 189832610X
print isbn13: 9781898326106
ebook isbn13: 9780585119229
language: English
Ferroelectric thin films, Integrated optics,
subject
Optical wave guides.
publication date: 1996
lcc: TA1520.P76 1996eb
ddc: 548.8
Ferroelectric thin films, Integrated optics,
subject: Optical wave guides.
Page i
Ferroelectric Thin-Film Waveguides in
Integrated Optics and Optoelectronics
Page ii
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Page iii
Ferroelectric Thin-Film Waveguides in
Integrated Optics and Optoelectronics
A M Prokhorov, Yu S Kuz'minov, O A Khachaturyan
(General Physics Institute, Russian Academy of Sciences, Moscow)
Translated from the Russian by Marianna Tsaplina
CAMBRIDGE INTERNATIONAL SCIENCE PUBLISHING
Page iv
Published by Cambridge International Science Publishing
7 Meadow Walk, Great Abington. Cambridge CB1 6AZ, England
First published April 1996
© A M Prokhorov, Yu S Kuz'minov and O A Khachaturyan
© 1996 Cambridge International Science Publishing
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British Library Cataloguing in Publication Data
A catalogue record for this book is available from the British Library
ISBN 1 89832610X
Production Irina Stupak
Printed by St Edmundsbury Press, Bury St Edmunds, Suffolk,
England
Page v
Contents
Preface ix
Symbols xi
Introduction xiii
1 1
Epitaxial films of complex oxide compounds
1.1 Vacuum epitaxy 2
1.2 Gas-transport epitaxy 4
1.3 Films deposited by if sputtering 8
1.3.1 Thin films of LiNbO3 deposited on a sapphire 9
substrate
1.3.2 Tungsten bronze ferroelectric K3Li2Nb5O15 13
1.3.3 KNbO3 thin films 14
1.3.4 KTaxNb1-xO3 thin films 16
1.3.5. Thin films by pulsed laser deposition 17
1.3.6. Waveguides by MeV He ion implantation 20
1.3.7 Strip waveguides 21
1.3.8 Double waveguide 23
1.4 Autodiffused layers in lithium niobate and lithium 25
tantalate
1.4.1 Out-diffusion kinetics 27
1.5 The diffusion method for metals and oxides 33
1.5. 1 Diffusion of transition metals 37
1.5.2 Titanium diffusion 41
1.5.3 Copper diffusion 49
1.6 Proton-exchanged LiNbO3 waveguides 51
1.6.1 Ion-exchange processes in LiNbO3 53
1.6.2 Sample preparation and experimental methods 54
1.6.3 Annealed proton-exchanged waveguides 56
1.6.4 Waveguides fabricated using buffered melts 59
1.6.5 Proton diffusion 63
1.6.6 Waveguides using cinnamic acid 64
1.6.7 Proton-exchange waveguides of MgO-doped 66
and Nd:MgO-doped LiNbO3
1.7 Planar ion-exchanged KTiOPO4 waveguides 69
2 74
Liquid-phase epitaxy of ferrolelectrics
2.1 The epitaxial growth by melting (EGM) 74
2.2 The capillary liquid epitaxial (CLE) technique 78
2.2.1 CLE growth procedure 79
2.2.2. CLE growth and crystal quality 80
2.3 The liquid-phase epitaxy (LPE) technique 83
2.4 Physico-chemical basis of capillary liquid-phase 87
epitaxy
2.4.1 The phase diagram of LiVO3-LiNbO3 91
2.4.2 Phase diagram of LiVO3-Li(Nb,Ta)O3 92
pseudobinary system
2.4.3 The scheme of the growth cell 95
2.5 Kinetics of epitaxial growth of LiNbO3 97
2.5.1 The stationary crystallization model 97
2.5.2 Epitaxy under non-isothermic conditions 100
2.5.3 Determination of supersaturation U and 101
diffusion coefficient D
2.5.4 Epitaxy under isothermal conditions 106
2.6 Crystallization of films from LiNb1-y TayO3 solid 109
solutions
2.6.1 Liquid-phase epitaxial growth of Li(Nb,Ta)O3 112
films
2.7 Thin films of LiNbO3 doped with different 114
elements
2.8 Epitaxial ferroelectric films with perovskite 119
structure
2.8.1 Liquid-phase epitaxy of potassium niobate 119
Page vi
2.8.2 Growth of potassium lithium niobate films on 122
potassium bismuth niobate single crystals
2.9 Diffusion liquid-phase method of growing 123
immersed waveguide channels
2.9.1 Strip line structures 124
2.9.2 Symmetric waveguides 124
2.10 Growth of epitaxial films in the KTiOPO4 family 127
of crystals
3 131
Influence of electric current upon liquid-phase epitaxy of
ferroelectrics
3. 1. Electric field and crystallization 131
3.1.1 Bulk crystallization 131
3.1.2 Thin films 134
3.1.3 Liquid-phase electroepitaxy 136
3.2 Physical basis of liquid-phase electroepitaxy (The 138
theory of the method)
3.2.1 Temperature distribution in a system under the 138
action of an electric current
3.2.2 Film growth rate 141
3.2.3 Chemical composition control of the film 142
3.2.4 Initial stages of nucleation 143
3.3 The role of thermoelectric effects in the course of 149
liquid-phase electroepitaxy of ferroelectrics
3.4 Electro-LPE growth of lithium niobate-tantalate 151
films
3.4.1 Epitaxial growth 152
3.4.2 Electrochemical processes in the liquid phase 152
3.4.3 Growth kinetics of electro-LPE grown lithium 155
niobate-tantalate films
3.5 Optimization of conditions of epitaxial growth of 158
lithium niobate films with allowance for Joule heat
4 165
Structure and composition of light guiding films
4.1 Structure and physico-chemical properties of 165
lithium niobate and tantalate crystals
4.2 X-ray diffraction analysis of films 173
4.2.1 Layer composition 174
4.2.2 Monocrystallinity and interplanar distances 175
4.2.3 Measurement of strains in the diffused layer 178
4.2.4 Ti distribution in diffused layers 181
4.2.5 The structure of proton-exchanged LiNbO3 182
4.2.6 Orientation relations 184
4.3 Morphology and perfection of layers 185
4.3.1 Micromorphology of film surface for different 186
crystallographic orientations of the substrate
4.3.2 Diffusion-induced defects in films 188
4.4 Substrate-film interface and transition region 190
