Electron Beam-Specimen Interactions and Simulation Methods in Microscopy

292 Pages·2018·5.192 MB·English

by  Budhika G. Mendis

Electron Beam-Specimen
Interactions and Simulation
Methods in Microscopy
CurrentandfuturetitlesintheRoyalMicroscopical
Society—JohnWileySeries
Published
PrinciplesandPracticeofVariablePressure/EnvironmentalScanning
ElectronMicroscopy(VP-ESEM)
DebbieStokes
Aberration-CorrectedAnalyticalElectronMicroscopy
EditedbyRikBrydson
Diagnostic Electron Microscopy—A Practical Guide to Interpretation
andTechnique
EditedbyJohnW.Stirling,AlanCurry&BrianEyden
LowVoltageElectronMicroscopy—PrinciplesandApplications
EditedbyDavidC.Bell&NatashaErdman
StandardandSuper-ResolutionBioimagingDataAnalysis:APrimer
EditedbyAnnWheelerandRicardoHenriques
Electron Beam-Specimen Interactions and Simulation Methods in
Microscopy
BudhikaG.Mendis
Forthcoming
UnderstandingPracticalLightMicroscopy
JeremySanderson
AtlasofImagesandSpectraforElectronMicroscopists
EditedbyUrselBangert
FocusedIonBeamInstrumentation:TechniquesandApplications
DudleyFinch&AlexanderBuxbaum
Electron Beam-Specimen
Interactions and Simulation
Methods in Microscopy
Budhika G. Mendis
Department of Physics
Durham University, UK
Published in association with the Royal
Microscopical Society
Series Editor: Susan Brooks
Thiseditionfirstpublished2018
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Hardback:9781118456095
Coverdesign:Wiley
Coverimage:g=brightfieldimageofoverlappingstackingfaultsinaCu-Sialloy.Theshear(R)atthe
stackingfaultplanecausesaphaseshift2Πg⋅Rofthediffractedbeam,resultingintheblack-white
interferencecontrast.Ifsufficientnumberoffaultsoverlapsuchthatthenetg⋅Risaninteger,thecontrastis
suppressed.FromMendis,B.G,Jones,I.P.andSmallman,R.E.(2004),JournalofElectronMicroscopy53,
311.ReproducedwithpermissionofOxfordUniversityPress.
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10 9 8 7 6 5 4 3 2 1
Contents
Preface ix
1 Introduction 1
1.1 OrganisationandScopeoftheBook 3
References 8
2 TheMonteCarloMethod 9
2.1 PhysicalBackgroundandImplementation 11
2.1.1 ElasticScatteringByanAtomicNucleus 11
2.1.2 InelasticScatteringbyAtomicElectrons 18
2.1.3 ImplementationoftheMonteCarloAlgorithm 23
2.2 SomeApplicationsoftheMonteCarloMethod 27
2.2.1 SpatialResolutionandBackscatteredImaging 27
2.2.2 CharacteristicX-RayGeneration 34
2.2.3 CathodoluminescenceandElectronBeamInduced
CurrentMicroscopy 37
2.3 FurtherTopicsinMonteCarloSimulations 40
2.3.1 ClassicalorQuantumPhysics? 40
2.3.2 Spin–OrbitCouplingandtheMott
Cross-Section 43
2.3.3 DielectricModelofStoppingPowerand
SecondaryElectronEmission 46
2.4 Summary 49
References 50
3 MultisliceMethod 53
3.1 MathematicalTreatmentoftheMultisliceMethod 56
3.1.1 SpecimenTransmissionFunction 59
vi CONTENTS
3.1.2 FresnelPropagatorFunction 66
3.1.3 ObjectiveLensContrastTransferFunctionand
PartialCoherence 71
3.1.4 ImplementationoftheMultisliceAlgorithm 76
3.2 ApplicationsofMultisliceSimulations 78
3.2.1 HREMImagingandElectronCrystallography 78
3.2.2 CBEDandSTEMApplications:FrozenPhonon
Model 87
3.3 FurtherTopicsinMultisliceSimulation 93
3.3.1 AccuracyofMultisliceAlgorithms 93
3.3.2 IstheFrozenPhononModelPhysically
Realistic? 97
3.4 Summary 102
References 102
4 BlochWaves 105
4.1 BasicPrinciples 106
4.1.1 MathematicalBackground 106
4.1.2 ApplicationtoTwo-BeamTheory 111
4.1.3 PhenomenologicalModellingofThermalDiffuse
Scattering 116
4.1.4 BlochStatesinZone-AxisOrientations 124
4.2 ApplicationsofBlochWaveTheory 132
4.2.1 HREMImaging 132
4.2.2 HAADFImaging 134
4.2.3 BlochWaveScatteringByElasticStrainFields 144
4.3 FurtherTopicsinBlochWaves 149
4.3.1 DopantAtomImaginginSTEM 149
4.3.2 ElectronChannellingandItsUses 156
4.4 Summary 160
References 161
5 SingleElectronInelasticScattering 165
5.1 FundamentalsofInelasticScattering 166
5.1.1 ElectronExcitationinaSingleAtombyaPlane
Wave 166
5.1.2 MixedDynamicFormFactor 180
CONTENTS vii
5.1.3 YoshiokaEquationsandInelasticScattering
withinaCrystal 189
5.1.4 CoherenceinInelasticScattering 195
5.2 FineStructureofTheElectronEnergyLossSignal 201
5.2.1 OriginofFineStructure 201
5.2.2 CoreHoleEffects 206
5.2.3 MagneticCircularDichroism 209
5.3 Summary 211
References 212
6 ElectrodynamicTheoryofInelasticScattering 215
6.1 BulkandSurfaceEnergyLoss 216
6.1.1 EnergyLossinan‘Infinite‘Solid 216
6.1.2 PhononSpectroscopy 226
6.1.3 InterfaceandSurfaceContributions 232
6.2 RadiativePhenomena 244
6.2.1 CerenkovRadiationandBandGap
Measurement 244
6.2.2 TransitionRadiation 249
6.3 SimulatingLowEnergyLossEELSSpectra 253
6.3.1 DiscreteDipoleApproximation(DDA) 253
6.3.2 BoundaryElementMethod(BEM) 254
6.4 Summary 259
References 259
AppendixA TheFirstBornApproximationandAtomScattering
Factor 263
AppendixB Potentialforan‘Infinite’PerfectCrystal 267
AppendixC TheTransitionMatrixElementintheOneElectron
Approximation 269
AppendixD BulkEnergyLossintheRetardedRegime 271
Index 275