Download Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope PDF Free - Full Version
Download Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope by Huiliang Cao in PDF format completely FREE. No registration required, no payment needed. Get instant access to this valuable resource on PDFdrive.to!
About Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Detailed Information
| Author: | Huiliang Cao |
|---|---|
| Publication Year: | 2023 |
| ISBN: | 9789811992469 |
| Pages: | 231 |
| Language: | English |
| File Size: | 10.699 |
| Format: | |
| Price: | FREE |
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