Design, Technology and Characterization of Micromechanised Sensors and Actuators for Harsh

304 Pages·2015·6.42 MB·English

U P M
NIVERSIDAD OLITÉCNICA DE ADRID
ESCUELA TÉCNICA SUPERIOR
DE INGENIEROS DE TELECOMUNICACIÓN
TESIS DOCTORAL
Design, Technology and Characterization
of Micromechanised Sensors and Actuators
for Harsh Environments
Eugenio Sillero Herrero
2015

DEPARTAMENTO DE INGENIERÍA ELECTRÓNICA
ESCUELA TÉCNICA SUPERIOR
DE INGENIEROS DE TELECOMUNICACIÓN
TESIS DOCTORAL
Design, Technology and Characterization
of Micromechanised Sensors and Actuators
for Harsh Environments
AUTOR:
Eugenio Sillero Herrero
Ingeniero de Telecomunicación
DIRECTOR:
Fernando Calle Gómez
Doctor en Ciencias Físicas
2015

Tribunal nombrado por el Magfco. y Excmo. Sr. Rector de la Universidad Politécnica
de Madrid, el día de de 20 .
Presidente:
Secretario:
Vocal:
Vocal:
Vocal:
Realizando el acto de defensa y lectura de la Tesis el día de de 20 en
la Escuela Técnica Superior de Ingenieros de Telecomunicación, este Tribunal decide
otorgar la calificación de
EL PRESIDENTE EL SECRETARIO
LOS VOCALES

To Marina and our
little family.

Acknowledgements
I have to thank all the ISOM staff that has co-worked with me, either sharing
topic or sharing lab. It has been a real pleasure to work with all of you, students,
technicians and professors. I owe special gratitude to my advisor, Fernando Calle,
that has always supported me. A special mention is also owed to Sebastian Dubiel
and Javier Zugasti that have contributed to the work presented in this volume.
I also want to have a word about the people that opened their labs so I could
work with them during my research years. First, the people I met at the TUD, Prof.
Hartnagel, Prof. Pavlidis, Eunjung Cho, Sangyong Seo, Dr. Mutamba and Oktay
Yilmazoglu. Of course I also remember the fantastic folk that I worked with at the
IAF,speciallyVolkerCimalla,VadimLebedev,OliverWilliams,Claus-ChristianRöhlig,
Fabian Knöbber, Wilhelm Pfletcher, Waldemar Smirnov, Christoph Nebel and many
others.
Finally, I must thank the wonderful family I have. They have supported and
encouraged me along the whole path.