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Cu Damascene PDF

4 Pages·2012·English
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by ['jeren1228']| 2012| 4 pages| English

About Cu Damascene

The document discusses the transition from aluminum to copper interconnects in integrated circuits due to copper's superior electrical and thermal properties. It also describes the damascene process and chemical mechanical planarization (CMP) technique used to implement copper interconnects. CMP involves rotating the wafer against a polishing pad with slurry to planarize the wafer surface and is critical for multi-level chip fabrication.

Detailed Information

Author:['jeren1228']
Publication Year:2012
Pages:4
Language:English
Format:PDF
Price:FREE
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