Chemical Vapour Deposition (CVD): Advances, Technology and Applications

417 Pages·2019·80.434 MB·English

by  Kwang-Leong Choy

Chemical Vapour Deposition (CVD)
Series in Materials Science and Engineering
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Chemical Vapour Deposition
(CVD)
Advances, Technology, and Applications
Edited by
Kwang Leong Choy
Director, UCL Institute for Materials Discovery
and
Professor of Materials Discovery
University College London, United Kingdom
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Library of Congress Cataloging-in-Publication Data
Names: Choy, Kwang Leong, editor.
Title: Chemical vapour deposition (CVD) : technology and applications /
Kwang Leong Choy, editor.
Description: First edition. | Boca Raton, FL : CRC Press/Taylor & Francis
Group, 2018. | Series: Series in materials science and engineering ; 22 |
“A CRC title, part of the Taylor & Francis imprint, a member of the Taylor
& Francis Group, the academic division of T&F Informa plc.” | Includes
bibliographical references and index.
Identifiers: LCCN 2018013160 | ISBN 9781466597761 (hardback : acid-free paper)
Subjects: LCSH: Chemical vapor deposition. | Nanostructured materials.
Classification: LCC TS695 .C555 2018 | DDC 620.1/15--dc23
LC record available at https://lccn.loc.gov/2018013160
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Dedication
Thanks to Isaac, Emer and Albert for their great
support and inspiration.

Contents
Preface xiii
Editor xv
Contributors xvii
1 Introduction 1
Kwang Leong Choy and Cigang Xu
1.1 Chemical vapour deposition: Fundamentals and process principles 1
1.1.1 Definition 1
1.1.2 A brief history and development of CVD 2
1.1.3 Fundamentals and process principles 4
1.1.3.1 Thermodynamics/kinetics/mass transport of CVD 4
1.1.3.2 CVD precursors delivery, properties, and chemistry 8
1.1.3.3 CVD process parameters and control/monitoring to ensure
reliability and reproducibility 12
1.2 Advances in CVD deposition technologies, growth of materials, and applications 14
1.2.1 Large-area and high-volume production 15
1.2.2 Multiple functions 15
1.2.3 New materials and processes 15
1.3 Variant vacuum CVD methods 17
1.3.1 Vacuum-based methods 17
1.3.1.1 Plasma-enhanced CVD 17
1.3.1.2 Microwave-assisted CVD 20
1.3.1.3 Metalorganic CVD 23
1.3.1.4 Molecular-beam epitaxy 28
1.3.1.5 Chemical-beam epitaxy 34
1.3.1.6 Atomic layer deposition 37
1.3.1.7 Energetic ion-assisted CVD 43
1.3.1.8 Laser/photo-assisted CVD 49
1.3.2 Non-vacuum methods 51
1.3.2.1 Atmospheric pressure CVD 51
1.3.2.2 Atmospheric pressure MOCVD 58
1.3.2.3 Aerosol-assisted CVD 58
1.3.2.4 Electrostatic spray-assisted vapour deposition 62
1.3.2.5 Flame-assisted CVD 69
vii
viii Contents
1.4 CVD of polymers 71
1.5 CVD modelling and simulation 76
1.6 CVD and its variants as tools for processing advanced materials to address energy,
engineering, and biomedical grand challenges 80
1.6.1 Energy 80
1.6.2 Engineering 81
1.6.3 Biomedical 82
1.7 Advantages and limitations of CVD 83
1.8 Comparison of CVD with other processing techniques : Structure, properties, cost,
sustainability, and versatility 84
1.9 Summary 89
Acknowledgement 89
References 89
2 Chemical vapour deposition of ultrafine particles 105
Cigang Xu and Kwang Leong Choy
2.1 Introduction 105
2.2 Processing, formation mechanism, structure, and properties 107
2.2.1 Processing methods using solid precursors 108
2.2.1.1 Condensation method 108
2.2.1.2 Laser-ablation method 109
2.2.1.3 Arc-discharge method 111
2.2.1.4 Reactive sputtering method 114
2.2.1.5 Ion-beam-based method 116
2.2.2 Processing methods using liquid or vapour precursors 119
2.2.2.1 Thermal CVD method 119
2.2.2.2 MOCVD method 120
2.2.2.3 Spray pyrolysis/ aerosol-assisted CVD 122
2.2.2.4 Flame synthesis 124
2.2.2.5 Flame spray pyrolysis 124
2.2.2.6 Laser pyrolysis 127
2.2.2.7 Plasma-based synthesis 128
2.2.2.8 MBE method 129
2.2.2.9 Ionisation method 131
2.2.2.10 Atomic layer deposition 131
2.2.3 Scale-up production 136
2.3 Scientific and technical issues and process control for producing high-performance
nanoparticles for applications in structural, clean energy, biomedical, and
environmental sectors 141
2.3.1 Structural applications 141
2.3.2 Clean energy 142
2.3.3 Biomedical applications 143
2.3.4 Environmental 144
2.4 Summary 146
References 146
3 CVD of nanowires and nanotubes, mass production, and industrialization 153
Cigang Xu and Kwang Leong Choy
3.1 Introduction 153
3.2 Preparation, structure, properties, and applications of nanostructures 155
3.2.1 Carbon nanotubes 155
3.2.2 Si and Ge nanowires 166
Contents ix
3.2.3 III–V 1D nanomaterials 168
3.2.4 II–VI 1D nanomaterials 170
3.2.5 Oxides 171
3.2.6 Carbides 175
3.2.7 Nitrides 179
3.2.8 Elemental nanowires 184
3.2.9 Complex structures of 1D nanomaterial 185
3.2.10 Structural applications 196
3.2.11 Clean energy applications 197
3.2.12 Biomedical applications 200
3.2.13 Environmental applications 202
3.3 Scale-up prototype production and industrialization of nanowires and nanotubes 204
3.3.1 Scale-up prototype production of nanowires and nanotubes 204
3.3.1.1 Carbon nanotubes 204
3.3.1.2 Multi-walled carbon nanotubes 205
3.3.1.3 Bush-style MWNTs 207
3.3.1.4 Double-walled carbon nanotubes 207
3.3.1.5 Single-walled carbon nanotubes 211
3.3.1.6 Bush-style SWNTs 215
3.3.1.7 Other 1D materials 216
3.3.2 Industrialization of nanotubes 217
3.3.2.1 Industrialisation of multi-walled carbon nanotubes 218
3.3.2.2 Industrialisation of single-walled carbon nanotubes 221
3.3.2.3 Environment, health, and safety issues 223
3.3.2.4 Summary and outlook 224
References 225
4 CVD of flat monolayer of 2D atomics honeycomb structure and their applications 245
Manoj Kumar Singh, Dhananjay K. Sharma, Gonzalo Otero-Irurueta, and María J. Hortigüela
4.1 Introduction 245
4.2 Graphene 246
4.2.1 Electronic structure of single-layer graphene 246
4.2.2 Graphene properties and synthesis 248
4.2.2.1 Graphene on single crystals grown under UHV conditions 248
4.2.2.2 Liquid phase exfoliation 249
4.2.2.3 Graphene on silicon carbide 250
4.2.2.4 Graphene by state-of-the-art technique chemical vapour
deposition 252
4.2.3 From the laboratory to the industry 253
4.2.4 Quality comparison 257
4.2.5 Doping of graphene 258
4.3 Silicene 259
4.3.1 Electronic structure of silicene 260
4.3.2 Synthesis of silicene on surfaces 260
4.3.2.1 First synthesis of silicene on silver substrates 260
4.3.2.2 Silicene on other substrates 262
4.3.3 Controversy – discrepancies 262
4.3.4 From the laboratory to the industry 263